DE60323758D1 - Verfahren zur herstellung einer verpackten halbleitervorrichtung, mit solch einem verfahren erhaltene verpackte halbleitervorrichtung und zur verwendung in solch einem verfahren geeigneter metallträger - Google Patents
Verfahren zur herstellung einer verpackten halbleitervorrichtung, mit solch einem verfahren erhaltene verpackte halbleitervorrichtung und zur verwendung in solch einem verfahren geeigneter metallträgerInfo
- Publication number
- DE60323758D1 DE60323758D1 DE60323758T DE60323758T DE60323758D1 DE 60323758 D1 DE60323758 D1 DE 60323758D1 DE 60323758 T DE60323758 T DE 60323758T DE 60323758 T DE60323758 T DE 60323758T DE 60323758 D1 DE60323758 D1 DE 60323758D1
- Authority
- DE
- Germany
- Prior art keywords
- semiconductor device
- metal
- packaged semiconductor
- diamond grains
- dicing blade
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0076—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for removing dust, e.g. by spraying liquids; for lubricating, cooling or cleaning tool or work
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/02—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills
- B28D5/022—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP02078269 | 2002-08-05 | ||
PCT/IB2003/003712 WO2004014626A1 (en) | 2002-08-05 | 2003-07-31 | Method and apparatus for manufacturing a packaged semiconductor device, packaged semiconductor device obtained with such a method and metal carrier suitable for use in such a method |
Publications (1)
Publication Number | Publication Date |
---|---|
DE60323758D1 true DE60323758D1 (de) | 2008-11-06 |
Family
ID=31502788
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60323758T Expired - Lifetime DE60323758D1 (de) | 2002-08-05 | 2003-07-31 | Verfahren zur herstellung einer verpackten halbleitervorrichtung, mit solch einem verfahren erhaltene verpackte halbleitervorrichtung und zur verwendung in solch einem verfahren geeigneter metallträger |
Country Status (10)
Country | Link |
---|---|
US (1) | US7115443B2 (de) |
EP (1) | EP1549472B1 (de) |
JP (1) | JP2005535140A (de) |
KR (1) | KR20050042144A (de) |
CN (1) | CN100557781C (de) |
AT (1) | ATE409107T1 (de) |
AU (1) | AU2003255956A1 (de) |
DE (1) | DE60323758D1 (de) |
TW (1) | TWI310960B (de) |
WO (1) | WO2004014626A1 (de) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7972940B2 (en) * | 2007-12-28 | 2011-07-05 | Micron Technology, Inc. | Wafer processing |
CN102009433B (zh) * | 2010-11-03 | 2012-11-21 | 江苏省宜兴电子器件总厂 | 陶瓷外壳刻槽模具及用该模具加工无引线陶瓷外壳的方法 |
US9491867B2 (en) * | 2014-09-30 | 2016-11-08 | Ngk Spark Plug Co., Ltd. | Wiring substrate and multi-piece wiring substrate |
Family Cites Families (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62114254A (ja) * | 1985-11-13 | 1987-05-26 | Mitsui Haitetsuku:Kk | リ−ドフレ−ムの製造方法 |
DE4309134C2 (de) * | 1993-03-22 | 1999-03-04 | Wilfried Wahl | Verfahren zur Schmierung und Kühlung von Schneiden und/oder Werkstücken bei zerspanenden Arbeitsprozessen |
US5682062A (en) * | 1995-06-05 | 1997-10-28 | Harris Corporation | System for interconnecting stacked integrated circuits |
US5646315A (en) * | 1995-06-07 | 1997-07-08 | National Starch And Chemical Investment Holding Corporation | Polyglydicylphenyl ethers of alkyloxy chains for use in microelectronics adhesives |
US6284566B1 (en) * | 1996-05-17 | 2001-09-04 | National Semiconductor Corporation | Chip scale package and method for manufacture thereof |
US5832585A (en) * | 1996-08-13 | 1998-11-10 | National Semiconductor Corporation | Method of separating micro-devices formed on a substrate |
KR100222299B1 (ko) * | 1996-12-16 | 1999-10-01 | 윤종용 | 웨이퍼 레벨 칩 스케일 패키지 및 그의 제조 방법 |
KR100225909B1 (ko) | 1997-05-29 | 1999-10-15 | 윤종용 | 웨이퍼 소잉 장치 |
EP0886144B1 (de) * | 1997-06-19 | 2006-09-06 | STMicroelectronics S.r.l. | Hermetisch abgeschlossener Sensor mit beweglicher Mikrostruktur |
SG70097A1 (en) * | 1997-08-15 | 2000-01-25 | Disio Corp | Apparatus and method for machining workpieces by flushing working liquid to the tool-and-workpiece interface |
TW419867B (en) * | 1998-08-26 | 2001-01-21 | Samsung Electronics Co Ltd | Laser cutting apparatus and method |
ATE363964T1 (de) * | 1998-11-20 | 2007-06-15 | Sankyo Diamond Ind Co Ltd | Diamanttrennscheibe und deren herstellungsverfahren |
JP3398721B2 (ja) * | 1999-05-20 | 2003-04-21 | アムコー テクノロジー コリア インコーポレーティド | 半導体パッケージ及びその製造方法 |
US6413150B1 (en) | 1999-05-27 | 2002-07-02 | Texas Instruments Incorporated | Dual dicing saw blade assembly and process for separating devices arrayed a substrate |
US6463920B1 (en) * | 1999-11-22 | 2002-10-15 | Sumitomo Special Metals Co., Ltd. | Work cutting apparatus and work cutting method |
US6400004B1 (en) * | 2000-08-17 | 2002-06-04 | Advanced Semiconductor Engineering, Inc. | Leadless semiconductor package |
US6467278B1 (en) * | 2000-11-15 | 2002-10-22 | National Semiconductor Corporation | Cooling for singulation of composite materials in molded semiconductor packages |
JP3619773B2 (ja) * | 2000-12-20 | 2005-02-16 | 株式会社ルネサステクノロジ | 半導体装置の製造方法 |
JP3628971B2 (ja) | 2001-02-15 | 2005-03-16 | 松下電器産業株式会社 | リードフレーム及びそれを用いた樹脂封止型半導体装置の製造方法 |
WO2002103792A2 (en) * | 2001-06-19 | 2002-12-27 | Koninklijke Philips Electronics N.V. | Method of manufacturing a semiconductor device and semiconductor device |
US6849523B2 (en) * | 2003-03-12 | 2005-02-01 | Taiwan Semiconductor Manufacturing Co., Ltd | Process for separating dies on a wafer |
-
2003
- 2003-07-31 AT AT03784423T patent/ATE409107T1/de not_active IP Right Cessation
- 2003-07-31 JP JP2004527236A patent/JP2005535140A/ja active Pending
- 2003-07-31 DE DE60323758T patent/DE60323758D1/de not_active Expired - Lifetime
- 2003-07-31 AU AU2003255956A patent/AU2003255956A1/en not_active Abandoned
- 2003-07-31 CN CNB03818754XA patent/CN100557781C/zh not_active Expired - Fee Related
- 2003-07-31 KR KR1020057001990A patent/KR20050042144A/ko not_active Application Discontinuation
- 2003-07-31 US US10/523,534 patent/US7115443B2/en not_active Expired - Lifetime
- 2003-07-31 EP EP03784423A patent/EP1549472B1/de not_active Expired - Lifetime
- 2003-07-31 WO PCT/IB2003/003712 patent/WO2004014626A1/en active IP Right Grant
- 2003-08-01 TW TW092121150A patent/TWI310960B/zh active
Also Published As
Publication number | Publication date |
---|---|
ATE409107T1 (de) | 2008-10-15 |
US20050255630A1 (en) | 2005-11-17 |
WO2004014626A1 (en) | 2004-02-19 |
AU2003255956A1 (en) | 2004-02-25 |
EP1549472B1 (de) | 2008-09-24 |
JP2005535140A (ja) | 2005-11-17 |
CN100557781C (zh) | 2009-11-04 |
CN1675041A (zh) | 2005-09-28 |
KR20050042144A (ko) | 2005-05-04 |
TW200416776A (en) | 2004-09-01 |
TWI310960B (en) | 2009-06-11 |
US7115443B2 (en) | 2006-10-03 |
EP1549472A1 (de) | 2005-07-06 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |