DE60217989T8 - Verwendung eines spektroskopischen Ellipsometers - Google Patents
Verwendung eines spektroskopischen Ellipsometers Download PDFInfo
- Publication number
- DE60217989T8 DE60217989T8 DE60217989T DE60217989T DE60217989T8 DE 60217989 T8 DE60217989 T8 DE 60217989T8 DE 60217989 T DE60217989 T DE 60217989T DE 60217989 T DE60217989 T DE 60217989T DE 60217989 T8 DE60217989 T8 DE 60217989T8
- Authority
- DE
- Germany
- Prior art keywords
- spectroscopic ellipsometer
- ellipsometer
- spectroscopic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/21—Polarisation-affecting properties
- G01N21/211—Ellipsometry
Landscapes
- General Health & Medical Sciences (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Spectrometry And Color Measurement (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001127495A JP4399126B2 (ja) | 2001-04-25 | 2001-04-25 | 分光エリプソメータ |
JP2001127495 | 2001-04-25 |
Publications (3)
Publication Number | Publication Date |
---|---|
DE60217989D1 DE60217989D1 (de) | 2007-03-22 |
DE60217989T2 DE60217989T2 (de) | 2007-09-06 |
DE60217989T8 true DE60217989T8 (de) | 2007-12-13 |
Family
ID=18976353
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60217989T Expired - Fee Related DE60217989T8 (de) | 2001-04-25 | 2002-04-16 | Verwendung eines spektroskopischen Ellipsometers |
Country Status (4)
Country | Link |
---|---|
US (1) | US6943880B2 (de) |
EP (1) | EP1253418B1 (de) |
JP (1) | JP4399126B2 (de) |
DE (1) | DE60217989T8 (de) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7301631B1 (en) | 2004-09-17 | 2007-11-27 | J.A. Woollam Co., Inc. | Control of uncertain angle of incidence of beam from Arc lamp |
US6784991B2 (en) * | 2001-06-18 | 2004-08-31 | Therma-Wave, Inc. | Diffractive optical elements and grid polarizers in focusing spectroscopic ellipsometers |
JP2008275632A (ja) * | 2003-05-20 | 2008-11-13 | Dainippon Screen Mfg Co Ltd | 分光エリプソメータ |
DE10333119B3 (de) | 2003-07-21 | 2005-05-25 | Infineon Technologies Ag | Nichtinvasives Verfahren zur Charakterisierung und Identifizierung eingebetteter Mikrostrukturen |
US7738105B1 (en) | 2004-04-23 | 2010-06-15 | Liphardt Martin M | System and method of applying horizontally oriented arc-lamps in ellipsometer or the like systems |
US8189193B1 (en) | 2004-04-23 | 2012-05-29 | J.A. Woollam Co., Inc. | System and method of applying horizontally oriented arc-lamps in ellipsometer or the like systems |
JP4694179B2 (ja) * | 2004-11-18 | 2011-06-08 | 株式会社トプコン | 表面検査装置 |
US7522263B2 (en) * | 2005-12-27 | 2009-04-21 | Asml Netherlands B.V. | Lithographic apparatus and method |
WO2008035685A1 (fr) * | 2006-09-19 | 2008-03-27 | Olympus Medical Systems Corporation | Dispositif de mesure de polarisation |
JP2008191144A (ja) * | 2007-01-11 | 2008-08-21 | Japan Aerospace Exploration Agency | 光学式分光偏光計測装置 |
US8416409B2 (en) | 2010-06-04 | 2013-04-09 | Lockheed Martin Corporation | Method of ellipsometric reconnaissance |
US10018815B1 (en) | 2014-06-06 | 2018-07-10 | J.A. Woolam Co., Inc. | Beam focusing and reflective optics |
US9921395B1 (en) | 2015-06-09 | 2018-03-20 | J.A. Woollam Co., Inc. | Beam focusing and beam collecting optics with wavelength dependent filter element adjustment of beam area |
US9442016B2 (en) | 2014-06-06 | 2016-09-13 | J.A. Woollam Co., Inc | Reflective focusing optics |
US10338362B1 (en) | 2014-06-06 | 2019-07-02 | J.A. Woollam Co., Inc. | Beam focusing and reflecting optics with enhanced detector system |
US11162897B2 (en) | 2019-05-15 | 2021-11-02 | Onto Innovation Inc. | Optical metrology device using numerical aperture reduction |
CN113358579A (zh) * | 2021-05-21 | 2021-09-07 | 上海精测半导体技术有限公司 | 一种宽光谱椭偏光学系统 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5166752A (en) * | 1990-01-11 | 1992-11-24 | Rudolph Research Corporation | Simultaneous multiple angle/multiple wavelength ellipsometer and method |
DE69226514T2 (de) | 1991-01-11 | 1999-04-08 | Rudolph Res Corp | Gleichzeitiges vielfach-winkel/vielfach-wellenlängen ellipsometer und methode |
US5764365A (en) | 1993-11-09 | 1998-06-09 | Nova Measuring Instruments, Ltd. | Two-dimensional beam deflector |
IL107549A (en) | 1993-11-09 | 1996-01-31 | Nova Measuring Instr Ltd | Device for measuring the thickness of thin films |
US5608526A (en) * | 1995-01-19 | 1997-03-04 | Tencor Instruments | Focused beam spectroscopic ellipsometry method and system |
US6734967B1 (en) * | 1995-01-19 | 2004-05-11 | Kla-Tencor Technologies Corporation | Focused beam spectroscopic ellipsometry method and system |
US5969818A (en) | 1998-03-03 | 1999-10-19 | J. A. Woollam Co. Inc. | Beam folding optics system and method of use with application in ellipsometry and polarimetry |
US5963327A (en) | 1998-03-03 | 1999-10-05 | J.A. Woollam Co. Inc. | Total internal reflection electromagnetic radiation beam entry to, and exit from, ellipsometer, polarimeter, reflectometer and the like systems |
US5798837A (en) | 1997-07-11 | 1998-08-25 | Therma-Wave, Inc. | Thin film optical measurement system and method with calibrating ellipsometer |
US5991022A (en) * | 1997-12-09 | 1999-11-23 | N&K Technology, Inc. | Reflectance spectrophotometric apparatus with toroidal mirrors |
WO2002079760A2 (en) * | 2001-03-30 | 2002-10-10 | Therma-Wave, Inc. | Polarimetric scatterometer for critical dimension measurements of periodic structures |
-
2001
- 2001-04-25 JP JP2001127495A patent/JP4399126B2/ja not_active Expired - Fee Related
-
2002
- 2002-04-16 EP EP02008579A patent/EP1253418B1/de not_active Expired - Fee Related
- 2002-04-16 DE DE60217989T patent/DE60217989T8/de not_active Expired - Fee Related
- 2002-04-23 US US10/128,379 patent/US6943880B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP1253418A2 (de) | 2002-10-30 |
DE60217989T2 (de) | 2007-09-06 |
JP2002323304A (ja) | 2002-11-08 |
US6943880B2 (en) | 2005-09-13 |
US20020159063A1 (en) | 2002-10-31 |
EP1253418A3 (de) | 2004-02-04 |
EP1253418B1 (de) | 2007-02-07 |
JP4399126B2 (ja) | 2010-01-13 |
DE60217989D1 (de) | 2007-03-22 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8381 | Inventor (new situation) |
Inventor name: KANZAKI, TOYOKI, KYOTO, JP |
|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |