DE602006000135D1 - Mikroelektromechanischer Schalter und Verfahren zu dessen Herstellung - Google Patents

Mikroelektromechanischer Schalter und Verfahren zu dessen Herstellung

Info

Publication number
DE602006000135D1
DE602006000135D1 DE602006000135T DE602006000135T DE602006000135D1 DE 602006000135 D1 DE602006000135 D1 DE 602006000135D1 DE 602006000135 T DE602006000135 T DE 602006000135T DE 602006000135 T DE602006000135 T DE 602006000135T DE 602006000135 D1 DE602006000135 D1 DE 602006000135D1
Authority
DE
Germany
Prior art keywords
movable electrode
actuator
disposed
movable
contact
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602006000135T
Other languages
English (en)
Other versions
DE602006000135T2 (de
Inventor
Takahiro Masuda
Tomonori Seki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Omron Corp
Original Assignee
Omron Corp
Omron Tateisi Electronics Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Omron Corp, Omron Tateisi Electronics Co filed Critical Omron Corp
Publication of DE602006000135D1 publication Critical patent/DE602006000135D1/de
Application granted granted Critical
Publication of DE602006000135T2 publication Critical patent/DE602006000135T2/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • E—FIXED CONSTRUCTIONS
    • E05—LOCKS; KEYS; WINDOW OR DOOR FITTINGS; SAFES
    • E05C—BOLTS OR FASTENING DEVICES FOR WINGS, SPECIALLY FOR DOORS OR WINDOWS
    • E05C3/00—Fastening devices with bolts moving pivotally or rotatively
    • E05C3/12—Fastening devices with bolts moving pivotally or rotatively with latching action
    • E05C3/16—Fastening devices with bolts moving pivotally or rotatively with latching action with operating handle or equivalent member moving otherwise than rigidly with the latch
    • E05C3/167—Fastening devices with bolts moving pivotally or rotatively with latching action with operating handle or equivalent member moving otherwise than rigidly with the latch the latch pivoting about an axis perpendicular to the wing
    • E—FIXED CONSTRUCTIONS
    • E05—LOCKS; KEYS; WINDOW OR DOOR FITTINGS; SAFES
    • E05F—DEVICES FOR MOVING WINGS INTO OPEN OR CLOSED POSITION; CHECKS FOR WINGS; WING FITTINGS NOT OTHERWISE PROVIDED FOR, CONCERNED WITH THE FUNCTIONING OF THE WING
    • E05F11/00—Man-operated mechanisms for operating wings, including those which also operate the fastening
    • E05F11/02—Man-operated mechanisms for operating wings, including those which also operate the fastening for wings in general, e.g. fanlights
    • E05F11/08—Man-operated mechanisms for operating wings, including those which also operate the fastening for wings in general, e.g. fanlights with longitudinally-moving bars guided, e.g. by pivoted links, in or on the frame
    • E05F11/10—Mechanisms by which a handle moves the bar
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • E—FIXED CONSTRUCTIONS
    • E05—LOCKS; KEYS; WINDOW OR DOOR FITTINGS; SAFES
    • E05Y—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES E05D AND E05F, RELATING TO CONSTRUCTION ELEMENTS, ELECTRIC CONTROL, POWER SUPPLY, POWER SIGNAL OR TRANSMISSION, USER INTERFACES, MOUNTING OR COUPLING, DETAILS, ACCESSORIES, AUXILIARY OPERATIONS NOT OTHERWISE PROVIDED FOR, APPLICATION THEREOF
    • E05Y2900/00—Application of doors, windows, wings or fittings thereof
    • E05Y2900/10—Application of doors, windows, wings or fittings thereof for buildings or parts thereof
    • E05Y2900/13—Type of wing
    • E05Y2900/132—Doors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0084—Switches making use of microelectromechanical systems [MEMS] with perpendicular movement of the movable contact relative to the substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0089—Providing protection of elements to be released by etching of sacrificial element; Avoiding stiction problems, e.g. of movable element to substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H01H2059/0081—Electrostatic relays; Electro-adhesion relays making use of micromechanics with a tapered air-gap between fixed and movable electrodes

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Micromachines (AREA)
  • Push-Button Switches (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
DE602006000135T 2005-03-14 2006-03-14 Mikroelektromechanischer Schalter und Verfahren zu dessen Herstellung Active DE602006000135T2 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2005071729 2005-03-14
JP2005071729 2005-03-14
JP2006016973 2006-01-25
JP2006016973A JP4792994B2 (ja) 2005-03-14 2006-01-25 静電マイクロ接点開閉器およびその製造方法、ならびに静電マイクロ接点開閉器を用いた装置

Publications (2)

Publication Number Publication Date
DE602006000135D1 true DE602006000135D1 (de) 2007-11-15
DE602006000135T2 DE602006000135T2 (de) 2008-07-10

Family

ID=36570501

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602006000135T Active DE602006000135T2 (de) 2005-03-14 2006-03-14 Mikroelektromechanischer Schalter und Verfahren zu dessen Herstellung

Country Status (8)

Country Link
US (1) US7463126B2 (de)
EP (1) EP1703532B1 (de)
JP (1) JP4792994B2 (de)
KR (1) KR100799454B1 (de)
CN (1) CN1848344B (de)
AT (1) ATE375000T1 (de)
DE (1) DE602006000135T2 (de)
TW (1) TWI300233B (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100601533B1 (ko) * 2004-07-28 2006-07-19 삼성에스디아이 주식회사 이차전지용 이차보호소자
FR2876995B1 (fr) * 2004-10-26 2007-05-04 Commissariat Energie Atomique Microsysteme comportant un pont deformable
JP2006269127A (ja) * 2005-03-22 2006-10-05 Toshiba Corp マイクロマシンスイッチ及び電子機器
DE102007013102A1 (de) * 2007-03-14 2008-09-18 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mikromechanische Schaltervorrichtung mit mechanischer Kraftverstärkung
JP4970150B2 (ja) * 2007-06-01 2012-07-04 株式会社東芝 半導体装置
US8115577B2 (en) * 2007-06-14 2012-02-14 Panasonic Corporation Electromechanical switch, filter using the same, and communication apparatus
US8138859B2 (en) * 2008-04-21 2012-03-20 Formfactor, Inc. Switch for use in microelectromechanical systems (MEMS) and MEMS devices incorporating same
US8779886B2 (en) * 2009-11-30 2014-07-15 General Electric Company Switch structures
KR101914186B1 (ko) 2010-11-10 2018-12-28 타이코 일렉트로닉스 저팬 지.케이. 접점 구조
US9251984B2 (en) * 2012-12-27 2016-02-02 Intel Corporation Hybrid radio frequency component
CN107749373B (zh) * 2017-10-24 2019-06-14 上海交通大学 一种大可控行程微作动器

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5278368A (en) 1991-06-24 1994-01-11 Matsushita Elec. Works, Ltd Electrostatic relay
DE4205029C1 (en) 1992-02-19 1993-02-11 Siemens Ag, 8000 Muenchen, De Micro-mechanical electrostatic relay - has tongue-shaped armature etched from surface of silicon@ substrate
DE4205340C1 (en) 1992-02-21 1993-08-05 Siemens Ag, 8000 Muenchen, De Micro-mechanical electrostatic relay with parallel electrodes - has frame shaped armature substrate with armature contacts above base electrode contacts on base substrate
JP2900861B2 (ja) * 1995-10-05 1999-06-02 オムロン株式会社 可動片ブロック
JP3493974B2 (ja) 1997-10-01 2004-02-03 オムロン株式会社 静電マイクロリレー
JP3393467B2 (ja) 1997-10-27 2003-04-07 オムロン株式会社 静電マイクロリレー
US6115231A (en) * 1997-11-25 2000-09-05 Tdk Corporation Electrostatic relay
DE19823690C1 (de) 1998-05-27 2000-01-05 Siemens Ag Mikromechanisches elektrostatisches Relais
JP3796988B2 (ja) 1998-11-26 2006-07-12 オムロン株式会社 静電マイクロリレー
JP2000243202A (ja) * 1999-02-22 2000-09-08 Omron Corp マイクロリレー
JP2000317897A (ja) * 1999-02-23 2000-11-21 Matsushita Electric Works Ltd 熱絶縁構造体及びこれを用いた半導体マイクロアクチュエータ及び半導体マイクロバルブ及び半導体マイクロリレー
KR100364726B1 (ko) * 2000-05-01 2002-12-16 엘지전자 주식회사 마이크로 스위치 및 그 제조방법
US6768403B2 (en) * 2002-03-12 2004-07-27 Hrl Laboratories, Llc Torsion spring for electro-mechanical switches and a cantilever-type RF micro-electromechanical switch incorporating the torsion spring
KR100519749B1 (ko) * 2001-05-10 2005-10-07 삼성전자주식회사 단일 앵커를 구비하는 마이크로 전자 기계시스템(ｍｅｍｓ) 스위치
JP4447940B2 (ja) 2004-02-27 2010-04-07 富士通株式会社 マイクロスイッチング素子製造方法およびマイクロスイッチング素子

Also Published As

Publication number Publication date
JP4792994B2 (ja) 2011-10-12
CN1848344B (zh) 2010-05-12
KR100799454B1 (ko) 2008-01-30
EP1703532B1 (de) 2007-10-03
CN1848344A (zh) 2006-10-18
TW200703399A (en) 2007-01-16
US7463126B2 (en) 2008-12-09
ATE375000T1 (de) 2007-10-15
US20060208837A1 (en) 2006-09-21
JP2006294591A (ja) 2006-10-26
KR20060100928A (ko) 2006-09-21
DE602006000135T2 (de) 2008-07-10
EP1703532A1 (de) 2006-09-20
TWI300233B (en) 2008-08-21

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