DE60300663D1 - Drehzahlsteuerung für ein Vakuumpumpsystem - Google Patents

Drehzahlsteuerung für ein Vakuumpumpsystem

Info

Publication number
DE60300663D1
DE60300663D1 DE60300663T DE60300663T DE60300663D1 DE 60300663 D1 DE60300663 D1 DE 60300663D1 DE 60300663 T DE60300663 T DE 60300663T DE 60300663 T DE60300663 T DE 60300663T DE 60300663 D1 DE60300663 D1 DE 60300663D1
Authority
DE
Germany
Prior art keywords
vacuum pump
speed control
pump system
speed
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE60300663T
Other languages
English (en)
Other versions
DE60300663T2 (de
Inventor
Hirotaka Namiki
Hideki Ohmori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Japan Ltd
Original Assignee
BOC Edwards Japan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2002067803A external-priority patent/JP2003269373A/ja
Priority claimed from JP2002265866A external-priority patent/JP2004100624A/ja
Application filed by BOC Edwards Japan Ltd filed Critical BOC Edwards Japan Ltd
Publication of DE60300663D1 publication Critical patent/DE60300663D1/de
Application granted granted Critical
Publication of DE60300663T2 publication Critical patent/DE60300663T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/16—Combinations of two or more pumps ; Producing two or more separate gas flows
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02—Surge control
    • F04D27/0261—Surge control by varying driving speed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
    • F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
    • F04D29/668—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps damping or preventing mechanical vibrations
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
    • Y02B30/00—Energy efficient heating, ventilation or air conditioning [HVAC]
    • Y02B30/70—Efficient control or regulation technologies, e.g. for control of refrigerant flow, motor or heating

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
DE60300663T 2002-03-13 2003-03-11 Drehzahlsteuerung für ein Vakuumpumpsystem Expired - Fee Related DE60300663T2 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2002067803A JP2003269373A (ja) 2002-03-13 2002-03-13 真空ポンプシステム及び真空ポンプの回転数制御方法
JP2002067803 2002-03-13
JP2002265866 2002-09-11
JP2002265866A JP2004100624A (ja) 2002-09-11 2002-09-11 真空ポンプシステム

Publications (2)

Publication Number Publication Date
DE60300663D1 true DE60300663D1 (de) 2005-06-23
DE60300663T2 DE60300663T2 (de) 2005-11-17

Family

ID=27767227

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60300663T Expired - Fee Related DE60300663T2 (de) 2002-03-13 2003-03-11 Drehzahlsteuerung für ein Vakuumpumpsystem

Country Status (4)

Country Link
US (1) US20030175112A1 (de)
EP (1) EP1344941B1 (de)
KR (1) KR20030074415A (de)
DE (1) DE60300663T2 (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1768484B2 (de) 2004-07-13 2021-04-21 DeLaval Holding AB Steuerbare vakuumquelle
DE102004048866A1 (de) * 2004-10-07 2006-04-13 Leybold Vacuum Gmbh Schnelldrehende Vakuumpumpe
GB0424734D0 (en) * 2004-11-09 2004-12-08 Boc Group Plc Vacuum pumping system
US20070062451A1 (en) * 2005-09-20 2007-03-22 Wen-Cheng Hsu Stabilizing system for film deposition
US7854596B2 (en) * 2007-01-24 2010-12-21 Johnson Controls Technology Company System and method of operation of multiple screw compressors with continuously variable speed to provide noise cancellation
SE531046C2 (sv) 2007-04-03 2008-12-02 Delaval Holding Ab En metod i ett mjölkningssystem för att skapa en erfordrad vakumnivå och datorprogramprodukter
DE102009005032A1 (de) * 2009-01-17 2010-07-22 Oerlikon Leybold Vacuum Gmbh Schwingungsreduziereinrichtung
CN102392828B (zh) * 2011-09-15 2014-03-12 北京中科科仪股份有限公司 一种磁悬浮分子泵转子章动峰振动控制方法
JP6151951B2 (ja) * 2013-04-04 2017-06-21 株式会社Ihi 騒音低減装置
JP2017163204A (ja) * 2016-03-07 2017-09-14 ＡＰＲＥＳＩＡ Ｓｙｓｔｅｍｓ株式会社 通信装置
CN107013447B (zh) * 2017-05-18 2018-07-10 广东美的制冷设备有限公司 压缩机驱动系统及其的控制方法、装置
CN106968931B (zh) * 2017-05-18 2018-07-13 广东美的制冷设备有限公司 压缩机驱动系统及其的控制方法、装置
TW201926403A (zh) * 2017-12-06 2019-07-01 京鼎精密科技股份有限公司 半導體加工系統
WO2020031990A1 (ja) * 2018-08-06 2020-02-13 エドワーズ株式会社 除害システム、除害装置、およびシステム制御装置
JP7299098B2 (ja) * 2018-08-06 2023-06-27 エドワーズ株式会社 除害システム、除害装置、およびシステム制御装置
JP7242321B2 (ja) * 2019-02-01 2023-03-20 エドワーズ株式会社 真空ポンプ及び真空ポンプの制御装置
TWI804846B (zh) * 2021-04-09 2023-06-11 致揚科技股份有限公司 高可靠性的渦輪分子泵及其系統

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5259731A (en) * 1991-04-23 1993-11-09 Dhindsa Jasbir S Multiple reciprocating pump system
JP3569924B2 (ja) * 1992-03-19 2004-09-29 松下電器産業株式会社 流体回転装置
US5971711A (en) * 1996-05-21 1999-10-26 Ebara Corporation Vacuum pump control system
GB9717400D0 (en) * 1997-08-15 1997-10-22 Boc Group Plc Vacuum pumping systems
JPH11113283A (ja) * 1997-09-30 1999-04-23 Toshiba Corp モータの駆動装置
JP3929185B2 (ja) * 1998-05-20 2007-06-13 株式会社荏原製作所 真空排気装置及び方法
US6382249B1 (en) * 1999-10-04 2002-05-07 Ebara Corporation Vacuum exhaust system
JP2003101274A (ja) * 2001-09-19 2003-04-04 Fujitsu Ltd 送風ユニットを備えた装置

Also Published As

Publication number Publication date
EP1344941A1 (de) 2003-09-17
EP1344941B1 (de) 2005-05-18
US20030175112A1 (en) 2003-09-18
KR20030074415A (ko) 2003-09-19
DE60300663T2 (de) 2005-11-17

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee