DE68908596T2 - Lagerausrüstung für Vakuumvorrichtung. - Google Patents

Lagerausrüstung für Vakuumvorrichtung.

Info

Publication number
DE68908596T2
DE68908596T2 DE89107807T DE68908596T DE68908596T2 DE 68908596 T2 DE68908596 T2 DE 68908596T2 DE 89107807 T DE89107807 T DE 89107807T DE 68908596 T DE68908596 T DE 68908596T DE 68908596 T2 DE68908596 T2 DE 68908596T2
Authority
DE
Germany
Prior art keywords
storage equipment
vacuum device
vacuum
equipment
storage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE89107807T
Other languages
English (en)
Other versions
DE68908596D1 (de
Inventor
Akira Yamamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NIPPON FERROFLUIDICS KK
Original Assignee
NIPPON FERROFLUIDICS KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NIPPON FERROFLUIDICS KK filed Critical NIPPON FERROFLUIDICS KK
Application granted granted Critical
Publication of DE68908596D1 publication Critical patent/DE68908596D1/de
Publication of DE68908596T2 publication Critical patent/DE68908596T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/16—Sealings between relatively-moving surfaces
    • F16J15/40—Sealings between relatively-moving surfaces by means of fluid
    • F16J15/43—Sealings between relatively-moving surfaces by means of fluid kept in sealing position by magnetic force
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/02—Parts of sliding-contact bearings
    • F16C33/04—Brasses; Bushes; Linings
    • F16C33/06—Sliding surface mainly made of metal
    • F16C33/10—Construction relative to lubrication
    • F16C33/1025—Construction relative to lubrication with liquid, e.g. oil, as lubricant
    • F16C33/103—Construction relative to lubrication with liquid, e.g. oil, as lubricant retained in or near the bearing
    • F16C33/1035—Construction relative to lubrication with liquid, e.g. oil, as lubricant retained in or near the bearing by a magnetic field acting on a magnetic liquid

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Sealing Using Fluids, Sealing Without Contact, And Removal Of Oil (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Sealing Of Bearings (AREA)
  • Sliding-Contact Bearings (AREA)
DE89107807T 1988-04-30 1989-04-28 Lagerausrüstung für Vakuumvorrichtung. Expired - Fee Related DE68908596T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63108178A JPH01279113A (ja) 1988-04-30 1988-04-30 真空装置用の軸受装置

Publications (2)

Publication Number Publication Date
DE68908596D1 DE68908596D1 (de) 1993-09-30
DE68908596T2 true DE68908596T2 (de) 1993-12-23

Family

ID=14477971

Family Applications (1)

Application Number Title Priority Date Filing Date
DE89107807T Expired - Fee Related DE68908596T2 (de) 1988-04-30 1989-04-28 Lagerausrüstung für Vakuumvorrichtung.

Country Status (5)

Country Link
US (1) US4955731A (de)
EP (1) EP0340684B1 (de)
JP (1) JPH01279113A (de)
KR (1) KR900016631A (de)
DE (1) DE68908596T2 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5660397A (en) * 1994-09-23 1997-08-26 Holtkamp; William H. Devices employing a liquid-free medium
US6592263B2 (en) * 2001-12-10 2003-07-15 Wen-Hao Chuang Efficient bearing
CN114635925B (zh) * 2022-02-23 2024-02-13 清华大学 基于表面织构的磁性液体密封装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2316920A (en) * 1938-10-28 1943-04-20 Landis & Gyr Ag Electricity meter
US4043612A (en) * 1975-06-06 1977-08-23 Ampex Corporation Bearing structure
NL8201747A (nl) * 1981-04-27 1982-11-16 Nippon Seiko Kk Fluidum lager van het dynamische druktype.
DE3140218A1 (de) * 1981-10-09 1983-04-28 Marker Patentverwertungsgesellschaft mbH, 6340 Baar Kraftmesssystem fuer sicherheits-skibindungen.
US4842426A (en) * 1985-09-09 1989-06-27 Nippon Seiko Kabushiki Kaisha Bearing assembly
US4671679A (en) * 1986-05-05 1987-06-09 Mechanical Technology Incorporated Magnetic fluid devices such as magnetic fluid bearings, seals, and the like and an automatic magnetic fluid supply control system therefor
US4717266A (en) * 1986-06-12 1988-01-05 Spectra-Physics, Inc. Low friction ferrofluid bearing arrangement
DE8705884U1 (de) * 1987-04-23 1987-06-19 Diesing, Iris, 7140 Ludwigsburg Mehrstufige Dichtungsvorrichtung mit Ferrofluid

Also Published As

Publication number Publication date
DE68908596D1 (de) 1993-09-30
EP0340684A3 (en) 1990-09-26
EP0340684B1 (de) 1993-08-25
KR900016631A (ko) 1990-11-14
JPH01279113A (ja) 1989-11-09
EP0340684A2 (de) 1989-11-08
US4955731A (en) 1990-09-11

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee