DE68912491T2 - Magnetlager. - Google Patents

Magnetlager.

Info

Publication number
DE68912491T2
DE68912491T2 DE68912491T DE68912491T DE68912491T2 DE 68912491 T2 DE68912491 T2 DE 68912491T2 DE 68912491 T DE68912491 T DE 68912491T DE 68912491 T DE68912491 T DE 68912491T DE 68912491 T2 DE68912491 T2 DE 68912491T2
Authority
DE
Germany
Prior art keywords
magnetic bearings
bearings
magnetic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE68912491T
Other languages
English (en)
Other versions
DE68912491D1 (de
Inventor
Akira C O Nippon Ferr Yamamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NIPPON FERROFLUIDICS KK
Original Assignee
NIPPON FERROFLUIDICS KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NIPPON FERROFLUIDICS KK filed Critical NIPPON FERROFLUIDICS KK
Application granted granted Critical
Publication of DE68912491D1 publication Critical patent/DE68912491D1/de
Publication of DE68912491T2 publication Critical patent/DE68912491T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/02—Parts of sliding-contact bearings
    • F16C33/04—Brasses; Bushes; Linings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/0459—Details of the magnetic circuit
    • F16C32/0461—Details of the magnetic circuit of stationary parts of the magnetic circuit
    • F16C32/0465—Details of the magnetic circuit of stationary parts of the magnetic circuit with permanent magnets provided in the magnetic circuit of the electromagnets
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/051—Axial thrust balancing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/0444—Details of devices to control the actuation of the electromagnets
    • F16C32/0446—Determination of the actual position of the moving member, e.g. details of sensors
    • F16C32/0448—Determination of the actual position of the moving member, e.g. details of sensors by using the electromagnet itself as sensor, e.g. sensorless magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/0474—Active magnetic bearings for rotary movement
    • F16C32/0476—Active magnetic bearings for rotary movement with active support of one degree of freedom, e.g. axial magnetic bearings
    • F16C32/0478—Active magnetic bearings for rotary movement with active support of one degree of freedom, e.g. axial magnetic bearings with permanent magnets to support radial load

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
DE68912491T 1988-10-07 1989-10-06 Magnetlager. Expired - Lifetime DE68912491T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63254620A JP3041342B2 (ja) 1988-10-07 1988-10-07 磁気軸受装置

Publications (2)

Publication Number Publication Date
DE68912491D1 DE68912491D1 (de) 1994-03-03
DE68912491T2 true DE68912491T2 (de) 1994-06-16

Family

ID=17267563

Family Applications (1)

Application Number Title Priority Date Filing Date
DE68912491T Expired - Lifetime DE68912491T2 (de) 1988-10-07 1989-10-06 Magnetlager.

Country Status (5)

Country Link
US (1) US5068558A (de)
EP (1) EP0362882B1 (de)
JP (1) JP3041342B2 (de)
KR (1) KR0157967B1 (de)
DE (1) DE68912491T2 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005025588B4 (de) * 2005-06-03 2017-12-07 Lust Antriebstechnik Gmbh Anordnung zur Positionsmessung bei einer magnetisch gelagerten Welle

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2269862B (en) * 1992-08-22 1996-05-08 Glacier Metal Co Ltd Electromagnetic bearing arrangement
US5660397A (en) * 1994-09-23 1997-08-26 Holtkamp; William H. Devices employing a liquid-free medium
FR2729722B1 (fr) * 1995-01-20 1997-04-18 Aerospatiale Palier magnetique a actionneur incorporant son capteur
GB9603966D0 (en) * 1996-02-24 1996-04-24 Glacier Metal Co Ltd Rotor arrangement including axial displacement rate transducer
US6008558A (en) * 1998-09-17 1999-12-28 Sundstrand Corporation L-shaped magnetic thrust bearing
FR2785734A1 (fr) 1998-11-05 2000-05-12 Aerospatiale Dispositif magnetique pour corps tournant et ensemble mecanique le comportant
DE19860814A1 (de) 1998-12-30 2000-07-20 Teldix Gmbh Verfahren und Einrichtung zur Verbesserung des dynamischen Verhaltens eines Magnetlagers
US6392428B1 (en) * 1999-11-16 2002-05-21 Eaglestone Partners I, Llc Wafer level interposer
KR100666317B1 (ko) * 1999-12-15 2007-01-09 삼성전자주식회사 구동 신호 인가시점 결정모듈, 이를 포함한 액정표시패널어셈블리 및 액정표시패널 어셈블리의 구동 방법
JP2001352114A (ja) * 2000-06-08 2001-12-21 Ebara Corp エキシマレーザ装置用磁気軸受装置
US6537831B1 (en) * 2000-07-31 2003-03-25 Eaglestone Partners I, Llc Method for selecting components for a matched set using a multi wafer interposer
US6686657B1 (en) 2000-11-07 2004-02-03 Eaglestone Partners I, Llc Interposer for improved handling of semiconductor wafers and method of use of same
US20020078401A1 (en) * 2000-12-15 2002-06-20 Fry Michael Andrew Test coverage analysis system
US20020076854A1 (en) * 2000-12-15 2002-06-20 Pierce John L. System, method and apparatus for constructing a semiconductor wafer-interposer using B-Stage laminates
US6524885B2 (en) * 2000-12-15 2003-02-25 Eaglestone Partners I, Llc Method, apparatus and system for building an interposer onto a semiconductor wafer using laser techniques
US6673653B2 (en) * 2001-02-23 2004-01-06 Eaglestone Partners I, Llc Wafer-interposer using a ceramic substrate
US9853525B2 (en) 2012-06-12 2017-12-26 Abb Research Ltd. Magnetic bearing assembly and arrangement of position sensors for a magnetic bearing assembly

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2213470B2 (de) * 1972-03-20 1980-04-10 Padana Ag, Zug (Schweiz) Magnetisches Lager
US3909082A (en) * 1972-08-30 1975-09-30 Hitachi Ltd Magnetic bearing devices
DE2355104A1 (de) * 1973-11-03 1975-05-15 Bbc Brown Boveri & Cie Elektromagnetisches axiallager
DE2451972C3 (de) * 1974-10-31 1979-09-13 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Aktives magnetisches Radiallager
FR2377549A1 (fr) * 1977-01-12 1978-08-11 Europ Propulsion Montage de rotor court de grand diametre
US4167296A (en) * 1977-12-30 1979-09-11 Sperry Rand Corporation Protective control system for magnetic suspension and magnetically suspended devices
JPS5881217A (ja) * 1981-11-11 1983-05-16 Seiko Instr & Electronics Ltd ５自由度制御形磁気軸受装置
JPS5919714A (ja) * 1982-07-26 1984-02-01 Toshiba Corp 磁気軸受装置
JPS5983828A (ja) * 1982-11-02 1984-05-15 Seiko Instr & Electronics Ltd 磁気軸受
EP0192836A3 (de) * 1985-03-01 1988-07-20 Maschinenfabrik Rieter Ag Verwendung einer magnetischen Lageranordnung
JPS6220408A (ja) * 1985-07-19 1987-01-29 Fujitsu Ltd 自動利得制御装置
US4642501A (en) * 1985-10-15 1987-02-10 Sperry Corporation Magnetic suspension and pointing system with flux feedback linearization
JPH0198708A (ja) * 1987-10-07 1989-04-17 Ebara Res Co Ltd ラジアル磁気軸受装置
US4920291A (en) * 1989-01-19 1990-04-24 Contraves Goerz Corporation Magnetic thrust bearing with high force modulation capability

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005025588B4 (de) * 2005-06-03 2017-12-07 Lust Antriebstechnik Gmbh Anordnung zur Positionsmessung bei einer magnetisch gelagerten Welle

Also Published As

Publication number Publication date
JPH02102918A (ja) 1990-04-16
DE68912491D1 (de) 1994-03-03
EP0362882B1 (de) 1994-01-19
EP0362882A3 (en) 1990-06-13
KR900006699A (ko) 1990-05-08
EP0362882A2 (de) 1990-04-11
US5068558A (en) 1991-11-26
KR0157967B1 (ko) 1999-05-01
JP3041342B2 (ja) 2000-05-15

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee