DE60330067D1 - Eines transmissionselektronenmikrosops zur ermittlung der kristallstruktur und vorrichtung hierfür - Google Patents

Eines transmissionselektronenmikrosops zur ermittlung der kristallstruktur und vorrichtung hierfür

Info

Publication number
DE60330067D1
DE60330067D1 DE60330067T DE60330067T DE60330067D1 DE 60330067 D1 DE60330067 D1 DE 60330067D1 DE 60330067 T DE60330067 T DE 60330067T DE 60330067 T DE60330067 T DE 60330067T DE 60330067 D1 DE60330067 D1 DE 60330067D1
Authority
DE
Germany
Prior art keywords
transmission electron
microsops
determining
sample
crystal structure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60330067T
Other languages
English (en)
Inventor
Avilov Anatoly Sergeevich
Kuligin Kirill Vladimirovich
Stavros Nicolopoulos
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nanomegas SPRL
Original Assignee
Nanomegas SPRL
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nanomegas SPRL filed Critical Nanomegas SPRL
Application granted granted Critical
Publication of DE60330067D1 publication Critical patent/DE60330067D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/295—Electron or ion diffraction tubes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/20058—Measuring diffraction of electrons, e.g. low energy electron diffraction [LEED] method or reflection high energy electron diffraction [RHEED] method

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
DE60330067T 2003-09-02 2003-09-02 Eines transmissionselektronenmikrosops zur ermittlung der kristallstruktur und vorrichtung hierfür Expired - Lifetime DE60330067D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP2003/009727 WO2005022582A1 (en) 2003-09-02 2003-09-02 A method for measuring diffraction patterns from a transmission electron microscopy to determine crystal structures and a device therefor

Publications (1)

Publication Number Publication Date
DE60330067D1 true DE60330067D1 (de) 2009-12-24

Family

ID=34259108

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60330067T Expired - Lifetime DE60330067D1 (de) 2003-09-02 2003-09-02 Eines transmissionselektronenmikrosops zur ermittlung der kristallstruktur und vorrichtung hierfür

Country Status (6)

Country Link
US (1) US7601956B2 (de)
EP (1) EP1665321B1 (de)
AT (1) ATE448561T1 (de)
AU (1) AU2003270138A1 (de)
DE (1) DE60330067D1 (de)
WO (1) WO2005022582A1 (de)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7531812B2 (en) * 2003-10-27 2009-05-12 Politechnika Wroclawska Method and system for the directional detection of electrons in a scanning electron microscope
JP2006079911A (ja) * 2004-09-09 2006-03-23 Hitachi High-Technologies Corp 電子ビーム電流計測方法、電子ビーム描画装置および電子ビーム検出器
DE102006011615A1 (de) 2006-03-14 2007-09-20 Carl Zeiss Nts Gmbh Phasenkontrast-Elektronenmikroskop
WO2008060237A1 (en) * 2006-11-15 2008-05-22 Hovmoeller Sven Electron rotation camera
US7700915B2 (en) * 2006-11-28 2010-04-20 Canatu Oy Method, computer program and apparatus for the characterization of molecules
US7952073B2 (en) * 2008-08-01 2011-05-31 Direct Electron, Lp Apparatus and method including a direct bombardment detector and a secondary detector for use in electron microscopy
EP2351063B1 (de) * 2008-11-06 2016-01-27 Nanomegas SPRL Verfahren und vorrichtung für eine kristallstrukturanalyse mit hohem durchlass durch elektronenbrechung
US8748817B2 (en) * 2010-07-27 2014-06-10 Vineet Kumar Orientation imaging using wide angle convergent beam diffraction in transmission electron microscopy
EP2413345B1 (de) * 2010-07-29 2013-02-20 Carl Zeiss NTS GmbH Strahlensystem mit geladenen Teilchen
KR101999988B1 (ko) * 2012-03-08 2019-07-15 앱파이브 엘엘씨 고 공간 분해능에서 물질의 스트레인을 측정하기 위한 시스템 및 공정
EP2642279B1 (de) * 2012-03-19 2015-07-01 Universidad de Barcelona Verfahren und System zur Verbesserung von kennzeichnenden Spitzensignalen bei der analytischen Elektronenmikroskopie
US9244025B2 (en) * 2013-07-05 2016-01-26 Semiconductor Energy Laboratory Co., Ltd. Transmission electron diffraction measurement apparatus and method for measuring transmission electron diffraction pattern
US20190287759A1 (en) * 2014-01-27 2019-09-19 Mochii, Inc. (D/B/A Voxa) Transmission Electron Microscopy
JP2015185511A (ja) * 2014-03-26 2015-10-22 日本電子株式会社 荷電粒子線装置
US9978557B2 (en) 2016-04-21 2018-05-22 Fei Company System for orienting a sample using a diffraction pattern
EP3379557A1 (de) * 2017-03-20 2018-09-26 TESCAN Brno, s.r.o. Raster-transmissionselektronenmikroskop und verfahren zur erfassung mit hohem durchsatz von elektronenstreuungswinkelverteilungsbildern
EP3379236B1 (de) * 2017-03-20 2019-09-11 TESCAN Brno, s.r.o. Rastertransmission-elektronenmikroskop
JP7074479B2 (ja) * 2018-01-11 2022-05-24 株式会社ニューフレアテクノロジー マルチビーム検査装置
WO2020160671A1 (en) 2019-02-07 2020-08-13 Miller R J Dwayne Systems and methods for performing serial electron diffraction nanocrystallography

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5138578B2 (de) * 1972-10-23 1976-10-22
US4697080A (en) * 1986-01-06 1987-09-29 The United States Of America As Represented By The United States Department Of Energy Analysis with electron microscope of multielement samples using pure element standards
US6420701B1 (en) * 1997-07-23 2002-07-16 Canon Kabushiki Kaisha Method of determining average crystallite size of material and apparatus and method for preparing thin film of the material
JP2000243338A (ja) * 1999-02-22 2000-09-08 Hitachi Ltd 透過電子顕微鏡装置および透過電子検査装置並びに検査方法
EP1365229B1 (de) * 2001-02-28 2012-12-12 Hitachi, Ltd. Elektronen-Nano-Diffraktionsmethode zur Messung von Dehnung und Spannung durch Detektion eines Diffraktionspunktes oder mehrerer Diffraktionspunkte
JP3867524B2 (ja) * 2001-07-05 2007-01-10 株式会社日立製作所 電子線を用いた観察装置及び観察方法
JP3789104B2 (ja) * 2002-05-13 2006-06-21 株式会社日立ハイテクノロジーズ 元素分布観察方法及び装置

Also Published As

Publication number Publication date
US20070023659A1 (en) 2007-02-01
EP1665321B1 (de) 2009-11-11
AU2003270138A1 (en) 2005-03-16
US7601956B2 (en) 2009-10-13
EP1665321A1 (de) 2006-06-07
WO2005022582A1 (en) 2005-03-10
ATE448561T1 (de) 2009-11-15

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