DE602007013843D1 - Verfahren zur Herstellung eines piezoelektrischen/elektrostriktiven Elements - Google Patents

Verfahren zur Herstellung eines piezoelektrischen/elektrostriktiven Elements

Info

Publication number
DE602007013843D1
DE602007013843D1 DE602007013843T DE602007013843T DE602007013843D1 DE 602007013843 D1 DE602007013843 D1 DE 602007013843D1 DE 602007013843 T DE602007013843 T DE 602007013843T DE 602007013843 T DE602007013843 T DE 602007013843T DE 602007013843 D1 DE602007013843 D1 DE 602007013843D1
Authority
DE
Germany
Prior art keywords
piezoelectric
producing
electrostrictive element
electrostrictive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602007013843T
Other languages
English (en)
Inventor
Takao Ohnishi
Makoto Tani
Takashi Wada
Takaaki Koizumi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2007065922A external-priority patent/JP4995603B2/ja
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Publication of DE602007013843D1 publication Critical patent/DE602007013843D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/853—Ceramic compositions
    • H10N30/8561—Bismuth-based oxides
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
    • H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
    • H10N30/079—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing using intermediate layers, e.g. for growth control
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/09—Forming piezoelectric or electrostrictive materials
    • H10N30/093—Forming inorganic materials
    • H10N30/097—Forming inorganic materials by sintering
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/853—Ceramic compositions
    • H10N30/8542—Alkali metal based oxides, e.g. lithium, sodium or potassium niobates

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Micromachines (AREA)
DE602007013843T 2006-08-14 2007-05-25 Verfahren zur Herstellung eines piezoelektrischen/elektrostriktiven Elements Active DE602007013843D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006221129 2006-08-14
JP2007065922A JP4995603B2 (ja) 2006-03-22 2007-03-14 圧電／電歪素子の製造方法

Publications (1)

Publication Number Publication Date
DE602007013843D1 true DE602007013843D1 (de) 2011-05-26

Family

ID=38669835

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602007013843T Active DE602007013843D1 (de) 2006-08-14 2007-05-25 Verfahren zur Herstellung eines piezoelektrischen/elektrostriktiven Elements

Country Status (3)

Country Link
EP (1) EP1890345B1 (de)
CN (1) CN101290966B (de)
DE (1) DE602007013843D1 (de)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1403281A (zh) * 2001-09-05 2003-03-19 飞赫科技股份有限公司 压电式喷墨头的喷墨装置及其制造方法
US6767749B2 (en) * 2002-04-22 2004-07-27 The United States Of America As Represented By The Secretary Of The Navy Method for making piezoelectric resonator and surface acoustic wave device using hydrogen implant layer splitting
JP3971279B2 (ja) * 2002-09-20 2007-09-05 キヤノン株式会社 圧電体素子の製造方法
DE602004023665D1 (de) * 2003-02-26 2009-12-03 Kyocera Corp Laminiertes elektronisches Bauelement
JP4878111B2 (ja) * 2003-10-30 2012-02-15 日本碍子株式会社 セル駆動型圧電／電歪アクチュエータ及びその製造方法
JP4748978B2 (ja) * 2004-12-02 2011-08-17 日本碍子株式会社 圧電／電歪素子及びその製造方法

Also Published As

Publication number Publication date
EP1890345B1 (de) 2011-04-13
CN101290966A (zh) 2008-10-22
EP1890345A1 (de) 2008-02-20
CN101290966B (zh) 2010-12-01

Similar Documents

Publication Publication Date Title
DE602007000719D1 (de) Verfahren zur Herstellung eines wabenförmigen Körpers
DE602007012785D1 (de) Verfahren zur Herstellung einer Photomaske
DE602006004751D1 (de) Verfahren zur Herstellung eines planaren Kondensators
DE112010004178T8 (de) Piezoelektrisches Bauelement und Verfahren zur Herstellung eines piezoelektrischen Bauelements
DE602006011671D1 (de) Verfahren zur Herstellung eines mehrschichtigen Keramiksubstrats
DE502008002169D1 (de) Verfahren zur herstellung eines bewegungssensors
DE602007010373D1 (de) Verfahren zur Herstellung einer Wabenstruktur
AT505197A3 (de) Verfahren zur aktivierung eines photosensibilisators
ATE455105T1 (de) Verfahren zur herstellung von difluormethylpyrazolylcarboxylaten
DE602007011917D1 (de) Verfahren zur herstellung eines iii-n-volumenkristalls und eines freistehenden iii-n-substrats und iii-n-volumenkristall und freistehendes iii-n-substrat
ATE548409T1 (de) Verfahren zur herstellung eines vernetzten elastomers
DE502007002942D1 (de) Verfahren zur herstellung eines einteiligen kolbens
DE602005020148D1 (de) Verfahren zur herstellung einer mems-vorrichtung
DE102007017831B8 (de) Halbleitermodul und ein Verfahren zur Herstellung eines Halbleitermoduls
DE502006005741D1 (de) Verfahren zur herstellung eines festen gehäuses
ATE480531T1 (de) Verfahren zur herstellung von benzopyran-2- olderivaten
DE502006009267D1 (de) Verfahren zur herstellung eines festen gehäuses
DE502007005615D1 (de) Verfahren zur herstellung eines piezoaktors
AT503190A3 (de) Verfahren zur herstellung einer halbleitervorrichtung
DE602006006758D1 (de) Verfahren zur Herstellung einer Zahnstange
DE602006017295D1 (de) Verfahren zur Herstellung eines Silizium Einkristalles
DE102005061920B4 (de) Verfahren zur Erzeugung eines Schrumpfsitzes
DE602007008875D1 (de) Verfahren zur herstellung eines verwendungsfertigen desinfektionsmittels
DE602007009332D1 (de) Verfahren zur Herstellung einer Brennkammer
ATE544755T1 (de) Verfahren zur herstellung einer 5-alkoxy-4- hydroxymethylpyrazolverbindung