DE602006003719D1 - Vorrichtung und Verfahren zur Beurteilung der Ansteuereigenschaften eines Scanners - Google Patents

Vorrichtung und Verfahren zur Beurteilung der Ansteuereigenschaften eines Scanners

Info

Publication number
DE602006003719D1
DE602006003719D1 DE602006003719T DE602006003719T DE602006003719D1 DE 602006003719 D1 DE602006003719 D1 DE 602006003719D1 DE 602006003719 T DE602006003719 T DE 602006003719T DE 602006003719 T DE602006003719 T DE 602006003719T DE 602006003719 D1 DE602006003719 D1 DE 602006003719D1
Authority
DE
Germany
Prior art keywords
assessing
scanner
driving characteristics
driving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE602006003719T
Other languages
English (en)
Inventor
Yong-Chul Cho
Seok-Mo Chang
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Samsung Electronics Co Ltd
Original Assignee
Samsung Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Samsung Electronics Co Ltd filed Critical Samsung Electronics Co Ltd
Publication of DE602006003719D1 publication Critical patent/DE602006003719D1/de
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/005—Testing of reflective surfaces, e.g. mirrors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/28—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with deflection of beams of light, e.g. for direct optical indication
    • G01D5/30—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with deflection of beams of light, e.g. for direct optical indication the beams of light being detected by photocells
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/12—Scanning systems using multifaceted mirrors
    • G02B26/127—Adaptive control of the scanning light beam, e.g. using the feedback from one or more detectors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/0075—Electrical details, e.g. drive or control circuits or methods
    • H02N2/008—Means for controlling vibration frequency or phase, e.g. for resonance tracking

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
DE602006003719T 2006-01-06 2006-03-31 Vorrichtung und Verfahren zur Beurteilung der Ansteuereigenschaften eines Scanners Expired - Fee Related DE602006003719D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020060001674A KR100682955B1 (ko) 2006-01-06 2006-01-06 스캐너의 구동특성 평가장치 및 방법

Publications (1)

Publication Number Publication Date
DE602006003719D1 true DE602006003719D1 (de) 2009-01-02

Family

ID=37888327

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602006003719T Expired - Fee Related DE602006003719D1 (de) 2006-01-06 2006-03-31 Vorrichtung und Verfahren zur Beurteilung der Ansteuereigenschaften eines Scanners

Country Status (5)

Country Link
US (1) US20070159189A1 (de)
EP (1) EP1806571B1 (de)
JP (1) JP2007183264A (de)
KR (1) KR100682955B1 (de)
DE (1) DE602006003719D1 (de)

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US8752969B1 (en) 2007-10-15 2014-06-17 Arete Associates Method of operating a fast scanning mirror
JP5027617B2 (ja) * 2007-10-30 2012-09-19 エーエルティー株式会社 共振周波数および最大光学振り角の測定方法
JP5020117B2 (ja) * 2008-02-14 2012-09-05 三菱電機株式会社 ガルバノスキャナ制御装置
KR101227401B1 (ko) * 2009-03-26 2013-01-29 국방과학연구소 주사 거울 정렬 장치
JP5513017B2 (ja) * 2009-06-15 2014-06-04 日本電信電話株式会社 角度測定装置
DE102010003608B4 (de) 2010-03-19 2019-04-04 Robert Bosch Gmbh Vorrichtung und Verfahren zur Charakterisierung eines auslenkbaren Mikrospiegels
TWI414751B (zh) * 2010-05-25 2013-11-11 Univ Nat Yunlin Sci & Tech 旋轉角度量測系統
JP5857711B2 (ja) * 2011-12-15 2016-02-10 株式会社リコー 光学測定装置
CN102519368A (zh) * 2011-12-27 2012-06-27 合肥工业大学 法向位移和角度传感光学测头及测量方法
TW201344240A (zh) * 2012-04-19 2013-11-01 Touch Micro System Tech 環狀結構及其相關微掃瞄鏡
CN102721526B (zh) * 2012-06-27 2015-04-15 无锡微奥科技有限公司 一种轴向运动电热式微镜的自动测试系统及测试方法
CN102914417A (zh) * 2012-09-14 2013-02-06 无锡微奥科技有限公司 一种电热式微镜的自动测试系统及方法
KR101361980B1 (ko) 2012-09-21 2014-02-12 한국과학기술원 광섬유를 증폭 매질로 하는 쳐프 펄스 증폭 시스템의 능동적 보상 시스템
CN103884491B (zh) * 2014-03-10 2016-08-17 北京理工大学 一种扫描相机摆镜二维动态角测量校准方法与装置
CN104034281B (zh) * 2014-06-16 2016-08-31 浙江大学 用于自由曲面形貌测量的光学自聚焦探头
JP6701688B2 (ja) * 2015-03-16 2020-05-27 株式会社リコー 検査システム
US10088557B2 (en) 2015-03-20 2018-10-02 MSOTEK Co., Ltd LIDAR apparatus
JP6480784B2 (ja) * 2015-04-02 2019-03-13 日本信号株式会社 光走査アクチュエータの評価装置
US20170328942A1 (en) * 2016-05-10 2017-11-16 Ultimems, Inc. Electrostatic scanner having sensing comb assemblies
CN107764207A (zh) * 2016-08-23 2018-03-06 北京遥感设备研究所 一种激光二维动态角测量传感器
JP6829375B2 (ja) 2016-09-28 2021-02-10 ミツミ電機株式会社 光走査型ヘッドマウントディスプレイ及び網膜走査型ヘッドマウントディスプレイ
CN108918087B (zh) * 2018-07-10 2020-07-03 徐州中知知识产权服务有限公司 一种汽车前照灯自动检测系统
US10939080B2 (en) * 2019-03-29 2021-03-02 Facebook Technologies, Llc Trajectory estimation for a MEMS reflector
CN110608870A (zh) * 2019-09-18 2019-12-24 武汉光迅科技股份有限公司 一种转镜矩阵的测试装置及方法
KR102282802B1 (ko) * 2020-12-31 2021-07-28 김도명 다축 제어방식의 객체 추적 시스템
CN113375905B (zh) * 2021-05-31 2022-08-19 昆明物理研究所 红外光学瞄准具扫描摆镜转角范围及控制稳定性测量方法
JP2022187717A (ja) * 2021-06-08 2022-12-20 富士フイルム株式会社 画像形成装置、及びその作動方法
JP2023000751A (ja) * 2021-06-18 2023-01-04 富士フイルム株式会社 光走査装置、光走査装置の駆動方法、及び画像描画システム
WO2024063203A1 (ko) * 2022-09-19 2024-03-28 주식회사 위멤스 구조체의 위치 센싱 장치 및 이를 포함하는 멤스 스캐너 패키지

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JPS60166952A (ja) 1984-02-10 1985-08-30 Canon Inc 位置検出装置
US5138638A (en) * 1991-01-11 1992-08-11 Tytronix Corporation System for determining the number of shoppers in a retail store and for processing that information to produce data for store management
IL111229A (en) * 1994-10-10 1998-06-15 Nova Measuring Instr Ltd Autofocusing microscope
JPH1026724A (ja) 1996-07-11 1998-01-27 Olympus Optical Co Ltd アクティブ式多点測距装置
US6052197A (en) * 1998-06-15 2000-04-18 Scotts Technology Inc. Apparatus for wafer level testing of a micromachined device
KR20010101041A (ko) * 1998-11-30 2001-11-14 기시모토 마사도시 측정장치
US6605796B2 (en) 2000-05-25 2003-08-12 Westar Photonics Laser beam shaping device and apparatus for material machining
DE10038622A1 (de) 2000-08-03 2002-02-21 Leica Microsystems Scan-Mikroskop,optische Anordnung und Verfahren zur Bildaufnahme in der Scan-Mikroskopie
JP2003077154A (ja) * 2001-04-25 2003-03-14 Olympus Optical Co Ltd ミラーの角度検出装置、光信号スイッチシステム及び光信号スイッチング方法
DE10205207B4 (de) * 2002-02-08 2004-07-01 Jenoptik Ldt Gmbh Anordnung und Verfahren zur Messung an einem resonanten Schwinger und zu seiner Steuerung
US6889156B2 (en) * 2002-12-13 2005-05-03 Texas Instruments Incorporated Automatic test system for an analog micromirror device

Also Published As

Publication number Publication date
KR100682955B1 (ko) 2007-02-15
EP1806571B1 (de) 2008-11-19
US20070159189A1 (en) 2007-07-12
EP1806571A1 (de) 2007-07-11
JP2007183264A (ja) 2007-07-19

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee