DE602004016217D1 - Siebmedien aus planaren arrays von nuten im nanomassstab, verfahren zur herstellung davon sowie verfahren zur verwendung davon - Google Patents

Siebmedien aus planaren arrays von nuten im nanomassstab, verfahren zur herstellung davon sowie verfahren zur verwendung davon

Info

Publication number
DE602004016217D1
DE602004016217D1 DE200460016217 DE602004016217T DE602004016217D1 DE 602004016217 D1 DE602004016217 D1 DE 602004016217D1 DE 200460016217 DE200460016217 DE 200460016217 DE 602004016217 T DE602004016217 T DE 602004016217T DE 602004016217 D1 DE602004016217 D1 DE 602004016217D1
Authority
DE
Germany
Prior art keywords
channels
substrate
particles
fluid
nanomassstab
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE200460016217
Other languages
English (en)
Inventor
Scott Sibbett
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Intel Corp
Original Assignee
Intel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Intel Corp filed Critical Intel Corp
Publication of DE602004016217D1 publication Critical patent/DE602004016217D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/0005—Field flow fractionation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
    • B01D67/0039—Inorganic membrane manufacture
    • B01D67/0053—Inorganic membrane manufacture by inducing porosity into non porous precursor membranes
    • B01D67/006—Inorganic membrane manufacture by inducing porosity into non porous precursor membranes by elimination of segments of the precursor, e.g. nucleation-track membranes, lithography or laser methods
    • B01D67/0062—Inorganic membrane manufacture by inducing porosity into non porous precursor membranes by elimination of segments of the precursor, e.g. nucleation-track membranes, lithography or laser methods by micromachining techniques, e.g. using masking and etching steps, photolithography
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/416—Systems
    • G01N27/447—Systems using electrophoresis
    • G01N27/44756—Apparatus specially adapted therefor
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/70—Nanostructure
    • Y10S977/701—Integrated with dissimilar structures on a common substrate
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/70—Nanostructure
    • Y10S977/701—Integrated with dissimilar structures on a common substrate
    • Y10S977/72—On an electrically conducting, semi-conducting, or semi-insulating substrate
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/70—Nanostructure
    • Y10S977/701—Integrated with dissimilar structures on a common substrate
    • Y10S977/723—On an electrically insulating substrate
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/87249—Multiple inlet with multiple outlet

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Molecular Biology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Inorganic Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Electrochemistry (AREA)
  • Micromachines (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Apparatus Associated With Microorganisms And Enzymes (AREA)
  • Prostheses (AREA)
  • Polymerisation Methods In General (AREA)
  • Slide Fasteners, Snap Fasteners, And Hook Fasteners (AREA)
  • Electrostatic Separation (AREA)
  • Separation Of Solids By Using Liquids Or Pneumatic Power (AREA)
DE200460016217 2003-12-17 2004-11-24 Siebmedien aus planaren arrays von nuten im nanomassstab, verfahren zur herstellung davon sowie verfahren zur verwendung davon Active DE602004016217D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/738,465 US20050133437A1 (en) 2003-12-17 2003-12-17 Sieving media from planar arrays of nanoscale grooves, method of making and method of using the same
PCT/US2004/039642 WO2005062037A2 (en) 2003-12-17 2004-11-24 Sieving media from planar arrays of nanoscale grooves, method of making the same, and method of using the same

Publications (1)

Publication Number Publication Date
DE602004016217D1 true DE602004016217D1 (de) 2008-10-09

Family

ID=34677392

Family Applications (1)

Application Number Title Priority Date Filing Date
DE200460016217 Active DE602004016217D1 (de) 2003-12-17 2004-11-24 Siebmedien aus planaren arrays von nuten im nanomassstab, verfahren zur herstellung davon sowie verfahren zur verwendung davon

Country Status (6)

Country Link
US (3) US20050133437A1 (de)
EP (1) EP1700112B1 (de)
CN (1) CN1890560B (de)
AT (1) ATE406574T1 (de)
DE (1) DE602004016217D1 (de)
WO (1) WO2005062037A2 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050133437A1 (en) 2003-12-17 2005-06-23 Intel Corporation Sieving media from planar arrays of nanoscale grooves, method of making and method of using the same
NL1030081C2 (nl) * 2005-09-30 2007-04-02 Stork Veco Bv Zeefmateriaal uit metaal en werkwijze voor de vervaardiging daarvan.
CN102890102A (zh) * 2012-10-30 2013-01-23 宁波科瑞思医疗器械有限公司 一种AlGaN/GaN离子PH检测传感器及其应用
CN103424429B (zh) * 2013-06-25 2016-04-06 复旦大学 基于纳米管微系统的分子筛选方法及纳米管微系统芯片
CN106663599A (zh) * 2014-09-22 2017-05-10 英特尔公司 在下层格栅上使用非反射辐射光刻的多通道图案化
CN109609999B (zh) * 2019-02-18 2024-01-26 成都泰美克晶体技术有限公司 一种用于3英寸大片光刻提拉法的烘胶治具
EP3950573A4 (de) 2019-04-03 2022-11-16 BOE Technology Group Co., Ltd. Mikronanokanalstruktur und herstellungsverfahren dafür, sensor und herstellungsverfahren dafür und mikrofluidische vorrichtung
CN110833868B (zh) * 2019-11-22 2022-02-18 深圳市中科先见医疗科技有限公司 一种自驱动式颗粒捕获芯片及其应用
EP4197630A1 (de) * 2021-12-17 2023-06-21 Vito NV Gegenstand zur trennung und/oder umwandlung einer substanz aus einer flüssigkeit und verfahren zu dessen herstellung

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5415835A (en) * 1992-09-16 1995-05-16 University Of New Mexico Method for fine-line interferometric lithography
US6042998A (en) * 1993-09-30 2000-03-28 The University Of New Mexico Method and apparatus for extending spatial frequencies in photolithography images
US5571410A (en) * 1994-10-19 1996-11-05 Hewlett Packard Company Fully integrated miniaturized planar liquid sample handling and analysis device
EP0790849B1 (de) * 1994-10-22 2003-03-26 Central Research Laboratories Limited Verfahren und vorichtung fur diffusionsaustausch zwischen nicht mischbare flüssigkeiten
US6233044B1 (en) * 1997-01-21 2001-05-15 Steven R. J. Brueck Methods and apparatus for integrating optical and interferometric lithography to produce complex patterns
AU765096B2 (en) * 1998-03-23 2003-09-11 Amalgamated ResearchLLC Fractal stack for scaling and distribution of fluids
EP1309404A2 (de) * 2000-08-07 2003-05-14 Nanostream, Inc. Mischvorrichtung in einem mikrofluidischen system
WO2002028509A2 (en) * 2000-10-06 2002-04-11 Protasis Corporation Fluid separation conduit cartridge
US6685841B2 (en) * 2001-02-14 2004-02-03 Gabriel P. Lopez Nanostructured devices for separation and analysis
US6881315B2 (en) 2001-08-03 2005-04-19 Nec Corporation Fractionating apparatus having colonies of pillars arranged in migration passage at interval and process for fabricating pillars
JP2004042012A (ja) * 2001-10-26 2004-02-12 Nec Corp 分離装置、分析システム、分離方法および分離装置の製造方法
EP1319948A3 (de) * 2001-12-12 2004-11-24 Jim Dong Nanogefertigte Chromatographiekolonne
US20050103713A1 (en) * 2003-07-30 2005-05-19 Ramsey J. M. Devices with small-scale channels and the fabrication thereof by etching
US20050133437A1 (en) 2003-12-17 2005-06-23 Intel Corporation Sieving media from planar arrays of nanoscale grooves, method of making and method of using the same

Also Published As

Publication number Publication date
US8088282B2 (en) 2012-01-03
US20110127165A1 (en) 2011-06-02
WO2005062037A2 (en) 2005-07-07
CN1890560A (zh) 2007-01-03
ATE406574T1 (de) 2008-09-15
EP1700112A2 (de) 2006-09-13
EP1700112B1 (de) 2008-08-27
US20050133437A1 (en) 2005-06-23
CN1890560B (zh) 2012-10-17
US7906026B2 (en) 2011-03-15
WO2005062037A3 (en) 2005-10-27
US20090078616A1 (en) 2009-03-26

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