DE602006021746D1 - Asymmetrischer ringförmiger Detektor - Google Patents

Asymmetrischer ringförmiger Detektor

Info

Publication number
DE602006021746D1
DE602006021746D1 DE602006021746T DE602006021746T DE602006021746D1 DE 602006021746 D1 DE602006021746 D1 DE 602006021746D1 DE 602006021746 T DE602006021746 T DE 602006021746T DE 602006021746 T DE602006021746 T DE 602006021746T DE 602006021746 D1 DE602006021746 D1 DE 602006021746D1
Authority
DE
Germany
Prior art keywords
annular detector
asymmetric annular
asymmetric
detector
annular
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602006021746T
Other languages
English (en)
Inventor
Pavel Adamec
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ICT Integrated Circuit Testing Gesellschaft fuer Halbleiterprueftechnik mbH
Original Assignee
ICT Integrated Circuit Testing Gesellschaft fuer Halbleiterprueftechnik mbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ICT Integrated Circuit Testing Gesellschaft fuer Halbleiterprueftechnik mbH filed Critical ICT Integrated Circuit Testing Gesellschaft fuer Halbleiterprueftechnik mbH
Publication of DE602006021746D1 publication Critical patent/DE602006021746D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2443—Scintillation detectors

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measurement Of Radiation (AREA)
DE602006021746T 2006-09-07 2006-09-07 Asymmetrischer ringförmiger Detektor Active DE602006021746D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP06018788A EP1898443B1 (de) 2006-09-07 2006-09-07 Asymmetrischer ringförmiger Detektor

Publications (1)

Publication Number Publication Date
DE602006021746D1 true DE602006021746D1 (de) 2011-06-16

Family

ID=37708287

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602006021746T Active DE602006021746D1 (de) 2006-09-07 2006-09-07 Asymmetrischer ringförmiger Detektor

Country Status (3)

Country Link
US (1) US7659514B2 (de)
EP (1) EP1898443B1 (de)
DE (1) DE602006021746D1 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CZ307557B6 (cs) * 2010-10-07 2018-12-05 Tescan Orsay Holding, A.S. Scintilační detekční jednotka pro detekci zpětně odražených elektronů pro elektronové nebo iontové mikroskopy
JP2012199052A (ja) * 2011-03-22 2012-10-18 Jeol Ltd 電子検出機構及びそれを備えた荷電粒子線装置
DE102011052924A1 (de) * 2011-08-23 2013-02-28 Universität Regensburg Vorrichtung und Verfahren zur Messung der Strahlablenkung mittels Frequenzanalyse
US8895935B2 (en) * 2012-03-12 2014-11-25 Hermes Microvision, Inc. High efficiency secondary and back scattered electron detector
US9418819B2 (en) 2013-09-06 2016-08-16 Kla-Tencor Corporation Asymmetrical detector design and methodology
US9995841B2 (en) * 2016-06-21 2018-06-12 Schlumberger Technology Corporation Compact scintillation detector
IL295646A (en) * 2020-03-02 2022-10-01 Hitachi High Tech Corp Charged particle detector, charged particle beam device, radiation detector and radiation detection device

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3500903A1 (de) * 1985-01-12 1986-07-17 Fa. Carl Zeiss, 7920 Heidenheim Detektor fuer rueckstreuelektronen
JPS62140069A (ja) * 1985-12-16 1987-06-23 Hitachi Ltd 核酸断片検出装置
JPH04249843A (ja) * 1990-11-30 1992-09-04 Topcon Corp 反射電子検出器
JP3413264B2 (ja) * 1993-12-28 2003-06-03 株式会社トプコン 反射電子検出器
JP3434165B2 (ja) * 1997-04-18 2003-08-04 株式会社日立製作所 走査電子顕微鏡
DE19828476A1 (de) * 1998-06-26 1999-12-30 Leo Elektronenmikroskopie Gmbh Teilchenstrahlgerät
US6775452B2 (en) * 2001-05-18 2004-08-10 Applied Materials, Inc. Phosphor coated waveguide for efficient collection of electron-generated photons

Also Published As

Publication number Publication date
US20080061244A1 (en) 2008-03-13
EP1898443A1 (de) 2008-03-12
EP1898443B1 (de) 2011-05-04
US7659514B2 (en) 2010-02-09

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