DE68910692D1 - Elektronisch gesteuerte Cryopumpe. - Google Patents
Elektronisch gesteuerte Cryopumpe.Info
- Publication number
- DE68910692D1 DE68910692D1 DE90901179T DE68910692T DE68910692D1 DE 68910692 D1 DE68910692 D1 DE 68910692D1 DE 90901179 T DE90901179 T DE 90901179T DE 68910692 T DE68910692 T DE 68910692T DE 68910692 D1 DE68910692 D1 DE 68910692D1
- Authority
- DE
- Germany
- Prior art keywords
- electronically controlled
- cryopump
- controlled cryopump
- electronically
- controlled
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
- F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S417/00—Pumps
- Y10S417/901—Cryogenic pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/243,707 US4918930A (en) | 1988-09-13 | 1988-09-13 | Electronically controlled cryopump |
PCT/US1989/003932 WO1990002878A2 (en) | 1988-09-13 | 1989-09-12 | Electronically controlled cryopump |
Publications (2)
Publication Number | Publication Date |
---|---|
DE68910692D1 true DE68910692D1 (de) | 1993-12-16 |
DE68910692T2 DE68910692T2 (de) | 1994-04-28 |
Family
ID=22919801
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE68923184T Expired - Lifetime DE68923184T2 (de) | 1988-09-13 | 1989-09-12 | Elektronisch gesteuerte Kryopumpe. |
DE90901179T Expired - Lifetime DE68910692T2 (de) | 1988-09-13 | 1989-09-12 | Elektronisch gesteuerte Cryopumpe. |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE68923184T Expired - Lifetime DE68923184T2 (de) | 1988-09-13 | 1989-09-12 | Elektronisch gesteuerte Kryopumpe. |
Country Status (6)
Country | Link |
---|---|
US (3) | US4918930A (de) |
EP (2) | EP0436673B1 (de) |
JP (1) | JP2873031B2 (de) |
CA (1) | CA1322105C (de) |
DE (2) | DE68923184T2 (de) |
WO (1) | WO1990002878A2 (de) |
Families Citing this family (91)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5338157B1 (en) * | 1992-09-09 | 1999-11-02 | Sims Deltec Inc | Systems and methods for communicating with ambulat |
DE3853512T2 (de) * | 1987-11-09 | 1995-11-23 | Sharp Kk | Einrichtung für Rechner oder rechnergesteuerte Systeme zum Erzeugen einer Hilfe-Anzeige. |
US6022195A (en) | 1988-09-13 | 2000-02-08 | Helix Technology Corporation | Electronically controlled vacuum pump with control module |
US6318093B2 (en) * | 1988-09-13 | 2001-11-20 | Helix Technology Corporation | Electronically controlled cryopump |
US4918930A (en) * | 1988-09-13 | 1990-04-24 | Helix Technology Corporation | Electronically controlled cryopump |
US5443368A (en) * | 1993-07-16 | 1995-08-22 | Helix Technology Corporation | Turbomolecular pump with valves and integrated electronic controls |
DE4006755A1 (de) * | 1990-03-03 | 1991-09-05 | Leybold Ag | Zweistufige kryopumpe |
DE59101463D1 (de) * | 1990-11-19 | 1994-05-26 | Leybold Ag | Verfahren zur regeneration einer kryopumpe sowie zur durchführung dieses verfahrens geeignete kryopumpe. |
JPH04303186A (ja) * | 1991-03-29 | 1992-10-27 | Aisin Seiki Co Ltd | クライオポンプの再生装置 |
US5176004A (en) * | 1991-06-18 | 1993-01-05 | Helix Technology Corporation | Electronically controlled cryopump and network interface |
US5265431A (en) * | 1991-06-18 | 1993-11-30 | Helix Technology Corporation | Electronically controlled cryopump and network interface |
WO1993005859A1 (en) * | 1991-09-19 | 1993-04-01 | The United States Of America, As Represented By The Secretary Of The Department Of Health And Human Services | Miniature cryosorption vacuum pump |
US5651667A (en) * | 1991-10-11 | 1997-07-29 | Helix Technology Corporation | Cryopump synchronous motor load monitor |
US5291740A (en) * | 1992-07-02 | 1994-03-08 | Schnurer Steven D | Defrosting tool for cryostat cold head interface |
US5375424A (en) * | 1993-02-26 | 1994-12-27 | Helix Technology Corporation | Cryopump with electronically controlled regeneration |
GB2309750B (en) * | 1993-02-26 | 1997-09-24 | Helix Tech Corp | Cryogenic vacuum pump with electronically controlled regeneration |
US6902378B2 (en) * | 1993-07-16 | 2005-06-07 | Helix Technology Corporation | Electronically controlled vacuum pump |
DE69531313T2 (de) * | 1994-04-28 | 2004-05-13 | Ebara Corp. | Regeneration einer Kryopumpe |
US5517823A (en) * | 1995-01-18 | 1996-05-21 | Helix Technology Corporation | Pressure controlled cryopump regeneration method and system |
DE19781645B4 (de) * | 1996-03-20 | 2005-12-01 | Helix Technology Corp., Mansfield | Reinigungs- und Grob- bzw. Vorvakuum-Cryopumpenregenerationsverfahren, Cryopumpe und Steuer- bzw. Regeleinrichtung |
US5971711A (en) * | 1996-05-21 | 1999-10-26 | Ebara Corporation | Vacuum pump control system |
US5963198A (en) * | 1996-12-23 | 1999-10-05 | Snap-On Technologies, Inc. | Low-cost user interface for refrigerant recycling machine |
US5765378A (en) | 1996-12-31 | 1998-06-16 | Helix Technology Corporation | Method and apparatus for detecting a loss of differential pressure in a cryogenic refrigerator |
US5775109A (en) * | 1997-01-02 | 1998-07-07 | Helix Technology Corporation | Enhanced cooldown of multiple cryogenic refrigerators supplied by a common compressor |
US5782096A (en) * | 1997-02-05 | 1998-07-21 | Helix Technology Corporation | Cryopump with improved shielding |
US5979225A (en) * | 1997-08-26 | 1999-11-09 | Applied Materials, Inc. | Diagnosis process of vacuum failure in a vacuum chamber |
US6272400B1 (en) | 1998-07-13 | 2001-08-07 | Helix Technology Corporation | Vacuum network controller |
US6257001B1 (en) | 1999-08-24 | 2001-07-10 | Lucent Technologies, Inc. | Cryogenic vacuum pump temperature sensor |
JP4274648B2 (ja) | 1999-09-29 | 2009-06-10 | 住友重機械工業株式会社 | クライオポンプの制御装置 |
US6318091B1 (en) | 1999-10-28 | 2001-11-20 | Helix Technology Corporation | Cryopump system with modular electronics |
US6327863B1 (en) | 2000-05-05 | 2001-12-11 | Helix Technology Corporation | Cryopump with gate valve control |
US6530237B2 (en) | 2001-04-02 | 2003-03-11 | Helix Technology Corporation | Refrigeration system pressure control using a gas volume |
DE10120206A1 (de) * | 2001-04-24 | 2002-10-31 | Wabco Gmbh & Co Ohg | Verfahren zur Steuerung eines Kompressors |
US6510697B2 (en) | 2001-06-07 | 2003-01-28 | Helix Technology Corporation | System and method for recovering from a power failure in a cryopump |
US7555364B2 (en) * | 2001-08-22 | 2009-06-30 | MMI Controls, L.P. | Adaptive hierarchy usage monitoring HVAC control system |
US20030114942A1 (en) * | 2001-12-17 | 2003-06-19 | Varone John J. | Remote display module |
US8250483B2 (en) | 2002-02-28 | 2012-08-21 | Smiths Medical Asd, Inc. | Programmable medical infusion pump displaying a banner |
US8504179B2 (en) | 2002-02-28 | 2013-08-06 | Smiths Medical Asd, Inc. | Programmable medical infusion pump |
US20040261424A1 (en) * | 2003-06-27 | 2004-12-30 | Helix Technology Corporation | Integration of automated cryopump safety purge with set point |
US6920763B2 (en) * | 2003-06-27 | 2005-07-26 | Helix Technology Corporation | Integration of automated cryopump safety purge |
US6895766B2 (en) * | 2003-06-27 | 2005-05-24 | Helix Technology Corporation | Fail-safe cryopump safety purge delay |
DE602004005047T2 (de) | 2003-06-27 | 2007-09-27 | Helix Technology Corp., Mansfield | Integration einer automatisierten kryopumpensicherheitsspülung |
US20060254289A1 (en) * | 2003-08-20 | 2006-11-16 | Dirk Schiller | Vacuum device |
KR100782913B1 (ko) * | 2003-11-28 | 2007-12-07 | 스미도모쥬기가이고교 가부시키가이샤 | 물의 재생방법 및 장치 |
US8540493B2 (en) | 2003-12-08 | 2013-09-24 | Sta-Rite Industries, Llc | Pump control system and method |
US8954336B2 (en) | 2004-02-23 | 2015-02-10 | Smiths Medical Asd, Inc. | Server for medical device |
US8043070B2 (en) | 2004-08-26 | 2011-10-25 | Pentair Water Pool And Spa, Inc. | Speed control |
US7845913B2 (en) | 2004-08-26 | 2010-12-07 | Pentair Water Pool And Spa, Inc. | Flow control |
US7686589B2 (en) | 2004-08-26 | 2010-03-30 | Pentair Water Pool And Spa, Inc. | Pumping system with power optimization |
US7874808B2 (en) | 2004-08-26 | 2011-01-25 | Pentair Water Pool And Spa, Inc. | Variable speed pumping system and method |
US8602745B2 (en) | 2004-08-26 | 2013-12-10 | Pentair Water Pool And Spa, Inc. | Anti-entrapment and anti-dead head function |
US8469675B2 (en) | 2004-08-26 | 2013-06-25 | Pentair Water Pool And Spa, Inc. | Priming protection |
US8019479B2 (en) | 2004-08-26 | 2011-09-13 | Pentair Water Pool And Spa, Inc. | Control algorithm of variable speed pumping system |
US8480373B2 (en) | 2004-08-26 | 2013-07-09 | Pentair Water Pool And Spa, Inc. | Filter loading |
DE102004047853A1 (de) * | 2004-10-01 | 2006-04-20 | Festo Ag & Co. | Steuereinrichtung für wenigstens ein Saugelement |
US7289863B2 (en) | 2005-08-18 | 2007-10-30 | Brooks Automation, Inc. | System and method for electronic diagnostics of a process vacuum environment |
US8858526B2 (en) | 2006-08-03 | 2014-10-14 | Smiths Medical Asd, Inc. | Interface for medical infusion pump |
US8965707B2 (en) | 2006-08-03 | 2015-02-24 | Smiths Medical Asd, Inc. | Interface for medical infusion pump |
US8435206B2 (en) | 2006-08-03 | 2013-05-07 | Smiths Medical Asd, Inc. | Interface for medical infusion pump |
US8149131B2 (en) | 2006-08-03 | 2012-04-03 | Smiths Medical Asd, Inc. | Interface for medical infusion pump |
TWI585298B (zh) | 2008-04-04 | 2017-06-01 | 布魯克機械公司 | 利用錫銻合金的低溫泵及其使用方法 |
US8133197B2 (en) | 2008-05-02 | 2012-03-13 | Smiths Medical Asd, Inc. | Display for pump |
DE102008033859B4 (de) | 2008-07-19 | 2018-07-26 | Grundfos Holding A/S | Aktuatoreinheit mit separater Regelungseinheit |
US8313306B2 (en) | 2008-10-06 | 2012-11-20 | Pentair Water Pool And Spa, Inc. | Method of operating a safety vacuum release system |
US8564233B2 (en) | 2009-06-09 | 2013-10-22 | Sta-Rite Industries, Llc | Safety system and method for pump and motor |
US9556874B2 (en) | 2009-06-09 | 2017-01-31 | Pentair Flow Technologies, Llc | Method of controlling a pump and motor |
DE202010018330U1 (de) | 2010-01-19 | 2015-08-17 | Grundfos Management A/S | Pumpenaggregat |
EP2354553B1 (de) * | 2010-01-19 | 2016-11-16 | Grundfos Management A/S | Pumpenaggregat |
US11047389B2 (en) | 2010-04-16 | 2021-06-29 | Air Squared, Inc. | Multi-stage scroll vacuum pumps and related scroll devices |
BR112013014476A2 (pt) | 2010-12-08 | 2016-09-20 | Pentair Water Pool & Spa Inc | válvula de descarga de alívio de vácuo para um sistema de segurança de liberação de vácuo |
JP5634323B2 (ja) * | 2011-05-13 | 2014-12-03 | 住友重機械工業株式会社 | クライオポンプシステム、クライオポンプのための再生方法 |
JP5679913B2 (ja) | 2011-06-14 | 2015-03-04 | 住友重機械工業株式会社 | クライオポンプ制御装置、クライオポンプシステム、及びクライオポンプ監視方法 |
JP5822747B2 (ja) * | 2012-02-02 | 2015-11-24 | 住友重機械工業株式会社 | クライオポンプ |
US11329589B2 (en) * | 2012-03-28 | 2022-05-10 | Joy Global Underground Mining Llc | Ground fault detection methods on variable frequency drive systems |
US9885360B2 (en) | 2012-10-25 | 2018-02-06 | Pentair Flow Technologies, Llc | Battery backup sump pump systems and methods |
EP2948204B1 (de) | 2013-01-28 | 2021-08-25 | Smiths Medical ASD, Inc. | Medizinische sicherheitsvorrichtungen und verfahren |
JP2016153617A (ja) * | 2015-02-20 | 2016-08-25 | 住友重機械工業株式会社 | クライオポンプシステム、クライオポンプ制御装置、及びクライオポンプ再生方法 |
US10627050B1 (en) * | 2016-07-28 | 2020-04-21 | National Technology & Engineering Solutions Of Sandia, Llc | Cryogenic heating system |
EP3521620B1 (de) * | 2016-09-28 | 2020-11-04 | Iwaki Co., Ltd. | Pumpvorrichtung |
US10865793B2 (en) | 2016-12-06 | 2020-12-15 | Air Squared, Inc. | Scroll type device having liquid cooling through idler shafts |
US10613558B2 (en) * | 2017-09-13 | 2020-04-07 | Heatcraft Refrigeration Products Llc | Malfunction lighting |
CN112119219B (zh) | 2018-05-04 | 2022-09-27 | 空气平方公司 | 固定和动涡旋压缩机、膨胀机或真空泵的液体冷却 |
US20200025199A1 (en) | 2018-07-17 | 2020-01-23 | Air Squared, Inc. | Dual drive co-rotating spinning scroll compressor or expander |
US11067080B2 (en) | 2018-07-17 | 2021-07-20 | Air Squared, Inc. | Low cost scroll compressor or vacuum pump |
US11530703B2 (en) | 2018-07-18 | 2022-12-20 | Air Squared, Inc. | Orbiting scroll device lubrication |
US11473572B2 (en) | 2019-06-25 | 2022-10-18 | Air Squared, Inc. | Aftercooler for cooling compressed working fluid |
CN112483433B (zh) * | 2020-11-11 | 2022-07-05 | 上海裕达实业有限公司 | 一种内置真空传感器的便携式仪器分子泵 |
GB2601321A (en) * | 2020-11-25 | 2022-06-01 | Edwards Vacuum Llc | Monitoring the performance of a cryopump |
US11898557B2 (en) | 2020-11-30 | 2024-02-13 | Air Squared, Inc. | Liquid cooling of a scroll type compressor with liquid supply through the crankshaft |
US11885328B2 (en) | 2021-07-19 | 2024-01-30 | Air Squared, Inc. | Scroll device with an integrated cooling loop |
EP4300898A3 (de) * | 2023-11-08 | 2024-05-29 | Pfeiffer Vacuum Technology AG | Vakuumgerät |
Family Cites Families (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2949092A1 (de) * | 1979-12-06 | 1981-06-11 | Leybold-Heraeus GmbH, 5000 Köln | Kryopumpe |
US4354356A (en) * | 1980-05-02 | 1982-10-19 | Unisearch Limited | Temperature-cycled cold trap |
US4361418A (en) * | 1980-05-06 | 1982-11-30 | Risdon Corporation | High vacuum processing system having improved recycle draw-down capability under high humidity ambient atmospheric conditions |
FR2500908A1 (fr) * | 1981-03-02 | 1982-09-03 | Europ Agence Spatiale | Installation cryogenique a fonctionnement en l'absence de gravite, notamment pour missions spatiales |
CH652804A5 (en) * | 1981-03-10 | 1985-11-29 | Balzers Hochvakuum | Method for regenerating the low-temperature condensation surfaces of a cryopump and cryopump appliance for implementing the method |
US4438632A (en) * | 1982-07-06 | 1984-03-27 | Helix Technology Corporation | Means for periodic desorption of a cryopump |
US4456613A (en) * | 1982-12-27 | 1984-06-26 | E. I. Du Pont De Nemours And Company | 6-Keto- and 6-hydroxy-8-azaprostanoids and anti-ulcer use thereof |
US4546613A (en) * | 1983-04-04 | 1985-10-15 | Helix Technology Corporation | Cryopump with rapid cooldown and increased pressure |
GB2155263A (en) * | 1984-03-02 | 1985-09-18 | Philips Electronic Associated | Frequency synthesised multichannel radio apparatus |
DE3422417A1 (de) * | 1984-06-16 | 1985-12-19 | Kernforschungsanlage Jülich GmbH, 5170 Jülich | Verfahren und vorrichtung zur abtrennung einer gaskomponente aus einem gasgemisch durch ausfrieren |
US4602642A (en) * | 1984-10-23 | 1986-07-29 | Intelligent Medical Systems, Inc. | Method and apparatus for measuring internal body temperature utilizing infrared emissions |
US4633672A (en) * | 1985-02-19 | 1987-01-06 | Margaux Controls, Inc. | Unequal compressor refrigeration control system |
US4667477A (en) * | 1985-03-28 | 1987-05-26 | Hitachi, Ltd. | Cryopump and method of operating same |
DE3512614A1 (de) * | 1985-04-06 | 1986-10-16 | Leybold-Heraeus GmbH, 5000 Köln | Verfahren zur inbetriebnahme und/oder regenerierung einer kryopumpe und fuer dieses verfahren geeignete kryopumpe |
US4679401A (en) * | 1985-07-03 | 1987-07-14 | Helix Technology Corporation | Temperature control of cryogenic systems |
AT384668B (de) * | 1985-11-28 | 1987-12-28 | Welz Franz Transporte | Transportabler kuehlcontainer |
EP0250613B1 (de) * | 1986-06-23 | 1991-07-17 | Leybold Aktiengesellschaft | Kryopumpe und Verfahren zum Betrieb dieser Kryopumpe |
US4724677A (en) * | 1986-10-09 | 1988-02-16 | Foster Christopher A | Continuous cryopump with a device for regenerating the cryosurface |
US5060263A (en) * | 1988-03-09 | 1991-10-22 | Enigma Logic, Inc. | Computer access control system and method |
EP0336992A1 (de) * | 1988-04-13 | 1989-10-18 | Leybold Aktiengesellschaft | Verfahren und Vorrichtung zur Überprüfung der Funktion einer refrigeratorbetriebenen Kryopumpe |
ATE72301T1 (de) * | 1988-04-22 | 1992-02-15 | Leybold Ag | Verfahren zur adaption einer zweistufigen refrigerator-kryopumpe auf ein betimmtes gas. |
US5157928A (en) * | 1988-09-13 | 1992-10-27 | Helix Technology Corporation | Electronically controlled cryopump |
US4918930A (en) * | 1988-09-13 | 1990-04-24 | Helix Technology Corporation | Electronically controlled cryopump |
FR2671205B1 (fr) * | 1990-12-27 | 1995-01-20 | Telemecanique | Procede de controle de l'utilisation d'un poste de travail informatique par mot de passe et poste de travail informatique mettant en óoeuvre ce procede. |
GB9212266D0 (en) * | 1992-06-10 | 1992-07-22 | Racal Datacom Ltd | Access control |
-
1988
- 1988-09-13 US US07/243,707 patent/US4918930A/en not_active Expired - Lifetime
-
1989
- 1989-09-12 JP JP1509878A patent/JP2873031B2/ja not_active Expired - Lifetime
- 1989-09-12 WO PCT/US1989/003932 patent/WO1990002878A2/en active IP Right Grant
- 1989-09-12 EP EP90901179A patent/EP0436673B1/de not_active Expired - Lifetime
- 1989-09-12 DE DE68923184T patent/DE68923184T2/de not_active Expired - Lifetime
- 1989-09-12 CA CA000611136A patent/CA1322105C/en not_active Expired - Fee Related
- 1989-09-12 EP EP93200539A patent/EP0553935B1/de not_active Expired - Lifetime
- 1989-09-12 DE DE90901179T patent/DE68910692T2/de not_active Expired - Lifetime
-
1992
- 1992-09-11 US US07/944,040 patent/US5343708A/en not_active Expired - Lifetime
-
1994
- 1994-06-02 US US08/252,886 patent/US5450316A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
CA1322105C (en) | 1993-09-14 |
US4918930A (en) | 1990-04-24 |
WO1990002878A2 (en) | 1990-03-22 |
US5343708A (en) | 1994-09-06 |
EP0436673A1 (de) | 1991-07-17 |
US5450316A (en) | 1995-09-12 |
JPH04501751A (ja) | 1992-03-26 |
DE68923184T2 (de) | 1995-11-30 |
DE68910692T2 (de) | 1994-04-28 |
EP0436673B1 (de) | 1993-11-10 |
JP2873031B2 (ja) | 1999-03-24 |
EP0553935B1 (de) | 1995-06-21 |
DE68923184D1 (de) | 1995-07-27 |
WO1990002878A3 (en) | 1990-05-17 |
EP0553935A1 (de) | 1993-08-04 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8363 | Opposition against the patent | ||
8365 | Fully valid after opposition proceedings |