ATE406574T1 - Siebmedien aus planaren arrays von nuten im nanomassstab, verfahren zur herstellung davon sowie verfahren zur verwendung davon - Google Patents

Siebmedien aus planaren arrays von nuten im nanomassstab, verfahren zur herstellung davon sowie verfahren zur verwendung davon

Info

Publication number
ATE406574T1
ATE406574T1 AT04812207T AT04812207T ATE406574T1 AT E406574 T1 ATE406574 T1 AT E406574T1 AT 04812207 T AT04812207 T AT 04812207T AT 04812207 T AT04812207 T AT 04812207T AT E406574 T1 ATE406574 T1 AT E406574T1
Authority
AT
Austria
Prior art keywords
channels
substrate
particles
nanom
producing
Prior art date
Application number
AT04812207T
Other languages
English (en)
Inventor
Scott Sibbett
Original Assignee
Intel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Intel Corp filed Critical Intel Corp
Application granted granted Critical
Publication of ATE406574T1 publication Critical patent/ATE406574T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/0005—Field flow fractionation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
    • B01D67/0039—Inorganic membrane manufacture
    • B01D67/0053—Inorganic membrane manufacture by inducing porosity into non porous precursor membranes
    • B01D67/006—Inorganic membrane manufacture by inducing porosity into non porous precursor membranes by elimination of segments of the precursor, e.g. nucleation-track membranes, lithography or laser methods
    • B01D67/0062—Inorganic membrane manufacture by inducing porosity into non porous precursor membranes by elimination of segments of the precursor, e.g. nucleation-track membranes, lithography or laser methods by micromachining techniques, e.g. using masking and etching steps, photolithography
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/416—Systems
    • G01N27/447—Systems using electrophoresis
    • G01N27/44756—Apparatus specially adapted therefor
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/70—Nanostructure
    • Y10S977/701—Integrated with dissimilar structures on a common substrate
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/70—Nanostructure
    • Y10S977/701—Integrated with dissimilar structures on a common substrate
    • Y10S977/72—On an electrically conducting, semi-conducting, or semi-insulating substrate
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/70—Nanostructure
    • Y10S977/701—Integrated with dissimilar structures on a common substrate
    • Y10S977/723—On an electrically insulating substrate
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/87249—Multiple inlet with multiple outlet

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Molecular Biology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Inorganic Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Electrochemistry (AREA)
  • Micromachines (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Slide Fasteners, Snap Fasteners, And Hook Fasteners (AREA)
  • Prostheses (AREA)
  • Polymerisation Methods In General (AREA)
  • Apparatus Associated With Microorganisms And Enzymes (AREA)
  • Electrostatic Separation (AREA)
  • Separation Of Solids By Using Liquids Or Pneumatic Power (AREA)
AT04812207T 2003-12-17 2004-11-24 Siebmedien aus planaren arrays von nuten im nanomassstab, verfahren zur herstellung davon sowie verfahren zur verwendung davon ATE406574T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/738,465 US20050133437A1 (en) 2003-12-17 2003-12-17 Sieving media from planar arrays of nanoscale grooves, method of making and method of using the same

Publications (1)

Publication Number Publication Date
ATE406574T1 true ATE406574T1 (de) 2008-09-15

Family

ID=34677392

Family Applications (1)

Application Number Title Priority Date Filing Date
AT04812207T ATE406574T1 (de) 2003-12-17 2004-11-24 Siebmedien aus planaren arrays von nuten im nanomassstab, verfahren zur herstellung davon sowie verfahren zur verwendung davon

Country Status (6)

Country Link
US (3) US20050133437A1 (de)
EP (1) EP1700112B1 (de)
CN (1) CN1890560B (de)
AT (1) ATE406574T1 (de)
DE (1) DE602004016217D1 (de)
WO (1) WO2005062037A2 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050133437A1 (en) 2003-12-17 2005-06-23 Intel Corporation Sieving media from planar arrays of nanoscale grooves, method of making and method of using the same
NL1030081C2 (nl) * 2005-09-30 2007-04-02 Stork Veco Bv Zeefmateriaal uit metaal en werkwijze voor de vervaardiging daarvan.
CN102890102A (zh) * 2012-10-30 2013-01-23 宁波科瑞思医疗器械有限公司 一种AlGaN/GaN离子PH检测传感器及其应用
CN103424429B (zh) * 2013-06-25 2016-04-06 复旦大学 基于纳米管微系统的分子筛选方法及纳米管微系统芯片
US10678137B2 (en) * 2014-09-22 2020-06-09 Intel Corporation Multi-pass patterning using nonreflecting radiation lithography on an underlying grating
CN109609999B (zh) * 2019-02-18 2024-01-26 成都泰美克晶体技术有限公司 一种用于3英寸大片光刻提拉法的烘胶治具
WO2020199168A1 (zh) * 2019-04-03 2020-10-08 京东方科技集团股份有限公司 微纳米通道结构、传感器及其制备方法、微流体装置
CN110833868B (zh) * 2019-11-22 2022-02-18 深圳市中科先见医疗科技有限公司 一种自驱动式颗粒捕获芯片及其应用
EP4197630A1 (de) * 2021-12-17 2023-06-21 Vito NV Gegenstand zur trennung und/oder umwandlung einer substanz aus einer flüssigkeit und verfahren zu dessen herstellung

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5415835A (en) * 1992-09-16 1995-05-16 University Of New Mexico Method for fine-line interferometric lithography
US6042998A (en) * 1993-09-30 2000-03-28 The University Of New Mexico Method and apparatus for extending spatial frequencies in photolithography images
US5571410A (en) * 1994-10-19 1996-11-05 Hewlett Packard Company Fully integrated miniaturized planar liquid sample handling and analysis device
DE69530101T2 (de) * 1994-10-22 2004-03-11 Central Research Laboratories Ltd., Hayes Verfahren und vorichtung fur diffusionsaustausch zwischen nicht mischbare flüssigkeiten
US6233044B1 (en) * 1997-01-21 2001-05-15 Steven R. J. Brueck Methods and apparatus for integrating optical and interferometric lithography to produce complex patterns
AU765096B2 (en) * 1998-03-23 2003-09-11 Amalgamated ResearchLLC Fractal stack for scaling and distribution of fluids
EP1309404A2 (de) * 2000-08-07 2003-05-14 Nanostream, Inc. Mischvorrichtung in einem mikrofluidischen system
EP1327141A2 (de) * 2000-10-06 2003-07-16 Protasis Corporation Fluidtrennungsleitungskassette
AU2002251946A1 (en) * 2001-02-14 2002-08-28 Science And Technology Corporation @ Unm Nanostructured devices for separation and analysis
US6881315B2 (en) 2001-08-03 2005-04-19 Nec Corporation Fractionating apparatus having colonies of pillars arranged in migration passage at interval and process for fabricating pillars
JP2004042012A (ja) * 2001-10-26 2004-02-12 Nec Corp 分離装置、分析システム、分離方法および分離装置の製造方法
EP1319948A3 (de) * 2001-12-12 2004-11-24 Jim Dong Nanogefertigte Chromatographiekolonne
US20050103713A1 (en) * 2003-07-30 2005-05-19 Ramsey J. M. Devices with small-scale channels and the fabrication thereof by etching
US20050133437A1 (en) 2003-12-17 2005-06-23 Intel Corporation Sieving media from planar arrays of nanoscale grooves, method of making and method of using the same

Also Published As

Publication number Publication date
CN1890560B (zh) 2012-10-17
US20110127165A1 (en) 2011-06-02
US20050133437A1 (en) 2005-06-23
US8088282B2 (en) 2012-01-03
US20090078616A1 (en) 2009-03-26
WO2005062037A2 (en) 2005-07-07
CN1890560A (zh) 2007-01-03
DE602004016217D1 (de) 2008-10-09
US7906026B2 (en) 2011-03-15
EP1700112A2 (de) 2006-09-13
WO2005062037A3 (en) 2005-10-27
EP1700112B1 (de) 2008-08-27

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