DE602005019168D1 - Fluidabgabeeinrichtung - Google Patents

Fluidabgabeeinrichtung

Info

Publication number
DE602005019168D1
DE602005019168D1 DE602005019168T DE602005019168T DE602005019168D1 DE 602005019168 D1 DE602005019168 D1 DE 602005019168D1 DE 602005019168 T DE602005019168 T DE 602005019168T DE 602005019168 T DE602005019168 T DE 602005019168T DE 602005019168 D1 DE602005019168 D1 DE 602005019168D1
Authority
DE
Germany
Prior art keywords
supply device
fluid supply
discharging
fluid
fluids
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602005019168T
Other languages
English (en)
Inventor
Stefan Pichler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lam Research AG
Original Assignee
Lam Research AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lam Research AG filed Critical Lam Research AG
Publication of DE602005019168D1 publication Critical patent/DE602005019168D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67063—Apparatus for fluid treatment for etching
    • H01L21/67075—Apparatus for fluid treatment for etching for wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B14/00—Arrangements for collecting, re-using or eliminating excess spraying material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
    • B05B7/02—Spray pistols; Apparatus for discharge
    • B05B7/04—Spray pistols; Apparatus for discharge with arrangements for mixing liquids or other fluent materials before discharge
    • B05B7/0416—Spray pistols; Apparatus for discharge with arrangements for mixing liquids or other fluent materials before discharge with arrangements for mixing one gas and one liquid
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
    • B05B7/02—Spray pistols; Apparatus for discharge
    • B05B7/06—Spray pistols; Apparatus for discharge with at least one outlet orifice surrounding another approximately in the same plane
    • B05B7/062—Spray pistols; Apparatus for discharge with at least one outlet orifice surrounding another approximately in the same plane with only one liquid outlet and at least one gas outlet
    • B05B7/065—Spray pistols; Apparatus for discharge with at least one outlet orifice surrounding another approximately in the same plane with only one liquid outlet and at least one gas outlet an inner gas outlet being surrounded by an annular adjacent liquid outlet
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67063—Apparatus for fluid treatment for etching
    • H01L21/67075—Apparatus for fluid treatment for etching for wet etching
    • H01L21/6708—Apparatus for fluid treatment for etching for wet etching using mainly spraying means, e.g. nozzles

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Nozzles (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
DE602005019168T 2004-07-20 2005-07-05 Fluidabgabeeinrichtung Active DE602005019168D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
AT12312004 2004-07-20
PCT/EP2005/053197 WO2006008236A1 (en) 2004-07-20 2005-07-05 Fluid discharging device

Publications (1)

Publication Number Publication Date
DE602005019168D1 true DE602005019168D1 (de) 2010-03-18

Family

ID=34972835

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602005019168T Active DE602005019168D1 (de) 2004-07-20 2005-07-05 Fluidabgabeeinrichtung

Country Status (7)

Country Link
US (1) US7891314B2 (de)
EP (1) EP1771875B1 (de)
KR (1) KR101244903B1 (de)
AT (1) ATE456859T1 (de)
DE (1) DE602005019168D1 (de)
TW (1) TWI267405B (de)
WO (1) WO2006008236A1 (de)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007165661A (ja) * 2005-12-14 2007-06-28 Dainippon Screen Mfg Co Ltd 基板処理装置および基板処理方法
US8480011B2 (en) 2007-09-04 2013-07-09 Dehn's Innovations, Llc Nozzle system and method
JP2010045138A (ja) * 2008-08-11 2010-02-25 Murata Machinery Ltd ノズル
US8997764B2 (en) 2011-05-27 2015-04-07 Lam Research Ag Method and apparatus for liquid treatment of wafer shaped articles
JP5854496B2 (ja) * 2011-06-06 2016-02-09 株式会社ｋ＆ｋサービス 逃し部材、および、ノズル
US9355883B2 (en) 2011-09-09 2016-05-31 Lam Research Ag Method and apparatus for liquid treatment of wafer shaped articles
EP2626140A1 (de) * 2012-02-07 2013-08-14 Süss Microtec Lithography GmbH Verfahren zur tropffreien Abgabe einer Flüssigkeit und Düse dafür
KR101298087B1 (ko) * 2012-02-15 2013-08-20 주식회사 신성에프에이 에어로졸 젯 프린터의 마스킹 장치
TWI437936B (zh) * 2012-05-23 2014-05-11 Unimicron Technology Corp 濕式蝕刻設備及其供應裝置
US9316443B2 (en) 2012-08-23 2016-04-19 Lam Research Ag Method and apparatus for liquid treatment of wafer shaped articles
US10182696B2 (en) 2012-09-27 2019-01-22 Dehn's Innovations, Llc Steam nozzle system and method
US9147593B2 (en) 2012-10-10 2015-09-29 Lam Research Ag Apparatus for liquid treatment of wafer shaped articles
US9093482B2 (en) 2012-10-12 2015-07-28 Lam Research Ag Method and apparatus for liquid treatment of wafer shaped articles
US9748120B2 (en) 2013-07-01 2017-08-29 Lam Research Ag Apparatus for liquid treatment of disc-shaped articles and heating system for use in such apparatus
US10562078B2 (en) 2013-07-01 2020-02-18 Ecp Incorporated Vacuum spray apparatus and uses thereof
TWI617360B (zh) * 2013-10-31 2018-03-11 德恩的創新公司 真空噴灑裝置及其用途
JP6321353B2 (ja) * 2013-11-19 2018-05-09 株式会社荏原製作所 基板洗浄装置および基板処理装置
SG10201407598VA (en) 2013-11-19 2015-06-29 Ebara Corp Substrate cleaning apparatus and substrate processing apparatus
JP6305040B2 (ja) * 2013-12-04 2018-04-04 株式会社ディスコ 洗浄装置
JP6445772B2 (ja) * 2014-03-17 2018-12-26 キヤノン株式会社 インプリント装置及び物品の製造方法
US9500405B2 (en) * 2014-10-28 2016-11-22 Lam Research Ag Convective wafer heating by impingement with hot gas
US9972514B2 (en) 2016-03-07 2018-05-15 Lam Research Ag Apparatus for liquid treatment of wafer shaped articles
US9887122B2 (en) 2016-05-06 2018-02-06 Lam Research Ag Method and apparatus for processing wafer-shaped articles
CN106863799B (zh) * 2017-02-28 2019-08-16 绍兴市华获智能装备有限公司 一种3d打印机耗材喷头
US11931760B2 (en) 2018-08-14 2024-03-19 Ecp Incorporated Spray head structure
CN115700899A (zh) * 2021-07-16 2023-02-07 江苏鲁汶仪器股份有限公司 一种用于晶圆扫描的喷嘴及扫描系统、扫描方法
CN114823431B (zh) * 2022-06-28 2022-10-18 江苏芯梦半导体设备有限公司 一种用于清洗晶圆的喷射装置

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3626722A (en) * 1969-07-22 1971-12-14 Donald J Corsentino Method and apparatus for producing a finely divided protected spray of liquid
CH640571A5 (fr) * 1981-03-06 1984-01-13 Battelle Memorial Institute Procede et dispositif pour deposer sur un substrat une couche de matiere minerale.
AT389959B (de) 1987-11-09 1990-02-26 Sez Semiconduct Equip Zubehoer Vorrichtung zum aetzen von scheibenfoermigen gegenstaenden, insbesondere von siliziumscheiben
US5165605A (en) * 1989-03-30 1992-11-24 Iwata Air Compressor Mfg. Co., Ltd. Low pressure air atomizing spray gun
US5800867A (en) * 1992-08-13 1998-09-01 Nordson Corporation Deflection control of liquid or powder stream during dispensing
JPH11274116A (ja) * 1998-03-18 1999-10-08 Ebara Corp ガスポリッシング方法、ガスポリッシング用ノズル及びポリッシング装置
US6447632B1 (en) * 1998-03-18 2002-09-10 Ebara Corporation Apparatus and nozzle device for gaseous polishing
JPH11269670A (ja) * 1998-03-18 1999-10-05 Ebara Corp ノズル装置及び基板の研磨装置
EP1038593B1 (de) 1999-04-06 2000-10-04 SEZ Semiconductor-Equipment Zubehör für die Halbleiterfertigung AG Einrichtung zum Austrag von zwei oder mehreren Medien mit Mediendüsen
US6290863B1 (en) * 1999-07-31 2001-09-18 Micron Technology, Inc. Method and apparatus for etch of a specific subarea of a semiconductor work object
DE60040386D1 (de) * 2000-06-19 2008-11-13 Imec Inter Uni Micro Electr Verfahren und Vorrichtung zur lokalen Flüssigkeitsbehandlung von einer Substratoberfläche
JP2003100717A (ja) 2001-09-21 2003-04-04 Tokyo Electron Ltd プラズマ処理装置
DE10322343A1 (de) 2002-07-23 2004-02-05 Wella Aktiengesellschaft Vorrichtung für eine Farbbehandlung von Kopfhaar mittels eines Farbsprühstrahls aus einer Düse
US7198055B2 (en) * 2002-09-30 2007-04-03 Lam Research Corporation Meniscus, vacuum, IPA vapor, drying manifold

Also Published As

Publication number Publication date
KR20070032355A (ko) 2007-03-21
EP1771875A1 (de) 2007-04-11
TW200603895A (en) 2006-02-01
EP1771875B1 (de) 2010-01-27
KR101244903B1 (ko) 2013-03-18
ATE456859T1 (de) 2010-02-15
US20080048056A1 (en) 2008-02-28
WO2006008236A1 (en) 2006-01-26
TWI267405B (en) 2006-12-01
US7891314B2 (en) 2011-02-22

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Legal Events

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