DE60327960D1 - Winkelbeschleunigungsaufnehmer mit ausbalancierter seismischer Masse - Google Patents

Winkelbeschleunigungsaufnehmer mit ausbalancierter seismischer Masse

Info

Publication number
DE60327960D1
DE60327960D1 DE60327960T DE60327960T DE60327960D1 DE 60327960 D1 DE60327960 D1 DE 60327960D1 DE 60327960 T DE60327960 T DE 60327960T DE 60327960 T DE60327960 T DE 60327960T DE 60327960 D1 DE60327960 D1 DE 60327960D1
Authority
DE
Germany
Prior art keywords
seismic mass
angular accelerometer
balanced seismic
balanced
accelerometer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60327960T
Other languages
English (en)
Inventor
Seyed R Zarabadi
Ian D Jay
Jack D Johnson
John C Christenson
Tracy A Noll
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Delphi Technologies Inc
Original Assignee
Delphi Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Delphi Technologies Inc filed Critical Delphi Technologies Inc
Application granted granted Critical
Publication of DE60327960D1 publication Critical patent/DE60327960D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0888—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values for indicating angular acceleration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
DE60327960T 2002-02-28 2003-02-03 Winkelbeschleunigungsaufnehmer mit ausbalancierter seismischer Masse Expired - Lifetime DE60327960D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/085,933 US6666092B2 (en) 2002-02-28 2002-02-28 Angular accelerometer having balanced inertia mass

Publications (1)

Publication Number Publication Date
DE60327960D1 true DE60327960D1 (de) 2009-07-30

Family

ID=27733400

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60327960T Expired - Lifetime DE60327960D1 (de) 2002-02-28 2003-02-03 Winkelbeschleunigungsaufnehmer mit ausbalancierter seismischer Masse

Country Status (3)

Country Link
US (1) US6666092B2 (de)
EP (1) EP1340984B1 (de)
DE (1) DE60327960D1 (de)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6918282B2 (en) * 2003-03-27 2005-07-19 Delphi Technologies, Inc. Self-test circuit and method for testing a microsensor
DE10357870B4 (de) * 2003-12-11 2013-02-07 Robert Bosch Gmbh Sensor mit symmetrischer Begrenzung eines Signals
US8952832B2 (en) 2008-01-18 2015-02-10 Invensense, Inc. Interfacing application programs and motion sensors of a device
US8462109B2 (en) 2007-01-05 2013-06-11 Invensense, Inc. Controlling and accessing content using motion processing on mobile devices
US8508039B1 (en) 2008-05-08 2013-08-13 Invensense, Inc. Wafer scale chip scale packaging of vertically integrated MEMS sensors with electronics
US7934423B2 (en) 2007-12-10 2011-05-03 Invensense, Inc. Vertically integrated 3-axis MEMS angular accelerometer with integrated electronics
US7796872B2 (en) * 2007-01-05 2010-09-14 Invensense, Inc. Method and apparatus for producing a sharp image from a handheld device containing a gyroscope
US8047075B2 (en) 2007-06-21 2011-11-01 Invensense, Inc. Vertically integrated 3-axis MEMS accelerometer with electronics
US20090265671A1 (en) * 2008-04-21 2009-10-22 Invensense Mobile devices with motion gesture recognition
US20100071467A1 (en) * 2008-09-24 2010-03-25 Invensense Integrated multiaxis motion sensor
US8141424B2 (en) * 2008-09-12 2012-03-27 Invensense, Inc. Low inertia frame for detecting coriolis acceleration
US8250921B2 (en) 2007-07-06 2012-08-28 Invensense, Inc. Integrated motion processing unit (MPU) with MEMS inertial sensing and embedded digital electronics
US8020441B2 (en) 2008-02-05 2011-09-20 Invensense, Inc. Dual mode sensing for vibratory gyroscope
US7578190B2 (en) * 2007-08-03 2009-08-25 Freescale Semiconductor, Inc. Symmetrical differential capacitive sensor and method of making same
US7908922B2 (en) * 2008-01-24 2011-03-22 Delphi Technologies, Inc. Silicon integrated angular rate sensor
US8186152B2 (en) * 2008-07-23 2012-05-29 General Electric Company Apparatus and method for cooling turbomachine exhaust gas
DE102008043788A1 (de) * 2008-11-17 2010-05-20 Robert Bosch Gmbh Mikromechanisches Bauelement
CN101893451B (zh) * 2009-05-22 2013-08-21 鸿富锦精密工业（深圳）有限公司 电容式传感器及陀螺仪
WO2011073935A2 (en) * 2009-12-16 2011-06-23 Y-Sensors Ltd. Tethered, levitated-mass accelerometer
US11231441B2 (en) * 2015-05-15 2022-01-25 Invensense, Inc. MEMS structure for offset minimization of out-of-plane sensing accelerometers
FR3048781B1 (fr) * 2016-03-11 2018-03-16 Commissariat A L'energie Atomique Et Aux Energies Alternatives Accelerometre lineaire amorti

Family Cites Families (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2916279A (en) 1956-03-19 1959-12-08 Austin N Stanton Acceleration and velocity detection devices and systems
US2912657A (en) 1956-05-24 1959-11-10 Schaevitz Engineering Angular accelerometer
SU583397A1 (ru) 1976-01-04 1977-12-05 Tarkhanov Oleg V Емкостной преобразователь угловых ускорений
SU1035523A1 (ru) 1981-06-05 1983-08-15 Московский Ордена Ленина И Ордена Октябрьской Революции Энергетический Институт Устройство дл измерени угловых ускорений
US4435737A (en) 1981-12-16 1984-03-06 Rockwell International Corporation Low cost capacitive accelerometer
SU1040424A1 (ru) 1982-03-03 1983-09-07 Предприятие П/Я А-1891 Угловой акселерометр
US4699006A (en) 1984-03-19 1987-10-13 The Charles Stark Draper Laboratory, Inc. Vibratory digital integrating accelerometer
US4736629A (en) 1985-12-20 1988-04-12 Silicon Designs, Inc. Micro-miniature accelerometer
US4805456A (en) 1987-05-19 1989-02-21 Massachusetts Institute Of Technology Resonant accelerometer
US4851080A (en) 1987-06-29 1989-07-25 Massachusetts Institute Of Technology Resonant accelerometer
US5092174A (en) 1989-10-19 1992-03-03 Texas Instruments Incorporated Capacitance accelerometer
EP0461761B1 (de) 1990-05-18 1994-06-22 British Aerospace Public Limited Company Trägheitssensoren
US5253526A (en) 1990-05-30 1993-10-19 Copal Company Limited Capacitive acceleration sensor with free diaphragm
US5233213A (en) 1990-07-14 1993-08-03 Robert Bosch Gmbh Silicon-mass angular acceleration sensor
JPH0644008B2 (ja) 1990-08-17 1994-06-08 アナログ・ディバイセス・インコーポレーテッド モノリシック加速度計
US5314572A (en) 1990-08-17 1994-05-24 Analog Devices, Inc. Method for fabricating microstructures
US5417111A (en) 1990-08-17 1995-05-23 Analog Devices, Inc. Monolithic chip containing integrated circuitry and suspended microstructure
US5249465A (en) 1990-12-11 1993-10-05 Motorola, Inc. Accelerometer utilizing an annular mass
JP2938989B2 (ja) 1991-01-29 1999-08-25 キヤノン株式会社 角加速度センサ
JP3063209B2 (ja) 1991-03-27 2000-07-12 豊田工機株式会社 容量型加速度センサ
US5146389A (en) 1991-07-22 1992-09-08 Motorola, Inc. Differential capacitor structure and method
US5665915A (en) 1992-03-25 1997-09-09 Fuji Electric Co., Ltd. Semiconductor capacitive acceleration sensor
US5251484A (en) 1992-04-03 1993-10-12 Hewlett-Packard Company Rotational accelerometer
EP1083144B1 (de) * 1999-09-10 2008-05-07 STMicroelectronics S.r.l. Gegen mechanische Spannungen unempfindliche mikroelektromechanische Struktur
US6257062B1 (en) * 1999-10-01 2001-07-10 Delphi Technologies, Inc. Angular Accelerometer
US6401536B1 (en) * 2000-02-11 2002-06-11 Motorola, Inc. Acceleration sensor and method of manufacture

Also Published As

Publication number Publication date
EP1340984B1 (de) 2009-06-17
EP1340984A2 (de) 2003-09-03
EP1340984A3 (de) 2005-12-28
US6666092B2 (en) 2003-12-23
US20030159511A1 (en) 2003-08-28

Similar Documents

Publication Publication Date Title
DE60327960D1 (de) Winkelbeschleunigungsaufnehmer mit ausbalancierter seismischer Masse
GB2424700B (en) Optical accelerometer, optical inclinometer and seismic sensor system using such accelerometer and inclinometer
GB2384054B (en) Angular velocity sensor
AU2003257134A1 (en) Triaxial acceleration sensor
FI20020284A0 (fi) Kiihtyvyysanturi
NO20041644L (no) Oppdatering av seismikkhastighet for anisotropisk dybdemigrasjon
NO20052915D0 (no) Integrert seismisk sensorkabel
DK1409016T4 (da) Antistoffer mod OPGL
FR2856789B1 (fr) Gyrometre a masse vibrante
GB2410635B (en) Seismic exploration
NO20021140L (no) Anordning for seismikk
FI20045070A0 (fi) Sovellukseen integroitu kiihdytysasiakas
DE60336644D1 (de) Mechanischen gyroskops
DE60208619D1 (de) Beschleunigungsempfindlicher Dämpfer
EP1403616A4 (de) Winkelgeschwindigkeitssensor
AUPS225602A0 (en) Improved seismic sensors
NO20032294D0 (no) Systematisk geofysisk undersökelse
DE602004015689D1 (de) Beschleunigungsaufnehmer
FR2848298B1 (fr) Accelerometre a poutre vibrante
FR2862761B1 (fr) Accelerometre differentiel micro-usine multiaxes
DE60212732D1 (de) Schwungradsmechanismus mit veränderlicher Masse
DE60214588D1 (de) Winkelgeschwindigkeitsaufnehmer
FI20030946A0 (fi) Kapasitiivinen kiihtyvyysanturijärjestely
DE69910149D1 (de) Beschleunigungsaufnehmer mit Pendelmasse
DE60335232D1 (de) Kompakter Inertialsensor

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
R082 Change of representative

Ref document number: 1340984

Country of ref document: EP

Representative=s name: PATENTANWAELTE FREISCHEM, 50677 KOELN, DE