DE602008005779D1 - Festkörpermikroanemometer und herstellungsverfahren dafür - Google Patents

Festkörpermikroanemometer und herstellungsverfahren dafür

Info

Publication number
DE602008005779D1
DE602008005779D1 DE602008005779T DE602008005779T DE602008005779D1 DE 602008005779 D1 DE602008005779 D1 DE 602008005779D1 DE 602008005779 T DE602008005779 T DE 602008005779T DE 602008005779 T DE602008005779 T DE 602008005779T DE 602008005779 D1 DE602008005779 D1 DE 602008005779D1
Authority
DE
Germany
Prior art keywords
semiconductor wafer
cavity
resistor
peripheral edge
microanemometer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602008005779T
Other languages
English (en)
Inventor
Thomas E Plowman
Warren R Jewett
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Memsys Inc
Original Assignee
Memsys Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Memsys Inc filed Critical Memsys Inc
Publication of DE602008005779D1 publication Critical patent/DE602008005779D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6845—Micromachined devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
    • G01F1/69—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element of resistive type
    • G01F1/692—Thin-film arrangements

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Glass Compositions (AREA)
  • Lubricants (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)
  • Measuring Volume Flow (AREA)
  • Micromachines (AREA)
  • Heterocyclic Carbon Compounds Containing A Hetero Ring Having Oxygen Or Sulfur (AREA)
  • Bipolar Transistors (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
DE602008005779T 2007-10-11 2008-10-08 Festkörpermikroanemometer und herstellungsverfahren dafür Active DE602008005779D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/870,612 US7500392B1 (en) 2007-10-11 2007-10-11 Solid state microanemometer device and method of fabrication
PCT/US2008/079153 WO2009048918A1 (en) 2007-10-11 2008-10-08 Solid state microanemometer device and method of fabrication

Publications (1)

Publication Number Publication Date
DE602008005779D1 true DE602008005779D1 (de) 2011-05-05

Family

ID=40260756

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602008005779T Active DE602008005779D1 (de) 2007-10-11 2008-10-08 Festkörpermikroanemometer und herstellungsverfahren dafür

Country Status (9)

Country Link
US (1) US7500392B1 (de)
EP (1) EP2201336B1 (de)
JP (1) JP2011501126A (de)
AT (1) ATE503170T1 (de)
AU (1) AU2008310945A1 (de)
CA (1) CA2702049A1 (de)
DE (1) DE602008005779D1 (de)
DK (1) DK2201336T3 (de)
WO (1) WO2009048918A1 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0720905D0 (en) 2007-10-25 2007-12-05 Cambridge Entpr Ltd Shear stress sensors
EP2260245B1 (de) * 2008-03-07 2015-01-07 Belimo Holding AG Vorrichtung zum messen und regeln eines volumenstroms in einem lüftungsrohr
JP2014016237A (ja) * 2012-07-09 2014-01-30 Azbil Corp フローセンサ
US9741375B2 (en) * 2015-11-19 2017-08-22 Seagate Technology Llc Slider trailing edge contamination sensor
DE102015121866A1 (de) * 2015-12-15 2017-06-22 Jobst Technologies Gmbh Verfahren zur Bestimmung einer Flussrate bzw. Strömungsgeschwindigkeit eines Mediums
US10739175B1 (en) * 2020-02-07 2020-08-11 King Faisal University Microflow sensor and flow sensor package
CN113295224B (zh) * 2021-05-25 2022-07-22 中国科学院上海微系统与信息技术研究所 气液两用热式流量传感器及其制备方法

Family Cites Families (40)

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Publication number Priority date Publication date Assignee Title
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US4966037A (en) * 1983-09-12 1990-10-30 Honeywell Inc. Cantilever semiconductor device
US4594889A (en) 1984-12-06 1986-06-17 Ford Motor Company Mass airflow sensor
US4779458A (en) 1986-12-29 1988-10-25 Mawardi Osman K Flow sensor
JPH0810231B2 (ja) 1987-03-31 1996-01-31 シャープ株式会社 フローセンサ
US4930347A (en) 1989-05-23 1990-06-05 University Of Cincinnati Solid state microanemometer with improved sensitivity and response time
US5060035A (en) 1989-07-13 1991-10-22 Mitsubishi Denki Kabushiki Kaisha Silicon-on-insulator metal oxide semiconductor device having conductive sidewall structure
US5231877A (en) 1990-12-12 1993-08-03 University Of Cincinnati Solid state microanemometer
US5201221A (en) 1991-03-15 1993-04-13 Ford Motor Company Flow sensor and method of manufacture
US5205170A (en) 1991-04-01 1993-04-27 Ford Motor Company Mass flow sensor
US5321382A (en) 1991-07-08 1994-06-14 Nippondenso Co., Ltd. Thermal type flow rate sensor
US5313832A (en) 1991-12-23 1994-05-24 Ford Motor Company Composite mass air flow sensor
US5263380A (en) 1992-02-18 1993-11-23 General Motors Corporation Differential AC anemometer
JPH06249693A (ja) 1993-02-25 1994-09-09 Robert Bosch Gmbh 質量流量センサおよびその製造方法
JP3353987B2 (ja) * 1994-01-10 2002-12-09 株式会社半導体エネルギー研究所 素子作製方法
JP2880651B2 (ja) * 1994-08-12 1999-04-12 東京瓦斯株式会社 熱式マイクロフローセンサ及びその製造方法
US5883310A (en) * 1994-11-04 1999-03-16 The Regents Of The University Of California Micromachined hot-wire shear stress sensor
CN1077283C (zh) 1996-08-23 2002-01-02 李韫言 一种微细加工的热式流量传感器及其制造方法
JPH10221144A (ja) * 1997-02-03 1998-08-21 Omron Corp マイクロヒータ及びその製造方法
DE19752208A1 (de) * 1997-11-25 1999-06-02 Bosch Gmbh Robert Thermischer Membransensor und Verfahren zu seiner Herstellung
JP3867393B2 (ja) 1998-03-20 2007-01-10 株式会社デンソー マイクロヒータおよびその製造方法ならびにエアフローセンサ
US6032527A (en) 1998-07-01 2000-03-07 Memsys, Inc. Solid state microanemometer
US6794981B2 (en) 1998-12-07 2004-09-21 Honeywell International Inc. Integratable-fluid flow and property microsensor assembly
US7109842B1 (en) 1998-12-07 2006-09-19 Honeywell International Inc. Robust fluid flow and property microsensor made of optimal material
WO2000037895A1 (de) 1998-12-22 2000-06-29 Sensirion Ag Verfahren und sensor zur messung eines massenflusses
JP3513048B2 (ja) 1999-04-13 2004-03-31 三菱電機株式会社 感熱式流量センサおよびその製造方法
JP3468731B2 (ja) 2000-01-14 2003-11-17 株式会社日立製作所 熱式空気流量センサ、素子および内燃機関制御装置
JP2001215141A (ja) * 2000-02-01 2001-08-10 Hitachi Ltd 熱式流量センサ
CH695166A5 (de) 2000-04-25 2005-12-30 Sensirion Ag Verfahren und Vorrichtung zum Messen des Flusses einer Flüssigkeit.
US6502459B1 (en) 2000-09-01 2003-01-07 Honeywell International Inc. Microsensor for measuring velocity and angular direction of an incoming air stream
US6631638B2 (en) 2001-01-30 2003-10-14 Rosemount Aerospace Inc. Fluid flow sensor
JP3828794B2 (ja) 2001-12-05 2006-10-04 株式会社日立製作所 空気流量測定装置
JPWO2003063258A1 (ja) * 2002-01-24 2005-05-26 三菱電機株式会社 半導体装置
EP1351039A1 (de) 2002-04-03 2003-10-08 Sensirion AG Strömungssensor und zugehöriges Herstellungsverfahren
EP1365216B1 (de) 2002-05-10 2018-01-17 Azbil Corporation Durchflusssensor und Verfahren zu dessen Herstellung
EP1396705B1 (de) 2002-08-27 2016-12-21 Sensirion Holding AG Flussdetektor mit Durchführungen und Verfahren zu dessen Herstellung
JP4292026B2 (ja) * 2003-05-30 2009-07-08 株式会社日立製作所 熱式流量センサ
JP3920247B2 (ja) 2003-07-02 2007-05-30 三菱電機株式会社 感熱式流量検出素子およびその製造方法
US7036369B2 (en) 2004-06-30 2006-05-02 Codman & Shurtleff, Inc. Thermal flow sensor having recesses in a substrate
US7316965B2 (en) 2005-06-21 2008-01-08 Freescale Semiconductor, Inc. Substrate contact for a capped MEMS and method of making the substrate contact at the wafer level

Also Published As

Publication number Publication date
US7500392B1 (en) 2009-03-10
EP2201336A1 (de) 2010-06-30
ATE503170T1 (de) 2011-04-15
CA2702049A1 (en) 2009-04-16
JP2011501126A (ja) 2011-01-06
AU2008310945A1 (en) 2009-04-16
WO2009048918A1 (en) 2009-04-16
EP2201336B1 (de) 2011-03-23
DK2201336T3 (da) 2011-07-04

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