DE60312902D1 - Verfahren und vorrichtung zum behandeln eines substrats - Google Patents
Verfahren und vorrichtung zum behandeln eines substratsInfo
- Publication number
- DE60312902D1 DE60312902D1 DE60312902T DE60312902T DE60312902D1 DE 60312902 D1 DE60312902 D1 DE 60312902D1 DE 60312902 T DE60312902 T DE 60312902T DE 60312902 T DE60312902 T DE 60312902T DE 60312902 D1 DE60312902 D1 DE 60312902D1
- Authority
- DE
- Germany
- Prior art keywords
- substrate
- treating
- process chamber
- plasma source
- plasma
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000034 method Methods 0.000 title abstract 5
- 239000000758 substrate Substances 0.000 title abstract 5
- 239000012530 fluid Substances 0.000 abstract 2
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32366—Localised processing
- H01J37/32376—Scanning across large workpieces
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/04—Coating on selected surface areas, e.g. using masks
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/513—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using plasma jets
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Physics & Mathematics (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Analytical Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Drying Of Semiconductors (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL1022155A NL1022155C2 (nl) | 2002-12-12 | 2002-12-12 | Werkwijze, alsmede inrichting voor het behandelen van een oppervlak van ten minste één substraat. |
NL1022155 | 2002-12-12 | ||
PCT/NL2003/000886 WO2004053190A1 (en) | 2002-12-12 | 2003-12-12 | Method and apparatus for treating a substrate |
Publications (2)
Publication Number | Publication Date |
---|---|
DE60312902D1 true DE60312902D1 (de) | 2007-05-10 |
DE60312902T2 DE60312902T2 (de) | 2007-12-06 |
Family
ID=32501543
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60312902T Expired - Lifetime DE60312902T2 (de) | 2002-12-12 | 2003-12-12 | Verfahren und vorrichtung zum behandeln eines substrats |
Country Status (11)
Country | Link |
---|---|
US (1) | US7645495B2 (de) |
EP (1) | EP1604049B1 (de) |
JP (1) | JP4578979B2 (de) |
KR (1) | KR100895913B1 (de) |
CN (1) | CN100489155C (de) |
AT (1) | ATE358192T1 (de) |
AU (1) | AU2003296050A1 (de) |
DE (1) | DE60312902T2 (de) |
ES (1) | ES2283848T3 (de) |
NL (1) | NL1022155C2 (de) |
WO (1) | WO2004053190A1 (de) |
Families Citing this family (53)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1922937A (zh) * | 2004-02-20 | 2007-02-28 | 悉尼大学 | 用于等离子体处理的装置 |
US8420435B2 (en) | 2009-05-05 | 2013-04-16 | Solexel, Inc. | Ion implantation fabrication process for thin-film crystalline silicon solar cells |
US9508886B2 (en) | 2007-10-06 | 2016-11-29 | Solexel, Inc. | Method for making a crystalline silicon solar cell substrate utilizing flat top laser beam |
US8399331B2 (en) | 2007-10-06 | 2013-03-19 | Solexel | Laser processing for high-efficiency thin crystalline silicon solar cell fabrication |
NL1030896C2 (nl) * | 2006-01-11 | 2007-07-12 | Otb Group Bv | Werkwijze en inrichting voor het gecontroleerd deponeren van materiaal door middel van plasma op een driedimensionaal substraat. |
US20080210290A1 (en) * | 2006-04-14 | 2008-09-04 | Dau Wu | Plasma inside vapor deposition apparatus and method for making multi-junction silicon thin film solar cell modules and panels |
CA2649520A1 (en) * | 2006-04-14 | 2007-10-25 | Silica Tech, Llc | Plasma deposition apparatus and method for making solar cells |
WO2008007944A1 (en) * | 2006-07-12 | 2008-01-17 | Technische Universiteit Eindhoven | Method and device for treating a substrate by means of a plasma |
US8193076B2 (en) | 2006-10-09 | 2012-06-05 | Solexel, Inc. | Method for releasing a thin semiconductor substrate from a reusable template |
US8512581B2 (en) * | 2006-10-09 | 2013-08-20 | Solexel, Inc. | Methods for liquid transfer coating of three-dimensional substrates |
US20100304521A1 (en) * | 2006-10-09 | 2010-12-02 | Solexel, Inc. | Shadow Mask Methods For Manufacturing Three-Dimensional Thin-Film Solar Cells |
US8035027B2 (en) * | 2006-10-09 | 2011-10-11 | Solexel, Inc. | Solar module structures and assembly methods for pyramidal three-dimensional thin-film solar cells |
US8053665B2 (en) * | 2008-11-26 | 2011-11-08 | Solexel, Inc. | Truncated pyramid structures for see-through solar cells |
US8035028B2 (en) * | 2006-10-09 | 2011-10-11 | Solexel, Inc. | Pyramidal three-dimensional thin-film solar cells |
US8293558B2 (en) * | 2006-10-09 | 2012-10-23 | Solexel, Inc. | Method for releasing a thin-film substrate |
US7999174B2 (en) * | 2006-10-09 | 2011-08-16 | Solexel, Inc. | Solar module structures and assembly methods for three-dimensional thin-film solar cells |
US20080264477A1 (en) * | 2006-10-09 | 2008-10-30 | Soltaix, Inc. | Methods for manufacturing three-dimensional thin-film solar cells |
USH2207H1 (en) * | 2007-01-05 | 2007-12-04 | Bijker Martin D | Additional post-glass-removal processes for enhanced cell efficiency in the production of solar cells |
US8039052B2 (en) * | 2007-09-06 | 2011-10-18 | Intermolecular, Inc. | Multi-region processing system and heads |
US20100144080A1 (en) * | 2008-06-02 | 2010-06-10 | Solexel, Inc. | Method and apparatus to transfer coat uneven surface |
US8288195B2 (en) * | 2008-11-13 | 2012-10-16 | Solexel, Inc. | Method for fabricating a three-dimensional thin-film semiconductor substrate from a template |
WO2010057060A2 (en) | 2008-11-13 | 2010-05-20 | Solexel, Inc. | Methods and systems for manufacturing thin-film solar cells |
EP2387458B1 (de) * | 2009-01-15 | 2014-03-05 | Solexel, Inc. | System und verfahren zur elektroätzung von porösem silizium |
US9076642B2 (en) | 2009-01-15 | 2015-07-07 | Solexel, Inc. | High-Throughput batch porous silicon manufacturing equipment design and processing methods |
US8906218B2 (en) | 2010-05-05 | 2014-12-09 | Solexel, Inc. | Apparatus and methods for uniformly forming porous semiconductor on a substrate |
MY162405A (en) * | 2009-02-06 | 2017-06-15 | Solexel Inc | Trench Formation Method For Releasing A Thin-Film Substrate From A Reusable Semiconductor Template |
US8828517B2 (en) | 2009-03-23 | 2014-09-09 | Solexel, Inc. | Structure and method for improving solar cell efficiency and mechanical strength |
WO2010120850A1 (en) * | 2009-04-14 | 2010-10-21 | Solexel, Inc. | High efficiency epitaxial chemical vapor deposition (cvd) reactor |
US9099584B2 (en) * | 2009-04-24 | 2015-08-04 | Solexel, Inc. | Integrated three-dimensional and planar metallization structure for thin film solar cells |
US9318644B2 (en) | 2009-05-05 | 2016-04-19 | Solexel, Inc. | Ion implantation and annealing for thin film crystalline solar cells |
MY165969A (en) | 2009-05-05 | 2018-05-18 | Solexel Inc | High-productivity porous semiconductor manufacturing equipment |
US8445314B2 (en) * | 2009-05-22 | 2013-05-21 | Solexel, Inc. | Method of creating reusable template for detachable thin film substrate |
US8551866B2 (en) * | 2009-05-29 | 2013-10-08 | Solexel, Inc. | Three-dimensional thin-film semiconductor substrate with through-holes and methods of manufacturing |
NL2002980C2 (en) * | 2009-06-05 | 2010-12-07 | Otb Solar Bv | Method for passivating al least a part of a substrate surface. |
US9111729B2 (en) * | 2009-12-03 | 2015-08-18 | Lam Research Corporation | Small plasma chamber systems and methods |
EP2510552A4 (de) | 2009-12-09 | 2014-11-05 | Solexel Inc | Hocheffiziente photovoltaische rückseitenkontaktstrukturen für solarzellen und herstellungsverfahren dafür mithilfe von halbleiter-wafern |
WO2011100647A2 (en) | 2010-02-12 | 2011-08-18 | Solexel, Inc. | Double-sided reusable template for fabrication of semiconductor substrates for photovoltaic cell and microelectronics device manufacturing |
US9190289B2 (en) | 2010-02-26 | 2015-11-17 | Lam Research Corporation | System, method and apparatus for plasma etch having independent control of ion generation and dissociation of process gas |
KR20130051013A (ko) | 2010-06-09 | 2013-05-16 | 솔렉셀, 인크. | 고생산성 박막 증착 방법 및 시스템 |
KR20140015247A (ko) | 2010-08-05 | 2014-02-06 | 솔렉셀, 인크. | 태양전지용 백플레인 보강 및 상호연결부 |
US9155181B2 (en) | 2010-08-06 | 2015-10-06 | Lam Research Corporation | Distributed multi-zone plasma source systems, methods and apparatus |
US8999104B2 (en) | 2010-08-06 | 2015-04-07 | Lam Research Corporation | Systems, methods and apparatus for separate plasma source control |
US9449793B2 (en) | 2010-08-06 | 2016-09-20 | Lam Research Corporation | Systems, methods and apparatus for choked flow element extraction |
US9967965B2 (en) | 2010-08-06 | 2018-05-08 | Lam Research Corporation | Distributed, concentric multi-zone plasma source systems, methods and apparatus |
CN102534568B (zh) * | 2010-12-30 | 2014-12-17 | 北京北方微电子基地设备工艺研究中心有限责任公司 | 等离子体增强化学气相沉积设备 |
US9748414B2 (en) | 2011-05-20 | 2017-08-29 | Arthur R. Zingher | Self-activated front surface bias for a solar cell |
CN102796993B (zh) * | 2011-05-27 | 2014-05-28 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Cvd设备和该cvd设备的控制方法 |
US9177762B2 (en) | 2011-11-16 | 2015-11-03 | Lam Research Corporation | System, method and apparatus of a wedge-shaped parallel plate plasma reactor for substrate processing |
US10283325B2 (en) | 2012-10-10 | 2019-05-07 | Lam Research Corporation | Distributed multi-zone plasma source systems, methods and apparatus |
US9783889B2 (en) * | 2012-03-26 | 2017-10-10 | Applied Materials, Inc. | Apparatus for variable substrate temperature control |
US8735210B2 (en) * | 2012-06-28 | 2014-05-27 | International Business Machines Corporation | High efficiency solar cells fabricated by inexpensive PECVD |
EP2935643B1 (de) * | 2012-12-21 | 2018-08-01 | Doosan Fuel Cell America, Inc. | Abscheidungswolkenturm mit einstellbarem feld |
JP2015090916A (ja) * | 2013-11-06 | 2015-05-11 | 東京エレクトロン株式会社 | 基板処理装置及び基板処理方法 |
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DE2054538C3 (de) * | 1970-11-05 | 1979-03-22 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | Vorrichtung zum Abscheiden von Schichten aus Halbleitermaterial |
JPS6179774A (ja) * | 1984-09-28 | 1986-04-23 | Mitsubishi Heavy Ind Ltd | 容器内面のコ−テイング方法 |
FR2571995B1 (fr) * | 1984-10-22 | 1986-12-26 | Soudure Autogene Francaise | Machine pour le soudage externe de tubes bout a bout, par faisceau d'electrons |
DE3884653T2 (de) * | 1987-04-03 | 1994-02-03 | Fujitsu Ltd | Verfahren und Vorrichtung zur Gasphasenabscheidung von Diamant. |
JPS6428297A (en) * | 1987-04-03 | 1989-01-30 | Fujitsu Ltd | Vapor phase synthesis of diamond |
GB8713986D0 (en) * | 1987-06-16 | 1987-07-22 | Shell Int Research | Apparatus for plasma surface treating |
NL8701530A (nl) * | 1987-06-30 | 1989-01-16 | Stichting Fund Ond Material | Werkwijze voor het behandelen van oppervlakken van substraten met behulp van een plasma en reactor voor het uitvoeren van die werkwijze. |
JPH06330324A (ja) * | 1993-05-17 | 1994-11-29 | Fuji Electric Co Ltd | 乾式薄膜加工装置 |
US6051114A (en) * | 1997-06-23 | 2000-04-18 | Applied Materials, Inc. | Use of pulsed-DC wafer bias for filling vias/trenches with metal in HDP physical vapor deposition |
JP2000109979A (ja) * | 1998-10-05 | 2000-04-18 | Tokujiro Okui | 直流アーク放電プラズマによる表面処理方法 |
US6068201A (en) * | 1998-11-05 | 2000-05-30 | Sulzer Metco (Us) Inc. | Apparatus for moving a thermal spray gun in a figure eight over a substrate |
JP3662779B2 (ja) * | 1999-06-22 | 2005-06-22 | シャープ株式会社 | プラズマ処理装置 |
US6344416B1 (en) * | 2000-03-10 | 2002-02-05 | International Business Machines Corporation | Deliberate semiconductor film variation to compensate for radial processing differences, determine optimal device characteristics, or produce small productions |
JP2002118027A (ja) * | 2000-10-10 | 2002-04-19 | Anelva Corp | 磁性膜形成装置および磁性膜形成方法 |
US6397776B1 (en) * | 2001-06-11 | 2002-06-04 | General Electric Company | Apparatus for large area chemical vapor deposition using multiple expanding thermal plasma generators |
AU2002323204A1 (en) * | 2001-08-16 | 2003-03-03 | Dow Global Technologies Inc. | Cascade arc plasma and abrasion resistant coatings made therefrom |
-
2002
- 2002-12-12 NL NL1022155A patent/NL1022155C2/nl not_active IP Right Cessation
-
2003
- 2003-12-12 AT AT03782978T patent/ATE358192T1/de not_active IP Right Cessation
- 2003-12-12 DE DE60312902T patent/DE60312902T2/de not_active Expired - Lifetime
- 2003-12-12 CN CNB2003801086599A patent/CN100489155C/zh not_active Expired - Fee Related
- 2003-12-12 US US10/538,652 patent/US7645495B2/en not_active Expired - Fee Related
- 2003-12-12 EP EP03782978A patent/EP1604049B1/de not_active Expired - Lifetime
- 2003-12-12 JP JP2004558567A patent/JP4578979B2/ja not_active Expired - Fee Related
- 2003-12-12 ES ES03782978T patent/ES2283848T3/es not_active Expired - Lifetime
- 2003-12-12 KR KR1020057010737A patent/KR100895913B1/ko not_active IP Right Cessation
- 2003-12-12 AU AU2003296050A patent/AU2003296050A1/en not_active Abandoned
- 2003-12-12 WO PCT/NL2003/000886 patent/WO2004053190A1/en active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
WO2004053190A1 (en) | 2004-06-24 |
CN100489155C (zh) | 2009-05-20 |
EP1604049B1 (de) | 2007-03-28 |
KR20050100599A (ko) | 2005-10-19 |
ES2283848T3 (es) | 2007-11-01 |
ATE358192T1 (de) | 2007-04-15 |
AU2003296050A1 (en) | 2004-06-30 |
US20060231031A1 (en) | 2006-10-19 |
US7645495B2 (en) | 2010-01-12 |
DE60312902T2 (de) | 2007-12-06 |
EP1604049A1 (de) | 2005-12-14 |
JP4578979B2 (ja) | 2010-11-10 |
CN1738923A (zh) | 2006-02-22 |
KR100895913B1 (ko) | 2009-05-07 |
NL1022155C2 (nl) | 2004-06-22 |
JP2006509907A (ja) | 2006-03-23 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: OTB SOLAR B.V., EINDHOVEN, NL |