ATE483911T1 - Druckregelungssystem für prozesskammer auf der basis der pumpengeschwindigkeit, der ventilöffnung und neutralgasinjektion - Google Patents

Druckregelungssystem für prozesskammer auf der basis der pumpengeschwindigkeit, der ventilöffnung und neutralgasinjektion

Info

Publication number
ATE483911T1
ATE483911T1 AT04291149T AT04291149T ATE483911T1 AT E483911 T1 ATE483911 T1 AT E483911T1 AT 04291149 T AT04291149 T AT 04291149T AT 04291149 T AT04291149 T AT 04291149T AT E483911 T1 ATE483911 T1 AT E483911T1
Authority
AT
Austria
Prior art keywords
controlled
inert gas
control unit
control system
pressure control
Prior art date
Application number
AT04291149T
Other languages
English (en)
Inventor
Roland Bernard
Jean-Pierre Desbiolles
Sebastien Munari
Claude Rousseau
Original Assignee
Alcatel Lucent
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel Lucent filed Critical Alcatel Lucent
Application granted granted Critical
Publication of ATE483911T1 publication Critical patent/ATE483911T1/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B41/00—Pumping installations or systems specially adapted for elastic fluids
    • F04B41/06—Combinations of two or more pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/08—Regulating by delivery pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D16/00—Control of fluid pressure
    • G05D16/20—Control of fluid pressure characterised by the use of electric means
    • G05D16/2006—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means
    • G05D16/208—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using a combination of controlling means as defined in G05D16/2013 and G05D16/2066

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Flow Control (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Drying Of Semiconductors (AREA)
  • Control Of Fluid Pressure (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Fluid-Damping Devices (AREA)
  • Air Transport Of Granular Materials (AREA)
AT04291149T 2003-05-09 2004-05-04 Druckregelungssystem für prozesskammer auf der basis der pumpengeschwindigkeit, der ventilöffnung und neutralgasinjektion ATE483911T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0305615A FR2854667B1 (fr) 2003-05-09 2003-05-09 Controle de pression dans la chambre de procedes par variation de vitesse de pompes, vanne de regulation et injection de gaz neutre

Publications (1)

Publication Number Publication Date
ATE483911T1 true ATE483911T1 (de) 2010-10-15

Family

ID=32982389

Family Applications (1)

Application Number Title Priority Date Filing Date
AT04291149T ATE483911T1 (de) 2003-05-09 2004-05-04 Druckregelungssystem für prozesskammer auf der basis der pumpengeschwindigkeit, der ventilöffnung und neutralgasinjektion

Country Status (6)

Country Link
US (1) US20050025634A1 (de)
EP (1) EP1475535B1 (de)
JP (1) JP4516352B2 (de)
AT (1) ATE483911T1 (de)
DE (1) DE602004029416D1 (de)
FR (1) FR2854667B1 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8172546B2 (en) * 1998-11-23 2012-05-08 Entegris, Inc. System and method for correcting for pressure variations using a motor
US8292598B2 (en) * 2004-11-23 2012-10-23 Entegris, Inc. System and method for a variable home position dispense system
FR2878913B1 (fr) * 2004-12-03 2007-01-19 Cit Alcatel Controle des pressions partielles de gaz pour optimisation de procede
US20090112370A1 (en) * 2005-07-21 2009-04-30 Asm Japan K.K. Vacuum system and method for operating the same
US8753097B2 (en) * 2005-11-21 2014-06-17 Entegris, Inc. Method and system for high viscosity pump
WO2007061956A2 (en) 2005-11-21 2007-05-31 Entegris, Inc. System and method for a pump with reduced form factor
WO2007067358A2 (en) 2005-12-02 2007-06-14 Entegris, Inc. System and method for pressure compensation in a pump
US8083498B2 (en) 2005-12-02 2011-12-27 Entegris, Inc. System and method for position control of a mechanical piston in a pump
US7878765B2 (en) * 2005-12-02 2011-02-01 Entegris, Inc. System and method for monitoring operation of a pump
TWI402423B (zh) * 2006-02-28 2013-07-21 Entegris Inc 用於一幫浦操作之系統及方法
US7369920B2 (en) * 2006-03-21 2008-05-06 Mks Instruments, Inc. Pressure control system with optimized performance
KR100876836B1 (ko) * 2007-06-29 2009-01-07 주식회사 하이닉스반도체 반도체 소자의 제조 방법
FR2921444A1 (fr) 2007-09-26 2009-03-27 Alcatel Lucent Sas Pompe a vide a deux rotors helicoidaux.

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD262065A1 (de) * 1987-07-07 1988-11-16 Univ Dresden Tech Vorrichtung zur druckregelung im feinvakuumbereich
FR2652390B1 (fr) * 1989-09-27 1991-11-29 Cit Alcatel Groupe de pompage a vide.
JPH0758032A (ja) * 1993-08-09 1995-03-03 Hitachi Electron Eng Co Ltd 圧力制御装置および圧力制御方法
US5944049A (en) * 1997-07-15 1999-08-31 Applied Materials, Inc. Apparatus and method for regulating a pressure in a chamber
JP3929185B2 (ja) * 1998-05-20 2007-06-13 株式会社荏原製作所 真空排気装置及び方法
JP2002541541A (ja) * 1999-04-07 2002-12-03 アルカテル 真空チャンバ内の圧力を調整するためのシステム、このシステムを装備した真空ポンピングユニット
KR100733237B1 (ko) * 1999-10-13 2007-06-27 동경 엘렉트론 주식회사 처리 장치
DE10043783A1 (de) * 2000-09-06 2002-03-14 Leybold Vakuum Gmbh Verfahren und Vorrichtung zur Regelung des Vakuums in einer Kammer
JP4335469B2 (ja) * 2001-03-22 2009-09-30 株式会社荏原製作所 真空排気装置のガス循環量調整方法及び装置
US6733621B2 (en) * 2002-05-08 2004-05-11 Taiwan Semiconductor Manufacturing Co., Ltd. Venting apparatus and method for vacuum system

Also Published As

Publication number Publication date
FR2854667B1 (fr) 2006-07-28
JP4516352B2 (ja) 2010-08-04
EP1475535A1 (de) 2004-11-10
DE602004029416D1 (de) 2010-11-18
EP1475535B1 (de) 2010-10-06
JP2004332741A (ja) 2004-11-25
FR2854667A1 (fr) 2004-11-12
US20050025634A1 (en) 2005-02-03

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