DE68912900D1 - Verfahren und Gerät zur Inspektion von Schichten. - Google Patents
Verfahren und Gerät zur Inspektion von Schichten.Info
- Publication number
- DE68912900D1 DE68912900D1 DE89121775T DE68912900T DE68912900D1 DE 68912900 D1 DE68912900 D1 DE 68912900D1 DE 89121775 T DE89121775 T DE 89121775T DE 68912900 T DE68912900 T DE 68912900T DE 68912900 D1 DE68912900 D1 DE 68912900D1
- Authority
- DE
- Germany
- Prior art keywords
- inspecting
- layers
- inspecting layers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
- G01N21/95684—Patterns showing highly reflecting parts, e.g. metallic elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/64—Fluorescence; Phosphorescence
- G01N21/6428—Measuring fluorescence of fluorescent products of reactions or of fluorochrome labelled reactive substances, e.g. measuring quenching effects, using measuring "optrodes"
- G01N2021/6439—Measuring fluorescence of fluorescent products of reactions or of fluorochrome labelled reactive substances, e.g. measuring quenching effects, using measuring "optrodes" with indicators, stains, dyes, tags, labels, marks
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
- G01N2021/8887—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
- G01N2021/95638—Inspecting patterns on the surface of objects for PCB's
- G01N2021/95646—Soldering
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/06—Illumination; Optics
- G01N2201/061—Sources
- G01N2201/06193—Secundary in-situ sources, e.g. fluorescent particles
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP29692888A JPH02141604A (ja) | 1988-11-24 | 1988-11-24 | 基板検査方法 |
JP1038993A JP2782759B2 (ja) | 1989-02-17 | 1989-02-17 | ハンダ付け外観検査装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE68912900D1 true DE68912900D1 (de) | 1994-03-17 |
DE68912900T2 DE68912900T2 (de) | 1994-09-15 |
Family
ID=26378304
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE1989612900 Expired - Fee Related DE68912900T2 (de) | 1988-11-24 | 1989-11-24 | Verfahren und Gerät zur Inspektion von Schichten. |
Country Status (2)
Country | Link |
---|---|
EP (1) | EP0370527B1 (de) |
DE (1) | DE68912900T2 (de) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02231510A (ja) * | 1989-03-02 | 1990-09-13 | Omron Tateisi Electron Co | 基板検査装置 |
JP3072998B2 (ja) * | 1990-04-18 | 2000-08-07 | 株式会社日立製作所 | はんだ付け状態検査方法及びその装置 |
NO914574L (no) * | 1991-11-22 | 1993-05-24 | Elkem Technology | Fremgangsmaate for detektering av pin-hull i strengestoeptemetallemne |
EP0871027A3 (de) * | 1997-04-07 | 1999-05-19 | Hewlett-Packard Company | Prüfung gedruckter Leiterplatten |
EP1111375B1 (de) * | 1999-12-22 | 2014-12-17 | Novartis AG | Prüfeinrichtung für Verpackungen |
CN101799325B (zh) * | 2010-01-14 | 2013-11-27 | 杭州远方光电信息股份有限公司 | 一种荧光材料激发测量装置 |
JP6687656B2 (ja) | 2018-03-19 | 2020-04-28 | ファナック株式会社 | 検査装置およびその検査方法 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0236738A3 (de) * | 1986-02-05 | 1988-12-21 | OMRON Corporation | Verfahren zur Dateneingabe einer bestückten gedruckten Referenzleiterplatte für die Bildverarbeitung eines automatischen Prüfgerätes für bestückte gedruckte Leiterplatten |
JPS62180250A (ja) * | 1986-02-05 | 1987-08-07 | Omron Tateisi Electronics Co | 部品実装基板の検査方法 |
SG66545A1 (en) * | 1988-05-09 | 1999-07-20 | Omron Tateisi Electronics Co | Apparatus for inspecting printed circuit boards and the like and method of operating the same |
-
1989
- 1989-11-24 EP EP89121775A patent/EP0370527B1/de not_active Expired - Lifetime
- 1989-11-24 DE DE1989612900 patent/DE68912900T2/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP0370527A1 (de) | 1990-05-30 |
EP0370527B1 (de) | 1994-02-02 |
DE68912900T2 (de) | 1994-09-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |