DE60220583D1 - Polierverfahren - Google Patents

Polierverfahren

Info

Publication number
DE60220583D1
DE60220583D1 DE60220583T DE60220583T DE60220583D1 DE 60220583 D1 DE60220583 D1 DE 60220583D1 DE 60220583 T DE60220583 T DE 60220583T DE 60220583 T DE60220583 T DE 60220583T DE 60220583 D1 DE60220583 D1 DE 60220583D1
Authority
DE
Germany
Prior art keywords
polishing process
substrate
grinding
polishing
diamond
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE60220583T
Other languages
English (en)
Other versions
DE60220583T2 (de
Inventor
Hisao Yamamoto
Fumiaki Saito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AGC Inc
Original Assignee
Asahi Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Glass Co Ltd filed Critical Asahi Glass Co Ltd
Publication of DE60220583D1 publication Critical patent/DE60220583D1/de
Application granted granted Critical
Publication of DE60220583T2 publication Critical patent/DE60220583T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D13/00—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor
    • B24D13/14—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor acting by the front face
    • B24D13/145—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor acting by the front face having a brush-like working surface
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D13/00—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor
    • B24D13/02—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor acting by their periphery
    • B24D13/10—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor acting by their periphery comprising assemblies of brushes
DE60220583T 2001-04-25 2002-04-23 Polierverfahren Expired - Fee Related DE60220583T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001127978 2001-04-25
JP2001127978 2001-04-25

Publications (2)

Publication Number Publication Date
DE60220583D1 true DE60220583D1 (de) 2007-07-26
DE60220583T2 DE60220583T2 (de) 2008-02-14

Family

ID=18976756

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60220583T Expired - Fee Related DE60220583T2 (de) 2001-04-25 2002-04-23 Polierverfahren

Country Status (4)

Country Link
US (1) US6811469B2 (de)
EP (1) EP1260316B1 (de)
AT (1) ATE364478T1 (de)
DE (1) DE60220583T2 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002270614A (ja) * 2001-03-12 2002-09-20 Canon Inc Ｓｏｉ基体、その熱処理方法、それを有する半導体装置およびその製造方法
US7988539B2 (en) * 2004-05-21 2011-08-02 Epoxi-Tech, Inc. Abrasive cleaning device
US7081047B2 (en) * 2004-05-21 2006-07-25 Epoxi-Tech, Inc. Bristle brush for concrete sanding
ITPC20060042A1 (it) * 2006-09-29 2008-03-30 Tecnosint Srl Utensile da utilizzare su macchine per la lucidatura di piastrelle, marmi o simili
US7690970B2 (en) * 2007-01-19 2010-04-06 Epoxy-Tech, Inc. Abrasive preparation device with an improved abrasion element assembly
PT2282896T (pt) * 2008-04-03 2016-11-23 Caesarstone Sdot-Yam Ltd Laje de mármore artificial com padrões
DE102008063228A1 (de) * 2008-12-22 2010-06-24 Peter Wolters Gmbh Vorrichtung zur beidseitigen schleifenden Bearbeitung flacher Werkstücke
TWM417989U (en) * 2011-01-28 2011-12-11 Green Energy Technology Inc Grinding mechanism
US9266220B2 (en) 2011-12-30 2016-02-23 Saint-Gobain Abrasives, Inc. Abrasive articles and method of forming same
CN103551973A (zh) * 2013-11-08 2014-02-05 谢泽 一种含纤维绳和热膨胀树脂空心微球的抛光轮

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4561214A (en) * 1978-10-12 1985-12-31 Inoue-Japax Research Incorporated Abrading tool
USRE31745E (en) * 1980-02-04 1984-11-27 Flo-Pac Corporation Composite brush
US5903951A (en) * 1995-11-16 1999-05-18 Minnesota Mining And Manufacturing Company Molded brush segment
US5895612A (en) * 1996-01-11 1999-04-20 Jason Incorporated Method of making abrading tools
TW362057B (en) * 1996-08-05 1999-06-21 Hh Patent As Method for the deburring of items
JPH11126755A (ja) * 1997-10-22 1999-05-11 Sumitomo Metal Ind Ltd 半導体熱処理用ボートの製造方法
JP2000119079A (ja) 1998-08-11 2000-04-25 Toshiba Ceramics Co Ltd 半導体熱処理用Ｓｉ−ＳｉＣ製部材およびその製造方法
JP2000124143A (ja) 1998-10-20 2000-04-28 Tokyo Electron Ltd 熱処理装置
JP2000263447A (ja) * 1999-01-14 2000-09-26 Taimei Chemicals Co Ltd 研磨材
US6190769B1 (en) * 1999-02-19 2001-02-20 E. I. Du Pont De Nemours And Company Abrasive filaments of plasticized polyamides
JP4065078B2 (ja) * 1999-05-13 2008-03-19 不二越機械工業株式会社 ディスク鏡面面取り装置

Also Published As

Publication number Publication date
ATE364478T1 (de) 2007-07-15
EP1260316B1 (de) 2007-06-13
DE60220583T2 (de) 2008-02-14
US20020182983A1 (en) 2002-12-05
US6811469B2 (en) 2004-11-02
EP1260316A1 (de) 2002-11-27

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee