DE602005019819D1 - Verfahren zur Herstellung von Stickstofftrifluorid - Google Patents
Verfahren zur Herstellung von StickstofftrifluoridInfo
- Publication number
- DE602005019819D1 DE602005019819D1 DE602005019819T DE602005019819T DE602005019819D1 DE 602005019819 D1 DE602005019819 D1 DE 602005019819D1 DE 602005019819 T DE602005019819 T DE 602005019819T DE 602005019819 T DE602005019819 T DE 602005019819T DE 602005019819 D1 DE602005019819 D1 DE 602005019819D1
- Authority
- DE
- Germany
- Prior art keywords
- column
- ion source
- ammonium ion
- temperature
- minimizing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/082—Compounds containing nitrogen and non-metals and optionally metals
- C01B21/083—Compounds containing nitrogen and non-metals and optionally metals containing one or more halogen atoms
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/082—Compounds containing nitrogen and non-metals and optionally metals
- C01B21/083—Compounds containing nitrogen and non-metals and optionally metals containing one or more halogen atoms
- C01B21/0832—Binary compounds of nitrogen with halogens
- C01B21/0835—Nitrogen trifluoride
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
- Nitrogen And Oxygen Or Sulfur-Condensed Heterocyclic Ring Systems (AREA)
- Gas Separation By Absorption (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
- Treating Waste Gases (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/945,243 US7045107B2 (en) | 2004-09-20 | 2004-09-20 | Process for the production of nitrogen trifluoride |
Publications (1)
Publication Number | Publication Date |
---|---|
DE602005019819D1 true DE602005019819D1 (de) | 2010-04-22 |
Family
ID=35428030
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE602005019819T Active DE602005019819D1 (de) | 2004-09-20 | 2005-09-20 | Verfahren zur Herstellung von Stickstofftrifluorid |
Country Status (12)
Country | Link |
---|---|
US (1) | US7045107B2 (de) |
EP (1) | EP1640339B1 (de) |
JP (1) | JP4515989B2 (de) |
KR (1) | KR100734383B1 (de) |
CN (1) | CN100482576C (de) |
AT (1) | ATE460383T1 (de) |
CA (1) | CA2520086A1 (de) |
DE (1) | DE602005019819D1 (de) |
MX (1) | MXPA05010108A (de) |
RU (1) | RU2005129184A (de) |
TW (1) | TWI265148B (de) |
ZA (1) | ZA200507484B (de) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7413722B2 (en) * | 2005-08-04 | 2008-08-19 | Foosung Co., Ltd. | Method and apparatus for manufacturing nitrogen trifluoride |
US8163262B1 (en) | 2011-01-04 | 2012-04-24 | Omotowa Bamidele A | Method for production of nitrogen trifluoride from trimethylsilylamines |
JP6089888B2 (ja) * | 2013-03-29 | 2017-03-08 | 栗田工業株式会社 | 混床イオン交換樹脂の分離再生方法 |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3917811A (en) * | 1970-10-19 | 1975-11-04 | Kenics Corp | Interactive surface mixer |
US4091081A (en) * | 1977-04-19 | 1978-05-23 | Air Products And Chemicals, Inc. | Preparation of nitrogen trifluoride |
US4156598A (en) * | 1978-06-08 | 1979-05-29 | Air Products And Chemicals, Inc. | Purification of nitrogen trifluoride atmospheres |
JPS6071503A (ja) * | 1983-09-27 | 1985-04-23 | Central Glass Co Ltd | Νf↓3の製造法 |
US6010605A (en) * | 1995-10-17 | 2000-01-04 | Florida Scientific Laboratories Inc. | Nitrogen trifluoride production apparatus |
US5637285A (en) * | 1996-01-30 | 1997-06-10 | Air Products And Chemicals, Inc. | Process for nitrogen trifluoride synthesis |
JP3727797B2 (ja) * | 1998-05-22 | 2005-12-14 | セントラル硝子株式会社 | 三フッ化窒素の製造方法 |
US6005143A (en) * | 1998-08-07 | 1999-12-21 | Air Products And Chemicals, Inc. | Use of a monolith catalyst for the hydrogenation of dinitrotoluene to toluenediamine |
AU5671001A (en) * | 2000-05-12 | 2001-11-20 | Showa Denko Kabushiki Kaisha | Process for producing nitrogen trifluoride and use thereof |
US6986874B2 (en) * | 2000-12-14 | 2006-01-17 | The Boc Group, Inc. | Method and apparatus for the production of nitrogen trifluoride |
RU2184698C1 (ru) * | 2001-05-08 | 2002-07-10 | Закрытое акционерное общество Научно-производственное объединение "ПиМ-Инвест" | Способ получения трифторида азота |
US7109378B2 (en) | 2001-08-30 | 2006-09-19 | Air Products And Chemicals, Inc. | Monolith catalytic reactor coupled to static mixer |
US6908601B2 (en) * | 2002-02-08 | 2005-06-21 | The Boc Group, Inc. | Method for the production of nitrogen trifluoride |
US6790428B2 (en) * | 2002-03-20 | 2004-09-14 | Air Products And Chemicals, Inc. | Process for the reduction or elimination of NH3/HF byproduct in the manufacture of nitrogen trifluoride |
KR100452233B1 (ko) * | 2002-07-19 | 2004-10-12 | 한국과학기술연구원 | 젯트루프식 분사형 반응기를 이용한 삼불화질소 제조방법 |
US20040096386A1 (en) * | 2002-11-19 | 2004-05-20 | Syvret Robert George | Method for nitrogen trifluoride production |
EP1433747B1 (de) * | 2002-11-19 | 2011-05-18 | Air Products And Chemicals, Inc. | Verfahren zur Herstellung von Stickstofftrifluorid |
US7128885B2 (en) * | 2002-12-23 | 2006-10-31 | The Boc Group, Inc. | NF3 production reactor |
-
2004
- 2004-09-20 US US10/945,243 patent/US7045107B2/en active Active
-
2005
- 2005-09-15 TW TW094131928A patent/TWI265148B/zh not_active IP Right Cessation
- 2005-09-16 ZA ZA200507484A patent/ZA200507484B/en unknown
- 2005-09-19 CA CA002520086A patent/CA2520086A1/en not_active Abandoned
- 2005-09-19 RU RU2005129184/15A patent/RU2005129184A/ru not_active Application Discontinuation
- 2005-09-20 DE DE602005019819T patent/DE602005019819D1/de active Active
- 2005-09-20 CN CNB2005101165746A patent/CN100482576C/zh not_active Expired - Fee Related
- 2005-09-20 MX MXPA05010108A patent/MXPA05010108A/es unknown
- 2005-09-20 AT AT05020514T patent/ATE460383T1/de not_active IP Right Cessation
- 2005-09-20 JP JP2005271646A patent/JP4515989B2/ja not_active Expired - Fee Related
- 2005-09-20 KR KR1020050087335A patent/KR100734383B1/ko not_active IP Right Cessation
- 2005-09-20 EP EP05020514A patent/EP1640339B1/de not_active Not-in-force
Also Published As
Publication number | Publication date |
---|---|
CN1751985A (zh) | 2006-03-29 |
ZA200507484B (en) | 2007-05-30 |
EP1640339A1 (de) | 2006-03-29 |
US20060062711A1 (en) | 2006-03-23 |
MXPA05010108A (es) | 2006-03-23 |
JP2006089371A (ja) | 2006-04-06 |
US7045107B2 (en) | 2006-05-16 |
CA2520086A1 (en) | 2006-03-20 |
TW200610731A (en) | 2006-04-01 |
CN100482576C (zh) | 2009-04-29 |
JP4515989B2 (ja) | 2010-08-04 |
EP1640339B1 (de) | 2010-03-10 |
ATE460383T1 (de) | 2010-03-15 |
KR100734383B1 (ko) | 2007-07-04 |
TWI265148B (en) | 2006-11-01 |
KR20060051426A (ko) | 2006-05-19 |
RU2005129184A (ru) | 2007-03-27 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |