DE602005018794D1 - Vorrichtung zur gewinnung des abbildes und/oder der spektren eines elektronenenergieverlustes - Google Patents

Vorrichtung zur gewinnung des abbildes und/oder der spektren eines elektronenenergieverlustes

Info

Publication number
DE602005018794D1
DE602005018794D1 DE602005018794T DE602005018794T DE602005018794D1 DE 602005018794 D1 DE602005018794 D1 DE 602005018794D1 DE 602005018794 T DE602005018794 T DE 602005018794T DE 602005018794 T DE602005018794 T DE 602005018794T DE 602005018794 D1 DE602005018794 D1 DE 602005018794D1
Authority
DE
Germany
Prior art keywords
image
obtaining
spectros
photosensitive part
power loss
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602005018794T
Other languages
English (en)
Inventor
Henri Pinna
Marcel Tence
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Universite Paris Sud Paris 11
Original Assignee
Centre National de la Recherche Scientifique CNRS
Universite Paris Sud Paris 11
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National de la Recherche Scientifique CNRS, Universite Paris Sud Paris 11 filed Critical Centre National de la Recherche Scientifique CNRS
Publication of DE602005018794D1 publication Critical patent/DE602005018794D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/25—Tubes for localised analysis using electron or ion beams
    • H01J2237/2505—Tubes for localised analysis using electron or ion beams characterised by their application
    • H01J2237/2516—Secondary particles mass or energy spectrometry
    • H01J2237/2522—Secondary particles mass or energy spectrometry of electrons (ESCA, XPS)

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)
  • Apparatus For Radiation Diagnosis (AREA)
  • Electric Double-Layer Capacitors Or The Like (AREA)
  • Prostheses (AREA)
  • Vehicle Body Suspensions (AREA)
DE602005018794T 2004-08-04 2005-08-01 Vorrichtung zur gewinnung des abbildes und/oder der spektren eines elektronenenergieverlustes Active DE602005018794D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0408633A FR2874124B1 (fr) 2004-08-04 2004-08-04 Dispositif pour l'acquisition d'images et/ou de spectres de pertes d'energie
PCT/EP2005/053745 WO2006013199A1 (fr) 2004-08-04 2005-08-01 Dispositif pour l’acquisition d'images et/ou de spectres de pertes d’energie d’electrons

Publications (1)

Publication Number Publication Date
DE602005018794D1 true DE602005018794D1 (de) 2010-02-25

Family

ID=34947514

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602005018794T Active DE602005018794D1 (de) 2004-08-04 2005-08-01 Vorrichtung zur gewinnung des abbildes und/oder der spektren eines elektronenenergieverlustes

Country Status (7)

Country Link
US (1) US7642513B2 (de)
EP (1) EP1787309B1 (de)
JP (1) JP4829887B2 (de)
AT (1) ATE454707T1 (de)
DE (1) DE602005018794D1 (de)
FR (1) FR2874124B1 (de)
WO (1) WO2006013199A1 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8080791B2 (en) * 2008-12-12 2011-12-20 Fei Company X-ray detector for electron microscope
WO2011071579A2 (en) * 2009-09-18 2011-06-16 California Institute Of Technology Photon induced near field electron microscope and biological imaging system
JP5517584B2 (ja) * 2009-12-08 2014-06-11 株式会社日立ハイテクノロジーズ 電子顕微鏡
EP2383769A1 (de) 2010-04-28 2011-11-02 Fei Company Verfahren zur Verwendung eines Direktelektrondetektors für ein TEM
US9343275B1 (en) * 2012-06-06 2016-05-17 Western Digital (Fremont), Llc Methods for characterizing carbon overcoat
EP2993682A1 (de) 2014-09-04 2016-03-09 Fei Company Verfahren zur Spektroskopiedurchführung in einem Transmissions-Ladungsträger-Mikroskop
EP2998979A1 (de) 2014-09-22 2016-03-23 Fei Company Verbesserte Spektroskopie in einem Transmissionsmikroskop mit geladenen Partikeln
EP3070732A1 (de) 2015-03-18 2016-09-21 Fei Company Vorrichtung und verfahren zur spektroskopiedurchführung in einem transmissionmikroskop mit geladenen teilchen
JP2017143060A (ja) * 2016-01-20 2017-08-17 ガタン インコーポレイテッドＧａｔａｎ，Ｉｎｃ． 直接検出センサを用いる電子エネルギー損失分光器
CN111095473B (zh) * 2017-08-04 2022-11-18 加坦公司 用于高速光谱采集的方法
EP3564982A1 (de) * 2018-05-02 2019-11-06 FEI Company Technik zur eels-detektion in einem elektronenmikroskop
KR20220118393A (ko) * 2019-07-10 2022-08-25 인터그레이티드 다이나믹 일렉트론 솔루션즈, 인크. 높은 프레임 레이트 및 높은 동적 범위 전자 현미경

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4831255A (en) * 1988-02-24 1989-05-16 Gatan, Inc. Variable-attenuation parallel detector
JP2759680B2 (ja) * 1989-07-19 1998-05-28 株式会社日立製作所 分析システム
JP3439614B2 (ja) * 1997-03-03 2003-08-25 株式会社日立製作所 透過型電子顕微鏡及び元素分布観察方法
JPH1167138A (ja) * 1997-08-25 1999-03-09 Hitachi Ltd 微小領域観察装置
JP3534582B2 (ja) * 1997-10-02 2004-06-07 株式会社日立製作所 パターン欠陥検査方法および検査装置
JP3269524B2 (ja) * 1998-10-05 2002-03-25 日本電気株式会社 電子エネルギー損失分光分析装置およびそのスペクトルシフト補正方法
JP4045058B2 (ja) * 1999-11-22 2008-02-13 株式会社日立製作所 多重荷電粒子検出器、及びそれを用いた走査透過電子顕微鏡
DE10156275B4 (de) * 2001-11-16 2006-08-03 Leo Elektronenmikroskopie Gmbh Detektoranordnung und Detektionsverfahren
JP3789104B2 (ja) * 2002-05-13 2006-06-21 株式会社日立ハイテクノロジーズ 元素分布観察方法及び装置
JP2004214057A (ja) * 2003-01-06 2004-07-29 Hitachi High-Technologies Corp 電子線分光器、それを備えた電子顕微鏡及び分析方法

Also Published As

Publication number Publication date
EP1787309A1 (de) 2007-05-23
WO2006013199A1 (fr) 2006-02-09
US20080210863A1 (en) 2008-09-04
FR2874124B1 (fr) 2006-10-13
US7642513B2 (en) 2010-01-05
EP1787309B1 (de) 2010-01-06
JP4829887B2 (ja) 2011-12-07
FR2874124A1 (fr) 2006-02-10
ATE454707T1 (de) 2010-01-15
JP2008509510A (ja) 2008-03-27

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