DE602004029416D1 - Druckregelungssystem für Prozesskammer auf der Basis der Pumpengeschwindigkeit, der Ventilöffnung und Neutralgasinjektion - Google Patents

Druckregelungssystem für Prozesskammer auf der Basis der Pumpengeschwindigkeit, der Ventilöffnung und Neutralgasinjektion

Info

Publication number
DE602004029416D1
DE602004029416D1 DE602004029416T DE602004029416T DE602004029416D1 DE 602004029416 D1 DE602004029416 D1 DE 602004029416D1 DE 602004029416 T DE602004029416 T DE 602004029416T DE 602004029416 T DE602004029416 T DE 602004029416T DE 602004029416 D1 DE602004029416 D1 DE 602004029416D1
Authority
DE
Germany
Prior art keywords
controlled
inert gas
control unit
control system
pressure control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE602004029416T
Other languages
English (en)
Inventor
Roland Bernard
Jean-Pierre Desbiolles
Sebastien Munari
Claude Rousseau
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel Lucent SAS
Original Assignee
Alcatel Lucent SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel Lucent SAS filed Critical Alcatel Lucent SAS
Publication of DE602004029416D1 publication Critical patent/DE602004029416D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B41/00—Pumping installations or systems specially adapted for elastic fluids
    • F04B41/06—Combinations of two or more pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/08—Regulating by delivery pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D16/00—Control of fluid pressure
    • G05D16/20—Control of fluid pressure characterised by the use of electric means
    • G05D16/2006—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means
    • G05D16/208—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using a combination of controlling means as defined in G05D16/2013 and G05D16/2066

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Flow Control (AREA)
  • Control Of Fluid Pressure (AREA)
  • Drying Of Semiconductors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Air Transport Of Granular Materials (AREA)
  • Fluid-Damping Devices (AREA)
DE602004029416T 2003-05-09 2004-05-04 Druckregelungssystem für Prozesskammer auf der Basis der Pumpengeschwindigkeit, der Ventilöffnung und Neutralgasinjektion Expired - Lifetime DE602004029416D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0305615A FR2854667B1 (fr) 2003-05-09 2003-05-09 Controle de pression dans la chambre de procedes par variation de vitesse de pompes, vanne de regulation et injection de gaz neutre

Publications (1)

Publication Number Publication Date
DE602004029416D1 true DE602004029416D1 (de) 2010-11-18

Family

ID=32982389

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602004029416T Expired - Lifetime DE602004029416D1 (de) 2003-05-09 2004-05-04 Druckregelungssystem für Prozesskammer auf der Basis der Pumpengeschwindigkeit, der Ventilöffnung und Neutralgasinjektion

Country Status (6)

Country Link
US (1) US20050025634A1 (de)
EP (1) EP1475535B1 (de)
JP (1) JP4516352B2 (de)
AT (1) ATE483911T1 (de)
DE (1) DE602004029416D1 (de)
FR (1) FR2854667B1 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8172546B2 (en) * 1998-11-23 2012-05-08 Entegris, Inc. System and method for correcting for pressure variations using a motor
WO2006057957A2 (en) * 2004-11-23 2006-06-01 Entegris, Inc. System and method for a variable home position dispense system
FR2878913B1 (fr) * 2004-12-03 2007-01-19 Cit Alcatel Controle des pressions partielles de gaz pour optimisation de procede
WO2007010851A1 (ja) * 2005-07-21 2007-01-25 Nabtesco Corporation 真空システム及びその運転方法
CN101583796B (zh) 2005-11-21 2012-07-04 恩特格里公司 多级泵及形成多级泵的方法
US8753097B2 (en) * 2005-11-21 2014-06-17 Entegris, Inc. Method and system for high viscosity pump
US8083498B2 (en) * 2005-12-02 2011-12-27 Entegris, Inc. System and method for position control of a mechanical piston in a pump
CN101356372B (zh) 2005-12-02 2012-07-04 恩特格里公司 用于在泵中进行压力补偿的系统和方法
US7878765B2 (en) * 2005-12-02 2011-02-01 Entegris, Inc. System and method for monitoring operation of a pump
TWI402423B (zh) * 2006-02-28 2013-07-21 Entegris Inc 用於一幫浦操作之系統及方法
US7369920B2 (en) * 2006-03-21 2008-05-06 Mks Instruments, Inc. Pressure control system with optimized performance
KR100876836B1 (ko) * 2007-06-29 2009-01-07 주식회사 하이닉스반도체 반도체 소자의 제조 방법
FR2921444A1 (fr) 2007-09-26 2009-03-27 Alcatel Lucent Sas Pompe a vide a deux rotors helicoidaux.

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD262065A1 (de) * 1987-07-07 1988-11-16 Univ Dresden Tech Vorrichtung zur druckregelung im feinvakuumbereich
FR2652390B1 (fr) * 1989-09-27 1991-11-29 Cit Alcatel Groupe de pompage a vide.
JPH0758032A (ja) * 1993-08-09 1995-03-03 Hitachi Electron Eng Co Ltd 圧力制御装置および圧力制御方法
US5944049A (en) * 1997-07-15 1999-08-31 Applied Materials, Inc. Apparatus and method for regulating a pressure in a chamber
JP3929185B2 (ja) * 1998-05-20 2007-06-13 株式会社荏原製作所 真空排気装置及び方法
JP2002541541A (ja) * 1999-04-07 2002-12-03 アルカテル 真空チャンバ内の圧力を調整するためのシステム、このシステムを装備した真空ポンピングユニット
KR100733237B1 (ko) * 1999-10-13 2007-06-27 동경 엘렉트론 주식회사 처리 장치
DE10043783A1 (de) * 2000-09-06 2002-03-14 Leybold Vakuum Gmbh Verfahren und Vorrichtung zur Regelung des Vakuums in einer Kammer
JP4335469B2 (ja) * 2001-03-22 2009-09-30 株式会社荏原製作所 真空排気装置のガス循環量調整方法及び装置
US6733621B2 (en) * 2002-05-08 2004-05-11 Taiwan Semiconductor Manufacturing Co., Ltd. Venting apparatus and method for vacuum system

Also Published As

Publication number Publication date
FR2854667A1 (fr) 2004-11-12
ATE483911T1 (de) 2010-10-15
US20050025634A1 (en) 2005-02-03
JP4516352B2 (ja) 2010-08-04
FR2854667B1 (fr) 2006-07-28
JP2004332741A (ja) 2004-11-25
EP1475535B1 (de) 2010-10-06
EP1475535A1 (de) 2004-11-10

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