DE602004002980D1 - Elektrische Isolierung von Flüssigkeitschaltern - Google Patents

Elektrische Isolierung von Flüssigkeitschaltern

Info

Publication number
DE602004002980D1
DE602004002980D1 DE602004002980T DE602004002980T DE602004002980D1 DE 602004002980 D1 DE602004002980 D1 DE 602004002980D1 DE 602004002980 T DE602004002980 T DE 602004002980T DE 602004002980 T DE602004002980 T DE 602004002980T DE 602004002980 D1 DE602004002980 D1 DE 602004002980D1
Authority
DE
Germany
Prior art keywords
electrical insulation
liquid switches
switches
liquid
insulation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE602004002980T
Other languages
English (en)
Other versions
DE602004002980T2 (de
Inventor
Marvin Glenn Wong
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Agilent Technologies Inc
Original Assignee
Agilent Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agilent Technologies Inc filed Critical Agilent Technologies Inc
Publication of DE602004002980D1 publication Critical patent/DE602004002980D1/de
Application granted granted Critical
Publication of DE602004002980T2 publication Critical patent/DE602004002980T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H29/00—Switches having at least one liquid contact
    • H01H29/28—Switches having at least one liquid contact with level of surface of contact liquid displaced by fluid pressure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H29/00—Switches having at least one liquid contact
    • H01H2029/008—Switches having at least one liquid contact using micromechanics, e.g. micromechanical liquid contact switches or [LIMMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H29/00—Switches having at least one liquid contact
    • H01H29/02—Details
    • H01H29/04—Contacts; Containers for liquid contacts

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Contacts (AREA)
  • Micromachines (AREA)
DE602004002980T 2003-04-14 2004-03-25 Rohling für eine optische Linse aus Quarzglas für eine Mikrolithographieeinrichtung für den Einsatz mit Laserstrahlung sowie Behälter und Verfahren zur Herstellung desselben Expired - Fee Related DE602004002980T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US414129 1999-10-08
US10/414,129 US6770827B1 (en) 2003-04-14 2003-04-14 Electrical isolation of fluid-based switches

Publications (2)

Publication Number Publication Date
DE602004002980D1 true DE602004002980D1 (de) 2006-12-14
DE602004002980T2 DE602004002980T2 (de) 2007-06-06

Family

ID=32771697

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602004002980T Expired - Fee Related DE602004002980T2 (de) 2003-04-14 2004-03-25 Rohling für eine optische Linse aus Quarzglas für eine Mikrolithographieeinrichtung für den Einsatz mit Laserstrahlung sowie Behälter und Verfahren zur Herstellung desselben

Country Status (5)

Country Link
US (1) US6770827B1 (de)
EP (1) EP1471552B1 (de)
KR (1) KR20040089574A (de)
DE (1) DE602004002980T2 (de)
TW (1) TW200421375A (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10760985B2 (en) * 2018-06-26 2020-09-01 Tdk Corporation Smart surface sensor for collecting data

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Also Published As

Publication number Publication date
US6770827B1 (en) 2004-08-03
TW200421375A (en) 2004-10-16
EP1471552A1 (de) 2004-10-27
KR20040089574A (ko) 2004-10-21
DE602004002980T2 (de) 2007-06-06
EP1471552B1 (de) 2006-11-02

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Legal Events

Date Code Title Description
8327 Change in the person/name/address of the patent owner

Owner name: AGILENT TECHNOLOGIES, INC. - A DELAWARE CORPOR, US

8327 Change in the person/name/address of the patent owner

Owner name: AGILENT TECHNOLOGIES, INC. (N.D.GES.D. STAATES, US

8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee