DE60233501D1 - System zur abgabe eines ultrareinen chemischen stoffes - Google Patents

System zur abgabe eines ultrareinen chemischen stoffes

Info

Publication number
DE60233501D1
DE60233501D1 DE60233501T DE60233501T DE60233501D1 DE 60233501 D1 DE60233501 D1 DE 60233501D1 DE 60233501 T DE60233501 T DE 60233501T DE 60233501 T DE60233501 T DE 60233501T DE 60233501 D1 DE60233501 D1 DE 60233501D1
Authority
DE
Germany
Prior art keywords
block
chemical
point
ultrapure
container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60233501T
Other languages
English (en)
Inventor
Mindi Xu
Tay Sayasane
Joseph E Paganessi
Gregory M Jursich
Lorrin Y Honda
Naouyki Nakamoto
Yukinobu Nishikawa
Herve E Dulphy
Guillaume Rameau
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Air Liquide SA
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Original Assignee
Air Liquide SA
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Liquide SA, LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude filed Critical Air Liquide SA
Application granted granted Critical
Publication of DE60233501D1 publication Critical patent/DE60233501D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto 
    • B08B9/02—Cleaning pipes or tubes or systems of pipes or tubes
    • B08B9/027—Cleaning the internal surfaces; Removal of blockages
    • B08B9/032—Cleaning the internal surfaces; Removal of blockages by the mechanical action of a moving fluid, e.g. by flushing
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
    • C03B19/1415—Reactant delivery systems
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01413—Reactant delivery systems
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45561—Gas plumbing upstream of the reaction chamber
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C9/00—Methods or apparatus for discharging liquefied or solidified gases from vessels not under pressure
    • F17C9/02—Methods or apparatus for discharging liquefied or solidified gases from vessels not under pressure with change of state, e.g. vaporisation
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/30—For glass precursor of non-standard type, e.g. solid SiH3F
    • C03B2207/32—Non-halide
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
    • F17C2205/0323—Valves
    • F17C2205/0332—Safety valves or pressure relief valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
    • F17C2205/0338—Pressure regulators
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2221/00—Handled fluid, in particular type of fluid
    • F17C2221/01—Pure fluids
    • F17C2221/014—Nitrogen
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2221/00—Handled fluid, in particular type of fluid
    • F17C2221/01—Pure fluids
    • F17C2221/016—Noble gases (Ar, Kr, Xe)
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2221/00—Handled fluid, in particular type of fluid
    • F17C2221/01—Pure fluids
    • F17C2221/016—Noble gases (Ar, Kr, Xe)
    • F17C2221/017—Helium
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2221/00—Handled fluid, in particular type of fluid
    • F17C2221/05—Ultrapure fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
    • F17C2223/01—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the phase
    • F17C2223/0107—Single phase
    • F17C2223/0123—Single phase gaseous, e.g. CNG, GNC
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
    • F17C2223/03—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the pressure level
    • F17C2223/033—Small pressure, e.g. for liquefied gas
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2227/00—Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
    • F17C2227/04—Methods for emptying or filling
    • F17C2227/044—Methods for emptying or filling by purging
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2227/00—Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
    • F17C2227/04—Methods for emptying or filling
    • F17C2227/045—Methods for emptying or filling by vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2270/00—Applications
    • F17C2270/05—Applications for industrial use
    • F17C2270/0518—Semiconductors

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Metallurgy (AREA)
  • Manufacturing & Machinery (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • General Engineering & Computer Science (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)
  • Chemical Vapour Deposition (AREA)
  • Degasification And Air Bubble Elimination (AREA)
  • Medicines Containing Material From Animals Or Micro-Organisms (AREA)
DE60233501T 2001-07-16 2002-07-12 System zur abgabe eines ultrareinen chemischen stoffes Expired - Lifetime DE60233501D1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US30513301P 2001-07-16 2001-07-16
US10/064,220 US7334708B2 (en) 2001-07-16 2002-06-21 Integral blocks, chemical delivery systems and methods for delivering an ultrapure chemical
PCT/IB2002/002796 WO2003012163A2 (en) 2001-07-16 2002-07-12 Integral blocks, chemical delivery systems and methods for delivering an ultrapure chemical

Publications (1)

Publication Number Publication Date
DE60233501D1 true DE60233501D1 (de) 2009-10-08

Family

ID=26744282

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60233501T Expired - Lifetime DE60233501D1 (de) 2001-07-16 2002-07-12 System zur abgabe eines ultrareinen chemischen stoffes

Country Status (9)

Country Link
US (1) US7334708B2 (de)
EP (1) EP1409766B1 (de)
JP (1) JP2004537400A (de)
KR (1) KR20040030063A (de)
CN (1) CN1298418C (de)
AT (1) ATE440977T1 (de)
DE (1) DE60233501D1 (de)
TW (1) TW552372B (de)
WO (1) WO2003012163A2 (de)

Families Citing this family (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4763339B2 (ja) * 2005-05-11 2011-08-31 レール・リキード−ソシエテ・アノニム・プール・レテュード・エ・レクスプロワタシオン・デ・プロセデ・ジョルジュ・クロード 配管のクリーニング方法
US20070007879A1 (en) * 2005-07-11 2007-01-11 Bergman Thomas J Jr Low vapor pressure gas delivery system and apparatus
US7625197B2 (en) * 2005-09-12 2009-12-01 Johnson & Johnson Vision Care, Inc. Devices and processes for performing degassing operations
US20090263566A1 (en) * 2005-09-21 2009-10-22 Tadahiro Ohmi Reduced Pressure Deposition Apparatus and Reduced Pressure Deposition Method
WO2007045509A1 (en) * 2005-10-21 2007-04-26 Lonza Ag Mass flow rate control system
US20070175392A1 (en) * 2006-01-27 2007-08-02 American Air Liquide, Inc. Multiple precursor dispensing apparatus
JP5145667B2 (ja) * 2006-08-03 2013-02-20 トヨタ自動車株式会社 水素供給装置
US20090280080A1 (en) * 2008-05-09 2009-11-12 Lavay Carter Aryl silicone polyester resins as hair glossers
IT1393250B1 (it) * 2009-03-03 2012-04-12 Air Liquide Italia S P A Metodo ed impianto per refrigerare e/o movimentare fluidi mediante l'uso di gas criogenici liquefatti
WO2011024651A1 (ja) * 2009-08-31 2011-03-03 独立行政法人石油天然ガス・金属鉱物資源機構 スラリー調製方法、スラリー調製装置、炭化水素合成反応装置、及び炭化水素合成反応システム
US8414684B2 (en) * 2010-06-01 2013-04-09 Dionex Corporation High pressure degas assembly for chromatography system and method
FR2969994B1 (fr) * 2011-01-05 2013-02-08 Hypred Dispositif de raccordement d'une cuve de stockage a une alimentation et procede de gestion d'un tel raccordement
EP2715781B1 (de) 2011-05-28 2020-07-01 Entegris Inc. Nachfüllbare ampulle mit entlüftungsfähigkeit
FR2976260B1 (fr) * 2011-06-09 2013-07-05 Air Liquide Procede de conditionnement de melanges no/n2 avec etapes de purge et rincage gazeux prealable
FR2976258B1 (fr) 2011-06-09 2014-09-05 Air Liquide Installation de conditionnement de no a debitmetres massiques
US8927059B2 (en) * 2011-11-08 2015-01-06 Applied Materials, Inc. Deposition of metal films using alane-based precursors
US9238865B2 (en) 2012-02-06 2016-01-19 Asm Ip Holding B.V. Multiple vapor sources for vapor deposition
US20150153003A1 (en) * 2013-09-17 2015-06-04 J. W. Randolph Miller Nitric oxide cylinder filling apparatus and method
JP5999073B2 (ja) * 2013-11-20 2016-09-28 東京エレクトロン株式会社 処理液供給装置、処理液供給方法及び記憶媒体
US20150321859A1 (en) * 2014-05-06 2015-11-12 Air Liquide Large Industries U.S. Lp Method And Apparatus For Providing Over-Pressure Protection For An Underground Storage Cavern
CN109477216A (zh) * 2016-03-28 2019-03-15 应用材料公司 去除气体管线内的沉积后残余的前驱物的设备和方法
US10184496B2 (en) * 2016-12-06 2019-01-22 Airgas, Inc. Automatic pressure and vacuum clearing skid method
KR101965805B1 (ko) * 2017-04-17 2019-04-04 한밭대학교 산학협력단 열 응답성을 향상시킨 캐니스터
KR101959244B1 (ko) * 2017-08-03 2019-03-18 전연자 수도배관 세척방법
US10353404B1 (en) * 2017-12-22 2019-07-16 Lincoln Industrial Corporation Fluid dispenser and evacuator
US10351413B1 (en) 2017-12-22 2019-07-16 Lincoln Industrial Corporation Fluid dispenser having pressure regulator
US10351414B1 (en) * 2017-12-22 2019-07-16 Lincoln Industrial Corporation Fluid handling device having valve
CN108506730A (zh) * 2018-05-09 2018-09-07 苏州卫鹏机电科技有限公司 一种供气系统及其供气方法
CN109353983A (zh) * 2018-10-18 2019-02-19 江阴江化微电子材料股份有限公司 一种化学品槽车的移动式自动充填装置
AU2020285721A1 (en) 2019-05-28 2022-01-06 Illumina, Inc. Two-phase flushing systems and methods
US11788190B2 (en) 2019-07-05 2023-10-17 Asm Ip Holding B.V. Liquid vaporizer
US11946136B2 (en) 2019-09-20 2024-04-02 Asm Ip Holding B.V. Semiconductor processing device
US11596983B2 (en) * 2020-05-27 2023-03-07 Viavi Solutions Inc. Monitoring solvent in a fiber cleaning device
CN112032393B (zh) * 2020-07-20 2022-11-18 黄友耐 一种液化气专用阀
KR102379062B1 (ko) * 2020-09-25 2022-03-28 대우조선해양 주식회사 선박의 저장탱크 온도 조절 시스템 및 방법
CN115254815A (zh) * 2022-06-28 2022-11-01 上海至纯系统集成有限公司 一种液态前驱体供液设备

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2614338B2 (ja) 1990-01-11 1997-05-28 株式会社東芝 液体ソース容器
US5148945B1 (en) * 1990-09-17 1996-07-02 Applied Chemical Solutions Apparatus and method for the transfer and delivery of high purity chemicals
US5460297A (en) * 1992-03-05 1995-10-24 Abcc/Tech Corp. Paint tinting apparatus
US5360139A (en) * 1993-01-22 1994-11-01 Hydra Rig, Inc. Liquified natural gas fueling facility
US5359787A (en) 1993-04-16 1994-11-01 Air Products And Chemicals, Inc. High purity bulk chemical delivery system
US5878793A (en) * 1993-04-28 1999-03-09 Siegele; Stephen H. Refillable ampule and method re same
US5607002A (en) 1993-04-28 1997-03-04 Advanced Delivery & Chemical Systems, Inc. Chemical refill system for high purity chemicals
US5465766A (en) 1993-04-28 1995-11-14 Advanced Delivery & Chemical Systems, Inc. Chemical refill system for high purity chemicals
US5950693A (en) * 1993-04-28 1999-09-14 Advanced Delivery & Chemical Systems, Ltd. Bulk chemical delivery system
US5964254A (en) 1997-07-11 1999-10-12 Advanced Delivery & Chemical Systems, Ltd. Delivery system and manifold
US6199599B1 (en) 1997-07-11 2001-03-13 Advanced Delivery & Chemical Systems Ltd. Chemical delivery system having purge system utilizing multiple purge techniques
US6258170B1 (en) * 1997-09-11 2001-07-10 Applied Materials, Inc. Vaporization and deposition apparatus
US5964230A (en) 1997-10-06 1999-10-12 Air Products And Chemicals, Inc. Solvent purge mechanism
FR2782506B1 (fr) * 1998-08-18 2000-09-22 Labeille Ets Dispositif et procede de distribution de suspension abrasive pour le polissage mecanique de substrat
US6168048B1 (en) * 1998-09-22 2001-01-02 American Air Liquide, Inc. Methods and systems for distributing liquid chemicals
US6217659B1 (en) 1998-10-16 2001-04-17 Air Products And Chemical, Inc. Dynamic blending gas delivery system and method
US6264064B1 (en) * 1999-10-14 2001-07-24 Air Products And Chemicals, Inc. Chemical delivery system with ultrasonic fluid sensors

Also Published As

Publication number Publication date
ATE440977T1 (de) 2009-09-15
EP1409766B1 (de) 2009-08-26
US7334708B2 (en) 2008-02-26
US20030012709A1 (en) 2003-01-16
KR20040030063A (ko) 2004-04-08
JP2004537400A (ja) 2004-12-16
WO2003012163A2 (en) 2003-02-13
CN1298418C (zh) 2007-02-07
CN1553969A (zh) 2004-12-08
TW552372B (en) 2003-09-11
EP1409766A1 (de) 2004-04-21

Similar Documents

Publication Publication Date Title
DE60233501D1 (de) System zur abgabe eines ultrareinen chemischen stoffes
DE602005024589D1 (de) Polymerisierungsverfahren zur dämpfung der sauerstoffhemmung bei der verfestigung von flüssigkeiten
ATE488533T1 (de) Verfahren zur herstellung von modifiziertem polymer, vorrichtung zur herstellung von modifiziertem polymer und modifiziertes polymer
WO2005024517A3 (en) Apparatus and method for providing fluid for immersion lithography
DE60322548D1 (de) Mikrovorrichtung zum handhaben von flüssigkeiten und verfahren zur deren verwendung
EP1312984A3 (de) Lithographischer Projektionsapparat und Verfahren zur Herstellung einer Vorrichtung
DE602004030187D1 (de) Verfahren und Vorrichtung zur mikrowellenunterstützten Peptidsynthese
HK1092280A1 (en) Stage system, exposure apparatus and exposure method
DE60101747D1 (de) Verfahren und vorrichtung zur herstellung einer beschichtung
ATE306954T1 (de) Unterbrechungsfreie durchfluss pumpvorrichtung und verfahren
NZ600274A (en) Dialysis systems and methods
TW200518189A (en) Lithographic apparatus and device manufacturing method
ATE361900T1 (de) Verfahren und vorrichtung zur schlammbehandlung
DE60236187D1 (de) Sintererzeugnis, harzteilchen und verfahren zu dessen herstellung
WO2004024303A3 (de) Faserkassette und modular aufgebautes kassettensystem
MXPA03000612A (es) Metodos y procesos mejorados para desinfeccion con yodo.
AU766583C (en) Filter membranes for physiologically active substances
KR101956383B1 (ko) 막분리 활성 오니 장치에 의한 유기성 배수의 처리 방법
WO2005092790A3 (en) Method and apparatus for purifying inorganic halides and oxyhalides using zeolites
ATE361334T1 (de) Verfahren zur herstellung von hochreinem polycarbonat
DE60112315D1 (de) Verfahren zur entfernung von verunreinigungen in harnstoffhydrolysereaktoren
ATE344695T1 (de) Vorrichtung und verfahren zur reinigung von giftgas
TW200519529A (en) Lithographic apparatus and device manufacturing method
TW200514614A (en) Methods and apparatus for treating fluids
ATE307832T1 (de) Verfahren zur herstellung von ethylen/vinylacetat-copolymeren

Legal Events

Date Code Title Description
8364 No opposition during term of opposition