DE602004021380D1 - Massenspektrometer für den nachweis von positiven und negativen teilchen - Google Patents

Massenspektrometer für den nachweis von positiven und negativen teilchen

Info

Publication number
DE602004021380D1
DE602004021380D1 DE602004021380T DE602004021380T DE602004021380D1 DE 602004021380 D1 DE602004021380 D1 DE 602004021380D1 DE 602004021380 T DE602004021380 T DE 602004021380T DE 602004021380 T DE602004021380 T DE 602004021380T DE 602004021380 D1 DE602004021380 D1 DE 602004021380D1
Authority
DE
Germany
Prior art keywords
positive
detection
mass spectrometer
negative particles
particles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602004021380T
Other languages
English (en)
Inventor
Adi A Scheidemann
Mark Dassel
Mark Wadsworth
Eustathios Vassiliou
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
OI Corp
Original Assignee
OI Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by OI Corp filed Critical OI Corp
Publication of DE602004021380D1 publication Critical patent/DE602004021380D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/26Mass spectrometers or separator tubes
    • H01J49/28Static spectrometers
    • H01J49/30Static spectrometers using magnetic analysers, e.g. Dempster spectrometer
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/0095Particular arrangements for generating, introducing or analyzing both positive and negative analyte ions
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/02Details
    • H01J49/20Magnetic deflection

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
DE602004021380T 2003-07-03 2004-06-30 Massenspektrometer für den nachweis von positiven und negativen teilchen Active DE602004021380D1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US48480103P 2003-07-03 2003-07-03
US10/860,776 US6979818B2 (en) 2003-07-03 2004-06-03 Mass spectrometer for both positive and negative particle detection
PCT/US2004/021113 WO2005008719A2 (en) 2003-07-03 2004-06-30 Mass spectrometer for both positive and negative particle detection

Publications (1)

Publication Number Publication Date
DE602004021380D1 true DE602004021380D1 (de) 2009-07-16

Family

ID=34083322

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602004021380T Active DE602004021380D1 (de) 2003-07-03 2004-06-30 Massenspektrometer für den nachweis von positiven und negativen teilchen

Country Status (5)

Country Link
US (1) US6979818B2 (de)
EP (1) EP1642315B1 (de)
JP (1) JP2007521616A (de)
DE (1) DE602004021380D1 (de)
WO (1) WO2005008719A2 (de)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2329180A1 (en) * 1998-10-06 2000-04-13 University Of Washington Charged particle beam detection system
JP4931793B2 (ja) * 2004-03-05 2012-05-16 オイ コーポレイション 質量分析計の焦点面検出器アセンブリ
GB2435712B (en) * 2006-03-02 2008-05-28 Microsaic Ltd Personalised mass spectrometer
JP4822055B2 (ja) * 2006-03-30 2011-11-24 株式会社Ihi イオン注入装置用の質量分析器
GB0612503D0 (en) * 2006-06-23 2006-08-02 Micromass Ltd Mass spectrometer
GB2451239B (en) * 2007-07-23 2009-07-08 Microsaic Systems Ltd Microengineered electrode assembly
US7855361B2 (en) * 2008-05-30 2010-12-21 Varian, Inc. Detection of positive and negative ions
FR2942072B1 (fr) * 2009-02-06 2011-11-25 Cameca Spectrometre de masse magnetique achromatique a double focalisation.
US8134290B2 (en) * 2009-04-30 2012-03-13 Scientific Instrument Services, Inc. Emission filaments made from a rhenium alloy and method of manufacturing thereof
US9330892B2 (en) 2009-12-31 2016-05-03 Spectro Analytical Instruments Gmbh Simultaneous inorganic mass spectrometer and method of inorganic mass spectrometry
DE102010056152A1 (de) * 2009-12-31 2011-07-07 Spectro Analytical Instruments GmbH, 47533 Simultanes anorganisches Massenspektrometer und Verfahren zur anorganischen Massenspektrometrie
DE112011100568B4 (de) * 2010-02-17 2017-01-19 Ulvac, Inc. Vierpol-Massenspektrometer
CN103608894B (zh) 2011-02-14 2016-08-10 麻省理工学院 用于质谱分析的方法、装置及系统
EP2654069B1 (de) * 2012-04-16 2016-02-24 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Mehrkanaldetektor, Optik dafür und Betriebsverfahren dafür
EP2654068B1 (de) * 2012-04-16 2017-05-17 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Umschaltbarer Mehrperspektivendetektor, Optik dafür und Betriebsverfahren dafür
LU92130B1 (en) * 2013-01-11 2014-07-14 Ct De Rech Public Gabriel Lippmann Mass spectrometer with optimized magnetic shunt
WO2015101820A1 (en) * 2013-12-31 2015-07-09 Dh Technologies Development Pte. Ltd. Time-of-flight analysis of a continuous beam of ions by a detector array
US10147593B2 (en) * 2014-11-19 2018-12-04 Dh Technologies Development Pte. Ltd. Ion sorter
LU92970B1 (en) 2016-02-08 2017-09-19 Luxembourg Inst Science & Tech List Floating magnet for a mass spectrometer
US10367754B2 (en) * 2016-07-01 2019-07-30 Intel Corporation Sharing duty cycle between devices
CN115280132B (zh) * 2020-01-15 2023-06-06 上海宸安生物科技有限公司 粒子质谱

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB650861A (en) 1948-10-01 1951-03-07 Jack Blears Improvements relating to magnet systems for mass spectrometers
US3898456A (en) 1974-07-25 1975-08-05 Us Energy Electron multiplier-ion detector system
JPH0812773B2 (ja) * 1989-04-11 1996-02-07 日本電子株式会社 同時検出型質量分析装置
JPH03122958A (ja) * 1989-10-06 1991-05-24 Hitachi Ltd 質量分析装置
US4988867A (en) 1989-11-06 1991-01-29 Galileo Electro-Optics Corp. Simultaneous positive and negative ion detector
JPH0432145A (ja) * 1990-05-24 1992-02-04 Jeol Ltd 質量分析計
JPH0479144A (ja) * 1990-07-23 1992-03-12 Jeol Ltd 質量分析装置
US5317151A (en) 1992-10-30 1994-05-31 Sinha Mahadeva P Miniaturized lightweight magnetic sector for a field-portable mass spectrometer
US5801380A (en) 1996-02-09 1998-09-01 California Institute Of Technology Array detectors for simultaneous measurement of ions in mass spectrometry
WO1997039474A1 (en) * 1996-04-12 1997-10-23 The Perkin-Elmer Corporation Ion detector, detector array and instrument using same
US6191419B1 (en) 1997-08-06 2001-02-20 California Institute Of Technology Machined electrostatic sector for mass spectrometer
AU1067799A (en) 1997-10-07 1999-04-27 Sti Optronics Inc. Magnetic separator for linear dispersion and method for producing the same
US6403956B1 (en) 1998-05-01 2002-06-11 California Institute Of Technology Temperature compensation for miniaturized magnetic sector
JP2000231901A (ja) * 1999-02-12 2000-08-22 Japan Atom Energy Res Inst 画像解析法による質量分析計又はそれを使用した質量分析方法
US6576899B2 (en) 2001-01-16 2003-06-10 California Institute Of Technology Direct detection of low-energy charged particles using metal oxide semiconductor circuitry

Also Published As

Publication number Publication date
EP1642315B1 (de) 2009-06-03
WO2005008719A3 (en) 2005-10-20
US20050017166A1 (en) 2005-01-27
WO2005008719A2 (en) 2005-01-27
JP2007521616A (ja) 2007-08-02
US6979818B2 (en) 2005-12-27
EP1642315A2 (de) 2006-04-05

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