DE602007000656D1 - Transportsystem und Transportverfahren - Google Patents

Transportsystem und Transportverfahren

Info

Publication number
DE602007000656D1
DE602007000656D1 DE602007000656T DE602007000656T DE602007000656D1 DE 602007000656 D1 DE602007000656 D1 DE 602007000656D1 DE 602007000656 T DE602007000656 T DE 602007000656T DE 602007000656 T DE602007000656 T DE 602007000656T DE 602007000656 D1 DE602007000656 D1 DE 602007000656D1
Authority
DE
Germany
Prior art keywords
transport
transport system
transport method
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602007000656T
Other languages
English (en)
Inventor
Yasuhisa Ito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Machinery Ltd
Original Assignee
Murata Machinery Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Machinery Ltd filed Critical Murata Machinery Ltd
Publication of DE602007000656D1 publication Critical patent/DE602007000656D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/52—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67276—Production flow monitoring, e.g. for increasing throughput
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67733—Overhead conveying
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67736—Loading to or unloading from a conveyor
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/137—Associated with semiconductor wafer handling including means for charging or discharging wafer cassette
DE602007000656T 2006-04-14 2007-04-13 Transportsystem und Transportverfahren Active DE602007000656D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006112401A JP4200387B2 (ja) 2006-04-14 2006-04-14 搬送システム

Publications (1)

Publication Number Publication Date
DE602007000656D1 true DE602007000656D1 (de) 2009-04-23

Family

ID=38283907

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602007000656T Active DE602007000656D1 (de) 2006-04-14 2007-04-13 Transportsystem und Transportverfahren

Country Status (5)

Country Link
US (1) US7806648B2 (de)
EP (1) EP1845552B1 (de)
JP (1) JP4200387B2 (de)
DE (1) DE602007000656D1 (de)
TW (1) TW200807490A (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7591624B2 (en) * 2006-01-09 2009-09-22 International Business Machines Corporation Reticle storage pod (RSP) transport system utilizing FOUP adapter plate
US8205558B2 (en) * 2007-07-09 2012-06-26 Middlesex General Industries, Inc. System and method of improving throughput and vehicle utilization of monorail factory transport systems
US8977387B2 (en) * 2009-10-29 2015-03-10 Taiwan Semiconductor Manufacturing Company, Ltd. System and method for overhead cross-system transportation
CN102514920B (zh) * 2011-12-16 2013-11-20 乌毡帽酒业有限公司 一种定位结构
WO2015045583A1 (ja) 2013-09-27 2015-04-02 村田機械株式会社 物品の支持装置及び支持装置への２種類の物品の載置方法
CN105593141B (zh) * 2013-09-30 2017-06-23 村田机械株式会社 保管库
JP6493339B2 (ja) * 2016-08-26 2019-04-03 村田機械株式会社 搬送容器、及び収容物の移載方法
CN114649250B (zh) * 2022-05-20 2022-08-05 弥费实业(上海)有限公司 供存储库与oht交换晶圆盒的运输装置、天车窗口及存储库

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6467932A (en) 1987-09-08 1989-03-14 Mitsubishi Electric Corp Semiconductor wafer cassette conveyor
US5668056A (en) * 1990-12-17 1997-09-16 United Microelectronics Corporation Single semiconductor wafer transfer method and manufacturing system
JPH0637227U (ja) 1992-10-23 1994-05-17 村田機械株式会社 搬送システム
US5855465A (en) * 1996-04-16 1999-01-05 Gasonics International Semiconductor wafer processing carousel
JP3682170B2 (ja) 1998-09-09 2005-08-10 株式会社東芝 カセット搬送システム、半導体露光装置、及びレチクル運搬方法
US6568896B2 (en) * 2001-03-21 2003-05-27 Applied Materials, Inc. Transfer chamber with side wall port
JP3734432B2 (ja) 2001-06-07 2006-01-11 三星電子株式会社 マスク搬送装置、マスク搬送システム及びマスク搬送方法
JP4019675B2 (ja) 2001-10-01 2007-12-12 神鋼電機株式会社 搬送装置
JP2003188229A (ja) * 2001-12-18 2003-07-04 Hitachi Kasado Eng Co Ltd ウエハ製造システムおよびウエハ製造方法
JP4220173B2 (ja) 2002-03-26 2009-02-04 株式会社日立ハイテクノロジーズ 基板の搬送方法
US6848882B2 (en) * 2003-03-31 2005-02-01 Taiwan Semiconductor Manufacturing Co., Ltd Apparatus and method for positioning a cassette pod onto a loadport by an overhead hoist transport system
JP2005136294A (ja) 2003-10-31 2005-05-26 Murata Mach Ltd 移載装置

Also Published As

Publication number Publication date
TW200807490A (en) 2008-02-01
US7806648B2 (en) 2010-10-05
EP1845552A1 (de) 2007-10-17
EP1845552B1 (de) 2009-03-11
JP4200387B2 (ja) 2008-12-24
JP2007287877A (ja) 2007-11-01
US20070284217A1 (en) 2007-12-13

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition