DE68908022D1 - Optischer messfuehler ohne kontakt. - Google Patents

Optischer messfuehler ohne kontakt.

Info

Publication number
DE68908022D1
DE68908022D1 DE8989305402T DE68908022T DE68908022D1 DE 68908022 D1 DE68908022 D1 DE 68908022D1 DE 8989305402 T DE8989305402 T DE 8989305402T DE 68908022 T DE68908022 T DE 68908022T DE 68908022 D1 DE68908022 D1 DE 68908022D1
Authority
DE
Germany
Prior art keywords
radiation source
contact
inch
produced
signature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8989305402T
Other languages
English (en)
Other versions
DE68908022T2 (de
Inventor
Kurt A Goszyk
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Contrologic Inc
Original Assignee
Contrologic Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Contrologic Inc filed Critical Contrologic Inc
Application granted granted Critical
Publication of DE68908022D1 publication Critical patent/DE68908022D1/de
Publication of DE68908022T2 publication Critical patent/DE68908022T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/08—Measuring arrangements characterised by the use of optical techniques for measuring diameters

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Measuring Leads Or Probes (AREA)
  • Glass Compositions (AREA)
  • Measurement Of The Respiration, Hearing Ability, Form, And Blood Characteristics Of Living Organisms (AREA)
  • Investigating Or Analysing Materials By The Use Of Chemical Reactions (AREA)
  • Switches Operated By Changes In Physical Conditions (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
DE89305402T 1988-06-07 1989-05-30 Optischer Messfühler ohne Kontakt. Expired - Fee Related DE68908022T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/203,433 US4938599A (en) 1988-06-07 1988-06-07 Non-contact optical gauge

Publications (2)

Publication Number Publication Date
DE68908022D1 true DE68908022D1 (de) 1993-09-09
DE68908022T2 DE68908022T2 (de) 1993-11-18

Family

ID=22753996

Family Applications (1)

Application Number Title Priority Date Filing Date
DE89305402T Expired - Fee Related DE68908022T2 (de) 1988-06-07 1989-05-30 Optischer Messfühler ohne Kontakt.

Country Status (6)

Country Link
US (1) US4938599A (de)
EP (1) EP0345984B1 (de)
JP (1) JPH02110303A (de)
AT (1) ATE92616T1 (de)
CA (1) CA1311607C (de)
DE (1) DE68908022T2 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5291272A (en) * 1991-09-27 1994-03-01 Criterion Resources, Inc. Method and apparatus for measuring dimensional variables of threaded pipe
DE4201385A1 (de) * 1992-01-21 1993-07-22 Peter Dipl Ing Renner Optisches messsystem
US5479683A (en) * 1993-12-29 1996-01-02 Bausch & Lomb Incorporated Three-dimensional eyewinder apparatus
US5895927A (en) * 1995-06-30 1999-04-20 The United States Of America As Represented By The Secretary Of The Air Force Electro-optic, noncontact, interior cross-sectional profiler
JP2002277207A (ja) * 2001-03-19 2002-09-25 Keyence Corp 光学測定装置
DE10328537B4 (de) * 2003-06-24 2015-03-26 Pixargus Gmbh Vorrichtung und Verfahren zum Vermessen der Dimension eines Körpers
JP4220358B2 (ja) * 2003-11-27 2009-02-04 株式会社日立ハイテクノロジーズ 半導体パターン計測方法
JP4989993B2 (ja) * 2007-03-07 2012-08-01 アズビル株式会社 エッジ検出装置及びその光束調整方法
JP6178617B2 (ja) * 2013-05-20 2017-08-09 株式会社ミツトヨ 光学式測定装置
JP2018115985A (ja) * 2017-01-19 2018-07-26 リコーインダストリアルソリューションズ株式会社 ガス分布検出光学装置およびガス分布検出装置
JP7240937B2 (ja) * 2019-04-05 2023-03-16 株式会社ミツトヨ 光学式測定装置および光学式測定方法
US11385040B1 (en) 2019-07-25 2022-07-12 Baker Verdin Gregory Portable optical shaft profile wear measurement gage

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB791813A (en) * 1955-03-29 1958-03-12 Nat Res Dev Improvements in or relating to measurement by optical means
US3955072A (en) * 1971-03-22 1976-05-04 Kasper Instruments, Inc. Apparatus for the automatic alignment of two superimposed objects for example a semiconductor wafer and a transparent mask
DE2127751C3 (de) * 1971-06-04 1974-08-01 Exatest Messtechnik Gmbh, 5090 Leverkusen Verfahren und Anordnung zur Ermittlung des Durchmessers eines Gegenstandes runder Querschnittsform mittels periodischer fotoelektrischer Abtastung
US3905705A (en) * 1972-01-31 1975-09-16 Techmet Co Optical measuring apparatus
JPS5128601B2 (de) * 1972-04-18 1976-08-20
SE378302B (de) * 1972-07-03 1975-08-25 Aga Ab
US4037968A (en) * 1975-12-22 1977-07-26 Monsanto Company Method and apparatus for measuring a dimension of an object in a defined space by scanning with a light beam
US4152767A (en) * 1976-09-27 1979-05-01 Atmospheric Sciences, Inc. Method and apparatus for measuring dimensions
US4097158A (en) * 1977-01-06 1978-06-27 Systems Research Laboratories, Inc. Half-maximum threshold circuit for optical micrometer
US4082463A (en) * 1977-01-06 1978-04-04 Systems Research Laboratories, Inc. Calibrated optical micrometer
US4168126A (en) * 1977-07-05 1979-09-18 Altman Associates, Inc. Electro-optical measuring system using precision light translator
DE2750109C2 (de) * 1977-11-09 1991-03-07 Spindler & Hoyer GmbH & Co, 3400 Göttingen Vorrichtung zur kontaktlosen Messung linearer Wegstrecken, insbesondere des Durchmessers
US4269514A (en) * 1978-09-25 1981-05-26 Electron Machine Corporation Non-contact scanning gage
CH648138A5 (de) * 1980-05-08 1985-02-28 Zumbach Electronic Ag Verfahren und vorrichtung zum automatischen regeln einer groesse eines einen extruder verlassenden objekts.
US4441205A (en) * 1981-05-18 1984-04-03 Kulicke & Soffa Industries, Inc. Pattern recognition system
JPS58109804A (ja) * 1981-12-23 1983-06-30 Kawasaki Steel Corp 光学走査装置
JPS58162804A (ja) * 1982-03-23 1983-09-27 Mitsutoyo Mfg Co Ltd 光学式測定装置
JPS6249202A (ja) * 1985-08-28 1987-03-03 Mitsutoyo Mfg Corp 光学式測定装置
GB8629176D0 (en) * 1986-12-05 1987-01-14 Street J Correcting aberrations in optical measuring systems

Also Published As

Publication number Publication date
JPH02110303A (ja) 1990-04-23
CA1311607C (en) 1992-12-22
ATE92616T1 (de) 1993-08-15
DE68908022T2 (de) 1993-11-18
US4938599A (en) 1990-07-03
EP0345984A3 (en) 1990-07-25
EP0345984A2 (de) 1989-12-13
EP0345984B1 (de) 1993-08-04

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee