DE60210431D1 - Achromatisches Spektralellipsometer mit hoher räumlicher Auflösung - Google Patents

Achromatisches Spektralellipsometer mit hoher räumlicher Auflösung

Info

Publication number
DE60210431D1
DE60210431D1 DE60210431T DE60210431T DE60210431D1 DE 60210431 D1 DE60210431 D1 DE 60210431D1 DE 60210431 T DE60210431 T DE 60210431T DE 60210431 T DE60210431 T DE 60210431T DE 60210431 D1 DE60210431 D1 DE 60210431D1
Authority
DE
Germany
Prior art keywords
spatial resolution
high spatial
spectral ellipsometer
achromatic
achromatic spectral
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE60210431T
Other languages
English (en)
Other versions
DE60210431T2 (de
Inventor
Pascal Amary
Ramdane Benferhat
Francis Bos
Denis Cattelan
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Horiba Jobin Yvon SAS
Original Assignee
Horiba Jobin Yvon SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Horiba Jobin Yvon SAS filed Critical Horiba Jobin Yvon SAS
Publication of DE60210431D1 publication Critical patent/DE60210431D1/de
Application granted granted Critical
Publication of DE60210431T2 publication Critical patent/DE60210431T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J4/00—Measuring polarisation of light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry
    • G01N2021/213—Spectrometric ellipsometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry
    • G01N2021/214—Variangle incidence arrangement

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Spectrometry And Color Measurement (AREA)
DE60210431T 2002-06-17 2002-06-17 Achromatisches Spektralellipsometer mit hoher räumlicher Auflösung Expired - Fee Related DE60210431T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP02291510A EP1376100B1 (de) 2002-06-17 2002-06-17 Achromatisches Spektralellipsometer mit hoher räumlicher Auflösung

Publications (2)

Publication Number Publication Date
DE60210431D1 true DE60210431D1 (de) 2006-05-18
DE60210431T2 DE60210431T2 (de) 2006-08-31

Family

ID=29716941

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60210431T Expired - Fee Related DE60210431T2 (de) 2002-06-17 2002-06-17 Achromatisches Spektralellipsometer mit hoher räumlicher Auflösung

Country Status (6)

Country Link
US (1) US7184145B2 (de)
EP (1) EP1376100B1 (de)
JP (1) JP2005530152A (de)
DE (1) DE60210431T2 (de)
TW (1) TWI272375B (de)
WO (1) WO2003106979A1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114264616A (zh) * 2021-12-22 2022-04-01 中北大学 一种全穆勒矩阵椭偏仪的双电机自动变角系统结构

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1738682B1 (de) * 2005-07-01 2008-02-13 Ecole Polytechnique Polarimetrisch elektronisches Abbildungssystem für eine kolposkopische Vorrichtung
EP2053382B1 (de) * 2007-10-23 2010-11-17 Horiba Jobin Yvon S.A.S. Probenhalter zur Analyse einer Probe bei fixem Einfallwinkel, Ellipsometer mit derartigem Element und ellipsometrisches Verfahren für Probenanalyse
JP5107003B2 (ja) * 2007-11-22 2012-12-26 パナソニックヘルスケア株式会社 エバネッセント波発生装置及びそれを用いた観察装置
US8253940B1 (en) 2009-08-24 2012-08-28 J. A. Woollam Co., Inc. UV-IR range variable angle spectroscopic ellipsometer
CN102269858A (zh) * 2010-06-02 2011-12-07 北京智朗芯光科技有限公司 自动聚焦系统和自动聚焦方法
US9568422B2 (en) * 2012-12-17 2017-02-14 Advantest Corporation Light beam incident device and reflected light measurement device
US10018815B1 (en) 2014-06-06 2018-07-10 J.A. Woolam Co., Inc. Beam focusing and reflective optics
US9442016B2 (en) 2014-06-06 2016-09-13 J.A. Woollam Co., Inc Reflective focusing optics
US9921395B1 (en) 2015-06-09 2018-03-20 J.A. Woollam Co., Inc. Beam focusing and beam collecting optics with wavelength dependent filter element adjustment of beam area
US10338362B1 (en) 2014-06-06 2019-07-02 J.A. Woollam Co., Inc. Beam focusing and reflecting optics with enhanced detector system
CN111553255B (zh) * 2020-04-26 2023-04-07 上海天诚比集科技有限公司 基于梯度算法的高空抛物墙体监测区域定位方法
CN116026793B (zh) * 2023-03-31 2023-09-19 中国科学院光电技术研究所 基于离轴抛物面反射镜的brdf和btdf测量系统

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4210401A (en) * 1978-07-28 1980-07-01 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Visible and infrared polarization ratio spectroreflectometer
JP3311497B2 (ja) * 1994-06-29 2002-08-05 日本電子株式会社 フーリエ変換分光位相変調偏光解析法
US5608526A (en) * 1995-01-19 1997-03-04 Tencor Instruments Focused beam spectroscopic ellipsometry method and system
JPH10501072A (ja) * 1995-03-20 1998-01-27 カンサス ステイト ユニバーシティ リサーチ フアウンデーション エリプソメトリー顕微鏡
US6804004B1 (en) * 1998-03-03 2004-10-12 J. A. Woollam Co., Inc Multiple-element lens systems and methods for uncorrelated evaluation of parameters in parameterized mathematical model equations for lens retardance, in ellipometry and polarimetry
US5917594A (en) * 1998-04-08 1999-06-29 Kla-Tencor Corporation Spectroscopic measurement system using an off-axis spherical mirror and refractive elements
US6804003B1 (en) * 1999-02-09 2004-10-12 Kla-Tencor Corporation System for analyzing surface characteristics with self-calibrating capability
WO2000065331A2 (en) * 1999-04-22 2000-11-02 Kla-Tencor Corporation System for analyzing surface characteristics with self-calibrating capability
JP4358982B2 (ja) * 2000-10-25 2009-11-04 株式会社堀場製作所 分光エリプソメータ
US6784991B2 (en) * 2001-06-18 2004-08-31 Therma-Wave, Inc. Diffractive optical elements and grid polarizers in focusing spectroscopic ellipsometers

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114264616A (zh) * 2021-12-22 2022-04-01 中北大学 一种全穆勒矩阵椭偏仪的双电机自动变角系统结构

Also Published As

Publication number Publication date
TWI272375B (en) 2007-02-01
EP1376100B1 (de) 2006-04-05
TW200408795A (en) 2004-06-01
WO2003106979A1 (en) 2003-12-24
JP2005530152A (ja) 2005-10-06
US7184145B2 (en) 2007-02-27
DE60210431T2 (de) 2006-08-31
EP1376100A1 (de) 2004-01-02
US20060164642A1 (en) 2006-07-27

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee