DE602004029838D1 - Dünnschicht-Resonator von Luftspaltbauart, Duplexer mit dem Resonator und deren Herstellungsverfahren - Google Patents
Dünnschicht-Resonator von Luftspaltbauart, Duplexer mit dem Resonator und deren HerstellungsverfahrenInfo
- Publication number
- DE602004029838D1 DE602004029838D1 DE602004029838T DE602004029838T DE602004029838D1 DE 602004029838 D1 DE602004029838 D1 DE 602004029838D1 DE 602004029838 T DE602004029838 T DE 602004029838T DE 602004029838 T DE602004029838 T DE 602004029838T DE 602004029838 D1 DE602004029838 D1 DE 602004029838D1
- Authority
- DE
- Germany
- Prior art keywords
- resonator
- duplexer
- air
- manufacturing process
- type thin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000010409 thin film Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/205—Constructional features of resonators consisting of piezoelectric or electrostrictive material having multiple resonators
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02086—Means for compensation or elimination of undesirable effects
- H03H9/02094—Means for compensation or elimination of undesirable effects of adherence
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
- H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
- H03H9/173—Air-gaps
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR20030024720 | 2003-04-18 | ||
KR10-2003-0049918A KR100498041B1 (ko) | 2003-04-18 | 2003-07-21 | 기판 접합을 이용하여 제조된 단일칩 듀플렉서 및 그 제조방법 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE602004029838D1 true DE602004029838D1 (de) | 2010-12-16 |
Family
ID=37371841
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE602004029838T Expired - Lifetime DE602004029838D1 (de) | 2003-04-18 | 2004-04-14 | Dünnschicht-Resonator von Luftspaltbauart, Duplexer mit dem Resonator und deren Herstellungsverfahren |
Country Status (2)
Country | Link |
---|---|
KR (1) | KR100498041B1 (de) |
DE (1) | DE602004029838D1 (de) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100666693B1 (ko) | 2004-11-23 | 2007-01-11 | 삼성전자주식회사 | 모놀리식 듀플렉서 |
KR100822469B1 (ko) * | 2005-12-07 | 2008-04-16 | 삼성전자주식회사 | 복수개의 소자를 상호 격리시키기 위한 에어캐비티를구비한 시스템 온 칩 구조물, 듀플렉서, 및 그 제조 방법 |
JP6414559B2 (ja) * | 2016-02-22 | 2018-10-31 | 株式会社村田製作所 | スイッチ付ダイプレクサモジュールおよびダイプレクサモジュール |
CN107231138A (zh) * | 2016-12-29 | 2017-10-03 | 杭州左蓝微电子技术有限公司 | 带有支撑结构的薄膜体声波谐振器及其制备方法 |
CN107222181A (zh) * | 2016-12-29 | 2017-09-29 | 杭州左蓝微电子技术有限公司 | 基于soi基片的薄膜体声波谐振器及其制备方法 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3567827B2 (ja) * | 1999-11-02 | 2004-09-22 | 株式会社村田製作所 | 誘電体フィルタ、複合誘電体フィルタ、誘電体デュプレクサ、誘電体ダイプレクサおよび通信装置 |
KR100384399B1 (ko) * | 2000-11-28 | 2003-05-22 | 주식회사 케이이씨 | 듀플렉서의 주파수 격리회로 |
KR100382765B1 (ko) * | 2001-06-15 | 2003-05-09 | 삼성전자주식회사 | 송수신용 수동소자와 그 집적모듈 및 그 제조방법 |
-
2003
- 2003-07-21 KR KR10-2003-0049918A patent/KR100498041B1/ko active IP Right Grant
-
2004
- 2004-04-14 DE DE602004029838T patent/DE602004029838D1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
KR20040090891A (ko) | 2004-10-27 |
KR100498041B1 (ko) | 2005-07-01 |
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