ATE443340T1 - Elektrostatischer mikroschalter, verfahren zu seiner herstellung, und damit versehene vorrichtung - Google Patents

Elektrostatischer mikroschalter, verfahren zu seiner herstellung, und damit versehene vorrichtung

Info

Publication number
ATE443340T1
ATE443340T1 AT06111046T AT06111046T ATE443340T1 AT E443340 T1 ATE443340 T1 AT E443340T1 AT 06111046 T AT06111046 T AT 06111046T AT 06111046 T AT06111046 T AT 06111046T AT E443340 T1 ATE443340 T1 AT E443340T1
Authority
AT
Austria
Prior art keywords
movable
fixed
substrate
side signal
signal conducting
Prior art date
Application number
AT06111046T
Other languages
English (en)
Inventor
Koji Sano
Isamu Kimura
Masao Jojima
Original Assignee
Omron Tateisi Electronics Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Omron Tateisi Electronics Co filed Critical Omron Tateisi Electronics Co
Application granted granted Critical
Publication of ATE443340T1 publication Critical patent/ATE443340T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics

Landscapes

  • Micromachines (AREA)
  • Manufacture Of Switches (AREA)
  • Push-Button Switches (AREA)
  • Manufacture Of Macromolecular Shaped Articles (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
AT06111046T 2005-03-18 2006-03-13 Elektrostatischer mikroschalter, verfahren zu seiner herstellung, und damit versehene vorrichtung ATE443340T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005080536A JP4506529B2 (ja) 2005-03-18 2005-03-18 静電マイクロスイッチおよびその製造方法、ならびに静電マイクロスイッチを備えた装置

Publications (1)

Publication Number Publication Date
ATE443340T1 true ATE443340T1 (de) 2009-10-15

Family

ID=36649598

Family Applications (1)

Application Number Title Priority Date Filing Date
AT06111046T ATE443340T1 (de) 2005-03-18 2006-03-13 Elektrostatischer mikroschalter, verfahren zu seiner herstellung, und damit versehene vorrichtung

Country Status (7)

Country Link
US (1) US7719066B2 (de)
EP (1) EP1703531B1 (de)
JP (1) JP4506529B2 (de)
CN (1) CN100459010C (de)
AT (1) ATE443340T1 (de)
DE (1) DE602006009165D1 (de)
TW (1) TWI300232B (de)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4739173B2 (ja) * 2006-12-07 2011-08-03 富士通株式会社 マイクロスイッチング素子
US8138859B2 (en) * 2008-04-21 2012-03-20 Formfactor, Inc. Switch for use in microelectromechanical systems (MEMS) and MEMS devices incorporating same
US8466870B2 (en) * 2008-08-29 2013-06-18 The Invention Science Fund, I, LLC E-paper application control based on conformation sequence status
US8272571B2 (en) * 2008-08-29 2012-09-25 The Invention Science Fund I, Llc E-paper display control of classified content based on e-paper conformation
US8490860B2 (en) * 2008-08-29 2013-07-23 The Invention Science Fund I, Llc Display control of classified content based on flexible display containing electronic device conformation
US8613394B2 (en) * 2008-08-29 2013-12-24 The Invention Science Fund I, Llc Bendable electronic interface external control system and method
US8297495B2 (en) * 2008-08-29 2012-10-30 The Invention Science Fund I, Llc Application control based on flexible interface conformation sequence status
US8517251B2 (en) * 2008-08-29 2013-08-27 The Invention Science Fund I, Llc Application control based on flexible interface conformation sequence status
US8279199B2 (en) 2008-11-14 2012-10-02 The Invention Science Fund I, Llc E-paper external control system and method
US20100073333A1 (en) * 2008-09-22 2010-03-25 Searete Llc, A Limited Liability Corporation Of The State Of Delaware E-paper application control based on conformation sequence status
US8446357B2 (en) * 2008-10-07 2013-05-21 The Invention Science Fund I, Llc E-paper display control based on conformation sequence status
US8462104B2 (en) * 2008-08-29 2013-06-11 The Invention Science Fund I, Llc E-paper display control based on conformation sequence status
US8624833B2 (en) * 2008-09-11 2014-01-07 The Invention Science Fund I, Llc E-paper display control of classified content based on e-paper conformation
US8708220B2 (en) * 2008-08-29 2014-04-29 The Invention Science Fund I, Llc Display control based on bendable interface containing electronic device conformation sequence status
US8646693B2 (en) * 2008-08-29 2014-02-11 The Invention Science Fund I, Llc Application control based on flexible electronic device conformation sequence status
US8777099B2 (en) * 2008-08-29 2014-07-15 The Invention Science Fund I, Llc Bendable electronic device status information system and method
US8393531B2 (en) * 2008-08-29 2013-03-12 The Invention Science Fund I, Llc Application control based on flexible electronic device conformation sequence status
US9176637B2 (en) * 2008-08-29 2015-11-03 Invention Science Fund I, Llc Display control based on bendable interface containing electronic device conformation sequence status
US8485426B2 (en) * 2008-08-29 2013-07-16 The Invention Science Fund I, Llc Bendable electronic device status information system and method
US8322599B2 (en) * 2008-08-29 2012-12-04 The Invention Science Fund I, Llc Display control of classified content based on flexible interface e-paper conformation
US8500002B2 (en) * 2008-08-29 2013-08-06 The Invention Science Fund I, Llc Display control based on bendable display containing electronic device conformation sequence status
US8493336B2 (en) * 2008-10-10 2013-07-23 The Invention Science Fund I, Llc E-paper display control based on conformation sequence status
US8866731B2 (en) * 2008-08-29 2014-10-21 The Invention Science Fund I, Llc E-paper display control of classified content based on e-paper conformation
US20100073263A1 (en) * 2008-09-22 2010-03-25 Searete Llc, A Limited Liability Corporation Of The State Of Delaware, E-Paper application control based on conformation sequence status
US8596521B2 (en) * 2008-08-29 2013-12-03 The Invention Science Fund I, Llc E-paper display control based on conformation sequence status
US8584930B2 (en) * 2008-11-07 2013-11-19 The Invention Science Fund I, Llc E-paper display control based on conformation sequence status
US9035870B2 (en) * 2008-10-07 2015-05-19 The Invention Science Fund I, Llc E-paper display control based on conformation sequence status
US8511563B2 (en) 2008-08-29 2013-08-20 The Invention Science Fund I, Llc Display control of classified content based on flexible interface E-paper conformation
US8544722B2 (en) * 2008-08-29 2013-10-01 The Invention Science Fund I, Llc Bendable electronic interface external control system and method

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2361756A1 (en) * 1999-02-04 2000-08-10 Tyco Electronics Logistics Ag Micro-relay
US6662028B1 (en) * 2000-05-22 2003-12-09 Telefonaktiebolaget L.M. Ericsson Multiple frequency inverted-F antennas having multiple switchable feed points and wireless communicators incorporating the same
JP4602542B2 (ja) * 2000-12-18 2010-12-22 オリンパス株式会社 光偏向器用のミラー揺動体
JP4045090B2 (ja) * 2001-11-06 2008-02-13 オムロン株式会社 静電アクチュエータの調整方法
JP3818176B2 (ja) 2002-03-06 2006-09-06 株式会社村田製作所 Ｒｆｍｅｍｓ素子
EP1351288B1 (de) * 2002-04-05 2015-10-28 STMicroelectronics Srl Verfahren zur Herstellung einer isolierten Durchkontaktierung durch einen Halbleiterkörper und zugehöriges Halbleiterbauelement
US20040007469A1 (en) * 2002-05-07 2004-01-15 Memgen Corporation Selective electrochemical deposition methods using pyrophosphate copper plating baths containing ammonium salts, citrate salts and/or selenium oxide
EP1426992A3 (de) * 2002-12-05 2005-11-30 Omron Corporation Mikroelektromechanische elektrostatische Schalter
JP4182861B2 (ja) * 2002-12-05 2008-11-19 オムロン株式会社 接点開閉器および接点開閉器を備えた装置
JP4066928B2 (ja) * 2002-12-12 2008-03-26 株式会社村田製作所 Ｒｆｍｅｍｓスイッチ
WO2005069766A2 (en) * 2003-11-21 2005-08-04 The Regents Of The University Of California Self-contained cell culture apparatus and method of use
KR100584424B1 (ko) * 2004-11-04 2006-05-26 삼성전자주식회사 카메라 렌즈 어셈블리의 손떨림 보정 장치

Also Published As

Publication number Publication date
CN1848343A (zh) 2006-10-18
JP4506529B2 (ja) 2010-07-21
US20060208328A1 (en) 2006-09-21
US7719066B2 (en) 2010-05-18
EP1703531A2 (de) 2006-09-20
EP1703531B1 (de) 2009-09-16
TW200641948A (en) 2006-12-01
TWI300232B (en) 2008-08-21
CN100459010C (zh) 2009-02-04
DE602006009165D1 (de) 2009-10-29
JP2006261067A (ja) 2006-09-28
EP1703531A3 (de) 2007-08-15

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