DE602005027576D1 - Induktiv angesteuerte plasma-lichtquelle - Google Patents
Induktiv angesteuerte plasma-lichtquelleInfo
- Publication number
- DE602005027576D1 DE602005027576D1 DE602005027576T DE602005027576T DE602005027576D1 DE 602005027576 D1 DE602005027576 D1 DE 602005027576D1 DE 602005027576 T DE602005027576 T DE 602005027576T DE 602005027576 T DE602005027576 T DE 602005027576T DE 602005027576 D1 DE602005027576 D1 DE 602005027576D1
- Authority
- DE
- Germany
- Prior art keywords
- light source
- plasma light
- controlled plasma
- inductively controlled
- inductively
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05G—X-RAY TECHNIQUE
- H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
- H05G2/001—X-ray radiation generated from plasma
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J63/00—Cathode-ray or electron-stream lamps
- H01J63/08—Lamps with gas plasma excited by the ray or stream
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/62—Lamps with gaseous cathode, e.g. plasma cathode
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2229/00—Details of cathode ray tubes or electron beam tubes
- H01J2229/70—Electron beam control outside the vessel
- H01J2229/703—Electron beam control outside the vessel by magnetic fields
- H01J2229/7031—Cores for field producing elements, e.g. ferrite
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Electromagnetism (AREA)
- Spectroscopy & Molecular Physics (AREA)
- X-Ray Techniques (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Plasma Technology (AREA)
- Discharge Lamps And Accessories Thereof (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/888,795 US7307375B2 (en) | 2004-07-09 | 2004-07-09 | Inductively-driven plasma light source |
US10/888,434 US7183717B2 (en) | 2004-07-09 | 2004-07-09 | Inductively-driven light source for microscopy |
US10/888,955 US7199384B2 (en) | 2004-07-09 | 2004-07-09 | Inductively-driven light source for lithography |
PCT/US2005/024095 WO2006017119A2 (en) | 2004-07-09 | 2005-07-07 | Inductively-driven plasma light source |
Publications (1)
Publication Number | Publication Date |
---|---|
DE602005027576D1 true DE602005027576D1 (de) | 2011-06-01 |
Family
ID=35385412
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE602005027576T Active DE602005027576D1 (de) | 2004-07-09 | 2005-07-07 | Induktiv angesteuerte plasma-lichtquelle |
Country Status (6)
Country | Link |
---|---|
US (1) | US20060017387A1 (de) |
EP (2) | EP2187711B1 (de) |
JP (2) | JP5179175B2 (de) |
KR (1) | KR101173324B1 (de) |
DE (1) | DE602005027576D1 (de) |
WO (1) | WO2006017119A2 (de) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9277634B2 (en) | 2013-01-17 | 2016-03-01 | Kla-Tencor Corporation | Apparatus and method for multiplexed multiple discharge plasma produced sources |
DE102020206876B4 (de) | 2020-06-03 | 2022-01-05 | Carl Zeiss Smt Gmbh | EUV-Strahlungsquelle, Einsatz für eine EUV-Strahlungsquelle und Einsatz für einen Einsatz für eine EUV-Strahlungsquelle |
Family Cites Families (44)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3509490A (en) * | 1967-04-26 | 1970-04-28 | Ibm | Inductive excitation system for plasma |
US3500118A (en) * | 1967-07-17 | 1970-03-10 | Gen Electric | Electrodeless gaseous electric discharge devices utilizing ferrite cores |
US3535653A (en) * | 1967-11-15 | 1970-10-20 | Ibm | Multiple loop excitation system for plasma |
US4042848A (en) * | 1974-05-17 | 1977-08-16 | Ja Hyun Lee | Hypocycloidal pinch device |
JPS6013264B2 (ja) * | 1975-12-18 | 1985-04-05 | ゼネラル エレクトリツク コンパニー | 螢光灯 |
JPS56125882A (en) * | 1980-03-07 | 1981-10-02 | Sumitomo Electric Ind Ltd | Manufacture of silicon solar cell |
NL8004175A (nl) * | 1980-07-21 | 1982-02-16 | Philips Nv | Frequentie-omzetter voor het voeden van een elektrodeloze ontladingslamp. |
JPS58152352A (ja) * | 1982-03-05 | 1983-09-09 | Seiko Epson Corp | X線発生装置 |
JPS61106007U (de) * | 1984-12-18 | 1986-07-05 | ||
JPS61163547A (ja) * | 1985-01-14 | 1986-07-24 | Nippon Telegr & Teleph Corp <Ntt> | X線取り出し窓 |
JPS6348733A (ja) * | 1986-08-14 | 1988-03-01 | Nichicon Corp | X線発生装置 |
JPH02256233A (ja) * | 1989-03-29 | 1990-10-17 | Hitachi Ltd | プラズマ処理方法および装置 |
JPH02267896A (ja) * | 1989-04-06 | 1990-11-01 | Seiko Epson Corp | X線発生装置 |
AU6068190A (en) * | 1989-04-17 | 1990-11-16 | Richard C. Auchterlonie | Magnetic fusion reactor and ignition method |
US5746875A (en) * | 1994-09-16 | 1998-05-05 | Applied Materials, Inc. | Gas injection slit nozzle for a plasma process reactor |
US5821705A (en) * | 1996-06-25 | 1998-10-13 | The United States Of America As Represented By The United States Department Of Energy | Dielectric-wall linear accelerator with a high voltage fast rise time switch that includes a pair of electrodes between which are laminated alternating layers of isolated conductors and insulators |
US5736021A (en) * | 1996-07-10 | 1998-04-07 | Applied Materials, Inc. | Electrically floating shield in a plasma reactor |
US6541786B1 (en) * | 1997-05-12 | 2003-04-01 | Cymer, Inc. | Plasma pinch high energy with debris collector |
US6744060B2 (en) * | 1997-05-12 | 2004-06-01 | Cymer, Inc. | Pulse power system for extreme ultraviolet and x-ray sources |
US6815700B2 (en) * | 1997-05-12 | 2004-11-09 | Cymer, Inc. | Plasma focus light source with improved pulse power system |
US6566668B2 (en) * | 1997-05-12 | 2003-05-20 | Cymer, Inc. | Plasma focus light source with tandem ellipsoidal mirror units |
US6150628A (en) * | 1997-06-26 | 2000-11-21 | Applied Science And Technology, Inc. | Toroidal low-field reactive gas source |
US6388226B1 (en) * | 1997-06-26 | 2002-05-14 | Applied Science And Technology, Inc. | Toroidal low-field reactive gas source |
US6313587B1 (en) * | 1998-01-13 | 2001-11-06 | Fusion Lighting, Inc. | High frequency inductive lamp and power oscillator |
NL1008352C2 (nl) * | 1998-02-19 | 1999-08-20 | Stichting Tech Wetenschapp | Inrichting, geschikt voor extreem ultraviolet lithografie, omvattende een stralingsbron en een verwerkingsorgaan voor het verwerken van de van de stralingsbron afkomstige straling, alsmede een filter voor het onderdrukken van ongewenste atomaire en microscopische deeltjes welke door een stralingsbron zijn uitgezonden. |
US6129808A (en) * | 1998-03-31 | 2000-10-10 | Lam Research Corporation | Low contamination high density plasma etch chambers and methods for making the same |
US6380680B1 (en) * | 1998-10-02 | 2002-04-30 | Federal-Mogul World Wide, Inc. | Electrodeless gas discharge lamp assembly with flux concentrator |
US6421421B1 (en) * | 2000-05-22 | 2002-07-16 | Plex, Llc | Extreme ultraviolet based on colliding neutral beams |
US6972421B2 (en) * | 2000-06-09 | 2005-12-06 | Cymer, Inc. | Extreme ultraviolet light source |
TWI240151B (en) * | 2000-10-10 | 2005-09-21 | Asml Netherlands Bv | Lithographic apparatus, device manufacturing method, and device manufactured thereby |
US6614505B2 (en) * | 2001-01-10 | 2003-09-02 | Asml Netherlands B.V. | Lithographic projection apparatus, device manufacturing method, and device manufactured thereby |
US6804327B2 (en) * | 2001-04-03 | 2004-10-12 | Lambda Physik Ag | Method and apparatus for generating high output power gas discharge based source of extreme ultraviolet radiation and/or soft x-rays |
DE20109058U1 (de) * | 2001-05-31 | 2002-10-10 | Deltamed Gmbh | Vorrichtung zur Behandlung mit magnetischen Feldern |
CN1314300C (zh) * | 2001-06-07 | 2007-05-02 | 普莱克斯有限责任公司 | 星形箍缩的x射线和远紫外线光子源 |
US6567499B2 (en) * | 2001-06-07 | 2003-05-20 | Plex Llc | Star pinch X-ray and extreme ultraviolet photon source |
US6642671B2 (en) * | 2001-08-27 | 2003-11-04 | Matsushita Electric Industrial Co., Ltd. | Electrodeless discharge lamp |
DE10151080C1 (de) * | 2001-10-10 | 2002-12-05 | Xtreme Tech Gmbh | Einrichtung und Verfahren zum Erzeugen von extrem ultravioletter (EUV-)Strahlung auf Basis einer Gasentladung |
DE10215469B4 (de) * | 2002-04-05 | 2005-03-17 | Xtreme Technologies Gmbh | Anordnung zur Unterdrückung von Teilchenemission bei einer Strahlungserzeugung auf Basis eines heißen Plasmas |
US6979940B2 (en) * | 2002-05-28 | 2005-12-27 | Matsushita Electric Industrial Co., Ltd. | Electrodeless discharge lamp |
US6826451B2 (en) * | 2002-07-29 | 2004-11-30 | Asml Holding N.V. | Lithography tool having a vacuum reticle library coupled to a vacuum chamber |
US6696802B1 (en) * | 2002-08-22 | 2004-02-24 | Fusion Uv Systems Inc. | Radio frequency driven ultra-violet lamp |
KR100748447B1 (ko) * | 2002-08-23 | 2007-08-10 | 에이에스엠엘 네델란즈 비.브이. | 리소그래피 투영장치 및 상기 장치에 사용하기 위한파티클 배리어 |
JP2004128105A (ja) * | 2002-10-01 | 2004-04-22 | Nikon Corp | X線発生装置及び露光装置 |
US7307375B2 (en) * | 2004-07-09 | 2007-12-11 | Energetiq Technology Inc. | Inductively-driven plasma light source |
-
2005
- 2005-07-07 DE DE602005027576T patent/DE602005027576D1/de active Active
- 2005-07-07 WO PCT/US2005/024095 patent/WO2006017119A2/en active Application Filing
- 2005-07-07 EP EP10155223A patent/EP2187711B1/de active Active
- 2005-07-07 KR KR1020077000541A patent/KR101173324B1/ko active IP Right Grant
- 2005-07-07 JP JP2007520498A patent/JP5179175B2/ja active Active
- 2005-07-07 US US11/176,015 patent/US20060017387A1/en not_active Abandoned
- 2005-07-07 EP EP05770180A patent/EP1774838B1/de active Active
-
2012
- 2012-10-04 JP JP2012222005A patent/JP2013012780A/ja not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
EP2187711A3 (de) | 2010-07-21 |
US20060017387A1 (en) | 2006-01-26 |
KR20070056036A (ko) | 2007-05-31 |
WO2006017119A2 (en) | 2006-02-16 |
KR101173324B1 (ko) | 2012-08-10 |
EP2187711B1 (de) | 2012-01-18 |
EP1774838A2 (de) | 2007-04-18 |
WO2006017119A3 (en) | 2006-06-08 |
EP2187711A2 (de) | 2010-05-19 |
JP5179175B2 (ja) | 2013-04-10 |
JP2008506238A (ja) | 2008-02-28 |
EP1774838B1 (de) | 2011-04-20 |
JP2013012780A (ja) | 2013-01-17 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE602005004314D1 (de) | Flache Lichtquelle | |
TWI365550B (en) | Illumination source | |
EP1730763A4 (de) | Euv-lichtquelle | |
EP1884705A4 (de) | Lichtquellenvorrichtung | |
GB2450045B (en) | Laser driven light source | |
EP1851520A4 (de) | Lasererzeugte plasma-euv-lichtquelle | |
TWI368461B (en) | Euv light source | |
EP2095693A4 (de) | Laserproduzierte plasma-euv-lichtquelle | |
EP1723472A4 (de) | Optische euv-lichtquellenelemente | |
EP2115406A4 (de) | Laserproduzierte plasma-euv-lichtquelle | |
EP2167193A4 (de) | Lasererzeugte plasma-euv-lichtquelle | |
EP1787160A4 (de) | Orientierungsanordnung für einen spiegel oder eine lichtquelle | |
EP1650597A4 (de) | Laserlichtquelle | |
EP1925975A4 (de) | Lichtquelleanordnung | |
DK1740269T3 (da) | Lysterapiindretning | |
PL2390866T3 (pl) | Źródło światła | |
DE602006006530D1 (de) | Lichtquellenvorrichtung | |
DE602008006139D1 (de) | Lichtquelle | |
EP1955362A4 (de) | Euv-lichtquelle auf plasmabasis | |
EP1729381A4 (de) | Lichtquelle mit variabler wellenlänge des dbr-typs | |
GB2413005B (en) | UV light source | |
DK1684552T3 (da) | Udvidet tastestyring af lyskildestyringsapparater | |
DE502005008519D1 (de) | Lichtquellen-Trageinheit | |
GB2399216B (en) | Ultraviolet light source | |
EP1855155A4 (de) | Lichtquellenvorrichtung |