DE60142202D1 - Verfahren zur Herstellung lichterzeugender Nahfeld-Elemente - Google Patents

Verfahren zur Herstellung lichterzeugender Nahfeld-Elemente

Info

Publication number
DE60142202D1
DE60142202D1 DE60142202T DE60142202T DE60142202D1 DE 60142202 D1 DE60142202 D1 DE 60142202D1 DE 60142202 T DE60142202 T DE 60142202T DE 60142202 T DE60142202 T DE 60142202T DE 60142202 D1 DE60142202 D1 DE 60142202D1
Authority
DE
Germany
Prior art keywords
producing light
field elements
generating near
generating
elements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60142202T
Other languages
English (en)
Inventor
Nobuyuki Kasama
Manabu Oumi
Yasuyuki Mitsuoka
Hidetaka Maeda
Kenji Kato
Takashi Niwa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
Original Assignee
Seiko Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Instruments Inc filed Critical Seiko Instruments Inc
Application granted granted Critical
Publication of DE60142202D1 publication Critical patent/DE60142202D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/18—SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes
    • G01Q60/22—Probes, their manufacture, or their related instrumentation, e.g. holders
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q80/00—Applications, other than SPM, of scanning-probe techniques

Landscapes

  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • General Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biophysics (AREA)
  • Optics & Photonics (AREA)
  • Analytical Chemistry (AREA)
  • Optical Head (AREA)
  • Microscoopes, Condenser (AREA)
  • Optical Couplings Of Light Guides (AREA)
DE60142202T 2000-03-07 2001-02-23 Verfahren zur Herstellung lichterzeugender Nahfeld-Elemente Expired - Lifetime DE60142202D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000062407A JP4648512B2 (ja) 2000-03-07 2000-03-07 近視野光発生素子の製造方法

Publications (1)

Publication Number Publication Date
DE60142202D1 true DE60142202D1 (de) 2010-07-08

Family

ID=18582426

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60142202T Expired - Lifetime DE60142202D1 (de) 2000-03-07 2001-02-23 Verfahren zur Herstellung lichterzeugender Nahfeld-Elemente

Country Status (4)

Country Link
US (1) US20020036753A1 (de)
EP (1) EP1139121B1 (de)
JP (1) JP4648512B2 (de)
DE (1) DE60142202D1 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1816642B1 (de) * 1998-11-09 2009-10-21 Seiko Instruments Inc. Nahfeld Abtastkopf und Herstellungsverfahren dafür
JP2002005810A (ja) * 2000-06-16 2002-01-09 Canon Inc プローブ及びその製造方法、表面観察装置、露光装置、情報処理装置
KR100499029B1 (ko) * 2002-10-22 2005-07-01 한국전자통신연구원 광 정보 저장장치의 헤드에 적용 가능한 캔티레버형근접장 탐침 구조 및 그 제작 방법
DE10303927B4 (de) * 2003-01-31 2005-03-31 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Sonde für ein optisches Nahfeldmikroskop mit verbesserter Streulichtunterdrückung und Verfahren zu deren Herstellung
DE10303961B4 (de) * 2003-01-31 2005-03-24 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Sonde für ein optisches Nahfeldmikroskop und Verfahren zu deren Herstellung
JP4515244B2 (ja) * 2004-12-20 2010-07-28 セイコーインスツル株式会社 近視野光ヘッド
JP5874995B2 (ja) * 2011-09-06 2016-03-02 株式会社日立ハイテクサイエンス カンチレバーのバネ定数特定方法およびその方法を採用した走査型プローブ顕微鏡

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4979973A (en) * 1988-09-13 1990-12-25 Shin-Etsu Chemical Co., Ltd. Preparation of fused silica glass by hydrolysis of methyl silicate
US5143659A (en) * 1989-10-04 1992-09-01 Eastman Kodak Company Method and apparatus for manufacturing aspherically shaped small lenses
JP3268797B2 (ja) * 1991-10-09 2002-03-25 オリンパス光学工業株式会社 光導入装置
US5459592A (en) * 1992-04-24 1995-10-17 Sharp Kabushiki Kaisha Projection display system including a collimating tapered waveguide or lens with the normal to optical axis angle increasing toward the lens center
JP3213436B2 (ja) * 1993-05-24 2001-10-02 シャープ株式会社 光プローブ素子、光プローブ素子を用いた記録再生装置、および光プローブ素子の製造方法
DE19509903A1 (de) * 1995-03-18 1996-09-19 Inst Mikrotechnik Mainz Gmbh Verfahren zur Herstellung einer Abtastvorrichtung zur kombinierten Untersuchung von verschiedenen Oberflächeneigenschaften mit Auflösung im Nanometerbereich
KR100190855B1 (ko) * 1995-12-22 1999-06-01 윤종용 엘시디용 칼라필터 및 그의 제조방법
JPH10213795A (ja) * 1997-01-30 1998-08-11 Fuji Xerox Co Ltd 光記録装置及びその製造方法
JPH11166935A (ja) * 1997-09-25 1999-06-22 Canon Inc 光検出または照射用の光プローブと該プローブを備えた近視野光学顕微鏡、及該光プローブの製造方法とその製造に用いる基板
JP3862845B2 (ja) * 1998-02-05 2006-12-27 セイコーインスツル株式会社 近接場用光プローブ
JPH11352134A (ja) * 1998-06-05 1999-12-24 Canon Inc 光検出または照射用プローブとその製造方法、及びこれらのプローブを備えた走査型プローブ顕微鏡
JP3399841B2 (ja) * 1998-06-25 2003-04-21 科学技術振興事業団 光導波路付き探針及びその製造方法
JP2000048393A (ja) * 1998-07-28 2000-02-18 Nippon Sheet Glass Co Ltd 光プローブ
US6441359B1 (en) * 1998-10-20 2002-08-27 The Board Of Trustees Of The Leland Stanford Junior University Near field optical scanning system employing microfabricated solid immersion lens
JP2001013056A (ja) * 1999-07-02 2001-01-19 Minolta Co Ltd 微小開口形成方法
JP3737347B2 (ja) * 2000-09-04 2006-01-18 シャープ株式会社 光プローブ素子および光プローブ素子を用いた記録再生装置

Also Published As

Publication number Publication date
US20020036753A1 (en) 2002-03-28
JP4648512B2 (ja) 2011-03-09
JP2001255253A (ja) 2001-09-21
EP1139121A3 (de) 2003-12-10
EP1139121A2 (de) 2001-10-04
EP1139121B1 (de) 2010-05-26

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition