DE60312476D1 - Mikro-elektromechanische vorrichtung - Google Patents

Mikro-elektromechanische vorrichtung

Info

Publication number
DE60312476D1
DE60312476D1 DE60312476T DE60312476T DE60312476D1 DE 60312476 D1 DE60312476 D1 DE 60312476D1 DE 60312476 T DE60312476 T DE 60312476T DE 60312476 T DE60312476 T DE 60312476T DE 60312476 D1 DE60312476 D1 DE 60312476D1
Authority
DE
Germany
Prior art keywords
micro
electromechanical device
electromechanical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60312476T
Other languages
English (en)
Other versions
DE60312476T2 (de
Inventor
Yoshito Nakanishi
Yoshito Shimizu
Hiroyuki Yabuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Application granted granted Critical
Publication of DE60312476D1 publication Critical patent/DE60312476D1/de
Publication of DE60312476T2 publication Critical patent/DE60312476T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P1/00—Auxiliary devices
    • H01P1/10—Auxiliary devices for switching or interrupting
    • H01P1/12—Auxiliary devices for switching or interrupting by mechanical chopper
    • H01P1/127—Strip line switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
    • B81B3/0086—Electrical characteristics, e.g. reducing driving voltage, improving resistance to peak voltage
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H03H9/2447—Beam resonators
    • H03H9/2457—Clamped-free beam resonators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/01—Switches
    • B81B2201/012—Switches characterised by the shape
    • B81B2201/014—Switches characterised by the shape having a cantilever fixed on one side connected to one or more dimples
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0118—Cantilevers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/05—Type of movement
    • B81B2203/056—Rotation in a plane parallel to the substrate
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/05—Type of movement
    • B81B2203/058—Rotation out of a plane parallel to the substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0068—Switches making use of microelectromechanical systems [MEMS] with multi dimensional movement, i.e. the movable actuator performing movements in at least two different directions
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H2009/02488—Vibration modes
    • H03H2009/02496—Horizontal, i.e. parallel to the substrate plane
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H2009/02488—Vibration modes
    • H03H2009/02511—Vertical, i.e. perpendicular to the substrate plane
DE60312476T 2002-01-16 2003-01-16 Mikro-elektromechanische vorrichtung Expired - Lifetime DE60312476T2 (de)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2002006908 2002-01-16
JP2002006908 2002-01-16
JP2002364322 2002-12-16
JP2002364322 2002-12-16
PCT/JP2003/000317 WO2003059805A2 (en) 2002-01-16 2003-01-16 Micro device

Publications (2)

Publication Number Publication Date
DE60312476D1 true DE60312476D1 (de) 2007-04-26
DE60312476T2 DE60312476T2 (de) 2007-06-28

Family

ID=26625531

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60312476T Expired - Lifetime DE60312476T2 (de) 2002-01-16 2003-01-16 Mikro-elektromechanische vorrichtung

Country Status (8)

Country Link
US (1) US7138893B2 (de)
EP (1) EP1465832B1 (de)
KR (1) KR20040080333A (de)
CN (1) CN1288068C (de)
AU (1) AU2003202803A1 (de)
CA (1) CA2450451A1 (de)
DE (1) DE60312476T2 (de)
WO (1) WO2003059805A2 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030107460A1 (en) * 2001-12-10 2003-06-12 Guanghua Huang Low voltage MEM switch
WO2004114345A2 (en) * 2003-06-26 2004-12-29 Koninklijke Philips Electronics N.V. Micro-electromechanical device and module and method of manufacturing same
US7253709B1 (en) * 2004-10-07 2007-08-07 Hrl Laboratories, Llc RF MEMS switch with spring-loaded latching mechanism
JP4740751B2 (ja) * 2005-01-21 2011-08-03 パナソニック株式会社 電気機械スイッチ
JP2007150736A (ja) * 2005-11-28 2007-06-14 Sony Corp 微小電気機械デバイス
JP2009521175A (ja) * 2005-12-23 2009-05-28 エヌエックスピー ビー ヴィ Ｍｅｍｓ共振器、その製造方法及びｍｅｍｓ発振器
KR101272359B1 (ko) * 2010-03-01 2013-06-07 오므론 가부시키가이샤 스위치 및 그 제조 방법 및 릴레이
FR2970596B1 (fr) * 2011-01-19 2013-02-08 Commissariat Energie Atomique Contacteur et interrupteur
DE102014002823B4 (de) * 2014-02-25 2017-11-02 Northrop Grumman Litef Gmbh Mikromechanisches bauteil mit geteilter, galvanisch isolierter aktiver struktur und verfahren zum betreiben eines solchen bauteils
CN109617435A (zh) * 2019-01-28 2019-04-12 北京航空航天大学 一种基于机械振动的电能变换电路和变换方法

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5149673A (en) * 1989-02-21 1992-09-22 Cornell Research Foundation, Inc. Selective chemical vapor deposition of tungsten for microdynamic structures
US4901586A (en) * 1989-02-27 1990-02-20 Sundstrand Data Control, Inc. Electrostatically driven dual vibrating beam force transducer
US5491604A (en) * 1992-12-11 1996-02-13 The Regents Of The University Of California Q-controlled microresonators and tunable electronic filters using such resonators
FR2706074B1 (fr) * 1993-06-02 1995-07-21 Lewiner Jacques Dispositif de commande du type actionneur à structure symétrique.
NO952190L (no) * 1995-06-02 1996-12-03 Lk As Styrbar mikroomskifter
JPH09251834A (ja) * 1996-03-15 1997-09-22 Omron Corp 静電リレー
KR100393183B1 (ko) * 1996-10-31 2003-10-17 삼성전자주식회사 마이크로액츄에이터의상보형정전구동장치
DE19736674C1 (de) * 1997-08-22 1998-11-26 Siemens Ag Mikromechanisches elektrostatisches Relais und Verfahren zu dessen Herstellung
US6218911B1 (en) * 1999-07-13 2001-04-17 Trw Inc. Planar airbridge RF terminal MEMS switch
WO2001026167A1 (fr) * 1999-10-01 2001-04-12 Ngk Insulators, Ltd. Dispositif piezo-electrique / electrostrictif et procede de fabrication correspondant
KR100335046B1 (ko) * 2000-05-24 2002-05-03 윤덕용 푸시-풀 형태의 미소 기전 초고주파 스위치
KR100493151B1 (ko) * 2000-07-19 2005-06-02 삼성전자주식회사 멀티폴디스 스프링을 이용한 다축 구동을 위한싱글스테이지 마이크로 구동기
US6621390B2 (en) * 2001-02-28 2003-09-16 Samsung Electronics Co., Ltd. Electrostatically-actuated capacitive MEMS (micro electro mechanical system) switch
US6798315B2 (en) * 2001-12-04 2004-09-28 Mayo Foundation For Medical Education And Research Lateral motion MEMS Switch
JP2004134370A (ja) * 2002-07-26 2004-04-30 Matsushita Electric Ind Co Ltd スイッチ

Also Published As

Publication number Publication date
DE60312476T2 (de) 2007-06-28
CA2450451A1 (en) 2003-07-24
CN1543431A (zh) 2004-11-03
CN1288068C (zh) 2006-12-06
EP1465832A2 (de) 2004-10-13
AU2003202803A1 (en) 2003-07-30
WO2003059805A2 (en) 2003-07-24
WO2003059805A3 (en) 2004-04-15
US7138893B2 (en) 2006-11-21
US20040149558A1 (en) 2004-08-05
KR20040080333A (ko) 2004-09-18
EP1465832B1 (de) 2007-03-14

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: PANASONIC CORP., KADOMA, OSAKA, JP