DE602004004909D1 - Sensor zur kapazitiven messung des abstands zu einem objekt - Google Patents

Sensor zur kapazitiven messung des abstands zu einem objekt

Info

Publication number
DE602004004909D1
DE602004004909D1 DE602004004909T DE602004004909T DE602004004909D1 DE 602004004909 D1 DE602004004909 D1 DE 602004004909D1 DE 602004004909 T DE602004004909 T DE 602004004909T DE 602004004909 T DE602004004909 T DE 602004004909T DE 602004004909 D1 DE602004004909 D1 DE 602004004909D1
Authority
DE
Germany
Prior art keywords
sensor
distance
conductive ceramic
electrode
capacitive measurement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602004004909T
Other languages
English (en)
Other versions
DE602004004909T2 (de
Inventor
Howard Elliott
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Future Technology Sensors Ltd
Original Assignee
Future Technology R&D Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Future Technology R&D Ltd filed Critical Future Technology R&D Ltd
Publication of DE602004004909D1 publication Critical patent/DE602004004909D1/de
Application granted granted Critical
Publication of DE602004004909T2 publication Critical patent/DE602004004909T2/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/14—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring distance or clearance between spaced objects or spaced apertures

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Fire-Detection Mechanisms (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Details Of Aerials (AREA)
  • Arrangements For Transmission Of Measured Signals (AREA)
DE602004004909T 2003-09-27 2004-07-12 Sensor zur kapazitiven messung des abstands zu einem objekt Active DE602004004909T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB0322655 2003-09-27
GB0322655A GB2406381B (en) 2003-09-27 2003-09-27 Sensors
PCT/GB2004/003020 WO2005031250A1 (en) 2003-09-27 2004-07-12 Sensor for capacitively measuring the distance to an object

Publications (2)

Publication Number Publication Date
DE602004004909D1 true DE602004004909D1 (de) 2007-04-05
DE602004004909T2 DE602004004909T2 (de) 2007-10-31

Family

ID=29286952

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602004004909T Active DE602004004909T2 (de) 2003-09-27 2004-07-12 Sensor zur kapazitiven messung des abstands zu einem objekt

Country Status (9)

Country Link
US (1) US7414415B2 (de)
EP (1) EP1664669B1 (de)
JP (1) JP4600778B2 (de)
CN (1) CN100374814C (de)
AT (1) ATE354781T1 (de)
DE (1) DE602004004909T2 (de)
ES (1) ES2282878T3 (de)
GB (1) GB2406381B (de)
WO (1) WO2005031250A1 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090015271A1 (en) * 2003-09-27 2009-01-15 Future Technology (Sensors) Limited Sensors
JP4736693B2 (ja) * 2005-10-12 2011-07-27 株式会社Ｉｈｉ 膜厚計測装置及び方法
US7787945B2 (en) 2006-03-08 2010-08-31 Neuropace, Inc. Implantable seizure monitor
GB0621620D0 (en) 2006-10-31 2006-12-06 Rolls Royce Plc A sensor
DE102008006833A1 (de) 2008-01-30 2009-08-06 Mtu Aero Engines Gmbh Sonde für eine kapazitive Sensoreinrichtung und Spaltmesssystem
US8093913B2 (en) 2008-04-24 2012-01-10 Ihi Corporation Film thickness measurement device and method
DE102009060002A1 (de) * 2009-12-21 2011-06-22 Micro-Epsilon Messtechnik GmbH & Co. KG, 94496 Sensor
EP2442077A1 (de) 2010-10-12 2012-04-18 Future Technology (Sensors) Ltd Sensoranordnungen
US9297742B2 (en) * 2011-01-06 2016-03-29 General Electric Company Method for manufacturing a corrosion sensor
CN103673863A (zh) * 2013-12-03 2014-03-26 浙江中欣动力测控技术有限公司 一种电容传感器
CN105982650B (zh) 2015-03-04 2019-02-15 百略医学科技股份有限公司 红外线温度计
GB2544751B (en) * 2015-11-24 2017-11-22 Future Tech (Sensors) Ltd Multi-Layer Electrically Conductive Sensors
US10641595B2 (en) * 2018-04-09 2020-05-05 United Technologies Corporation Low profile triaxial blade tip clearance probe assembly with driven guard

Family Cites Families (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3628136A (en) * 1969-09-05 1971-12-14 Garrett Corp Means for measuring clearances in a gas turbine including a coaxial cable capacitor
US3805150A (en) * 1970-08-17 1974-04-16 Ade Corp Environment immune high precision capacitive gauging system
US3921805A (en) * 1972-10-10 1975-11-25 Newton L Compere Rupturable blister pill package with safety backing
US4128776A (en) * 1976-11-29 1978-12-05 The United States Of America As Represented By The United States Department Of Energy Magnetohydrodynamic electrode
US4294361A (en) * 1979-04-09 1981-10-13 Sterling Drug, Inc. Push and peel blister strip packages
EP0113928B1 (de) * 1983-01-18 1986-04-09 Rheometron Ag Messwertaufnehmer für magnetisch-induktive Durchflussmessgeräte
DE3433351C1 (de) * 1984-09-11 1986-01-02 MTU Motoren- und Turbinen-Union München GmbH, 8000 München Kapazitives Messsystem zur Messung des Abstandes zwischen zwei relativ zueinander beweglichen Teilen
JPS6228617A (ja) * 1985-07-31 1987-02-06 Toshiba Corp 電磁流量計測定管及びその製造方法
DE3617373A1 (de) * 1986-05-23 1987-11-26 Mtu Muenchen Gmbh Kapazitives messsystem
GB2204693B (en) * 1987-05-14 1991-02-13 Rolls Royce Plc Turbomachine tip clearance sensor
JPH01158320A (ja) * 1987-12-16 1989-06-21 Kobe Steel Ltd 金型内溶湯感知センサ
FR2629196B1 (fr) * 1988-03-25 1991-05-31 Thermocoax Cie Capteur capacitif
JPH0610256Y2 (ja) * 1988-05-07 1994-03-16 横河電機株式会社 セラミックス電磁流量計
GB2225855B (en) * 1988-11-05 1993-01-20 Rolls Royce Plc Capacitance probe
JPH02171626A (ja) * 1988-12-26 1990-07-03 Tanaka Kikinzoku Kogyo Kk シールド型温度センサ
US5166626A (en) * 1990-05-29 1992-11-24 General Electric Company Electrical capacitance clearanceometer
US5101165A (en) * 1990-05-29 1992-03-31 General Electric Company Electrical capacitance clearanceometer
GB9021448D0 (en) * 1990-10-03 1990-11-14 Renishaw Plc Capacitance sensing probe
JP2540253B2 (ja) * 1991-08-06 1996-10-02 品川白煉瓦株式会社 導電率測定用セル
US5247837A (en) * 1991-09-25 1993-09-28 Rosemount Inc. Magnetic flowmeter electrode
US6171460B1 (en) * 1993-05-10 2001-01-09 John L. Bill Chemically protected electrode system
FR2721105B1 (fr) * 1994-06-09 1996-08-14 Onera (Off Nat Aerospatiale) Capteur capacitif a électrodes concentriques et son procédé de fabrication.
US5760593A (en) * 1996-02-14 1998-06-02 Bicc Public Limited Company Gap measurement device
GB9608111D0 (en) * 1996-04-19 1996-06-26 Bicc Plc Gap Measurement Device
FR2750489B1 (fr) * 1996-06-26 1998-08-28 Philips Electronics Nv Dispositif du type capteur capacitif composite
US5944191A (en) * 1998-01-14 1999-08-31 Fuisz Technologies Ltd. Peelable entry-resistant package
EP1101079B1 (de) * 1998-07-07 2003-09-10 THE GOODYEAR TIRE & RUBBER COMPANY Kapazitive auswerteschaltung mit zwei ausgängen
US6374680B1 (en) * 1999-03-24 2002-04-23 Endress + Hauser Gmbh + Co. Capacitive pressure sensor or capacitive differential pressure sensor

Also Published As

Publication number Publication date
GB2406381B (en) 2005-10-12
CN1856689A (zh) 2006-11-01
DE602004004909T2 (de) 2007-10-31
ATE354781T1 (de) 2007-03-15
US7414415B2 (en) 2008-08-19
JP2007506958A (ja) 2007-03-22
ES2282878T3 (es) 2007-10-16
JP4600778B2 (ja) 2010-12-15
GB0322655D0 (en) 2003-10-29
US20070108050A1 (en) 2007-05-17
CN100374814C (zh) 2008-03-12
EP1664669A1 (de) 2006-06-07
EP1664669B1 (de) 2007-02-21
WO2005031250A1 (en) 2005-04-07
GB2406381A (en) 2005-03-30

Similar Documents

Publication Publication Date Title
ATE354781T1 (de) Sensor zur kapazitiven messung des abstands zu einem objekt
DE10193295D2 (de) Piezoelektrischer Sensor
DE50011713D1 (de) Kapazitiver sensor
DE69926792D1 (de) Spannungssensor
ATE362102T1 (de) Sensor-array-vorrichtung sowie ein verfahren zur überwachung von elektrochemischer korrosion
DE60329218D1 (de) Lebendfingernachweis durch vier-punkte-messung der komplexen impedanz
AU2003279271A1 (en) Apparatus and methods for heat loss pressure measurement
WO2007088502A3 (en) Magnetic sensor device with reference unit
TW200707510A (en) Accurate temperature measurement for semiconductor applications
ATE404934T1 (de) Miniatur-sensorchip, insbesondere für fingerabdrucksensoren
Chakraborty et al. PMMA-coated capacitive type soil moisture sensor: Design, fabrication, and testing
ATE281651T1 (de) Spannungssensor
SG125944A1 (en) Shaped non-contact capacitive displacement sensorsfor measuring shaped targets
BR0211074A (pt) Dispositivo de sensor capacitivo
AU2003292967A1 (en) Sensor, sensor arrangement, and measuring method
SE0501340L (sv) Mätanordning
DE602004006154D1 (de) Sensor und gesamtvorrichtung zur hydrometrischen messung
ATE312339T1 (de) Vorrichtung zur konduktiven grenzstandmessung
DE59104753D1 (de) Messvorrichtung zur Überprüfung der Masse eines Werkstückes.
RU2006121843A (ru) Способ температурной компенсации дифференциальных датчиков с линейными характеристиками
SU1402906A1 (ru) Имитатор влажного материала дл поверки емкостных влагомеров с изолированными электродами
Avramov-Zamurovic et al. A capacitance sensor suite evaluation
RU152108U8 (ru) Емкостный датчик определения толщины слоя жидкости
RU2046333C1 (ru) Влагомер (варианты)
UA66180A (en) Moisture transducer for free-flowing bulk material

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: FUTURE TECHNOLOGY (SENSORS) LTD., BANBURY, OXF, GB