DE60139226D1 - Materialien für akustische Spiegel zur Bildung von akustischen Vorrichtungen - Google Patents

Materialien für akustische Spiegel zur Bildung von akustischen Vorrichtungen

Info

Publication number
DE60139226D1
DE60139226D1 DE60139226T DE60139226T DE60139226D1 DE 60139226 D1 DE60139226 D1 DE 60139226D1 DE 60139226 T DE60139226 T DE 60139226T DE 60139226 T DE60139226 T DE 60139226T DE 60139226 D1 DE60139226 D1 DE 60139226D1
Authority
DE
Germany
Prior art keywords
acoustic
forming
devices
mirror materials
materials
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60139226T
Other languages
German (de)
English (en)
Inventor
Bradley Paul Barber
Harold Alexis Huggings
Ronal Eugene Miller
Donald Winslow Murphy
Yiu-Huen Wong
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Agere Systems LLC
Original Assignee
Agere Systems LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agere Systems LLC filed Critical Agere Systems LLC
Application granted granted Critical
Publication of DE60139226D1 publication Critical patent/DE60139226D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
    • H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
    • H03H9/175—Acoustic mirrors

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
DE60139226T 2000-05-23 2001-05-22 Materialien für akustische Spiegel zur Bildung von akustischen Vorrichtungen Expired - Lifetime DE60139226D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/576,807 US6603241B1 (en) 2000-05-23 2000-05-23 Acoustic mirror materials for acoustic devices

Publications (1)

Publication Number Publication Date
DE60139226D1 true DE60139226D1 (de) 2009-08-27

Family

ID=24306076

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60139226T Expired - Lifetime DE60139226D1 (de) 2000-05-23 2001-05-22 Materialien für akustische Spiegel zur Bildung von akustischen Vorrichtungen

Country Status (4)

Country Link
US (1) US6603241B1 (enExample)
EP (1) EP1158671B1 (enExample)
JP (1) JP2002041052A (enExample)
DE (1) DE60139226D1 (enExample)

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DE10160617A1 (de) * 2001-12-11 2003-06-12 Epcos Ag Akustischer Spiegel mit verbesserter Reflexion
FR2848036B1 (fr) 2002-11-28 2005-08-26 St Microelectronics Sa Support pour resonateur acoustique, resonateur acoustique et circuit integre correspondant
JP2005136534A (ja) * 2003-10-29 2005-05-26 Tdk Corp 薄膜バルク波共振器
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US9764304B2 (en) 2012-05-14 2017-09-19 Empire Technology Development Llc Acoustically driven nanoparticle concentrator
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US9537465B1 (en) * 2014-06-06 2017-01-03 Akoustis, Inc. Acoustic resonator device with single crystal piezo material and capacitor on a bulk substrate
JP5997796B2 (ja) * 2015-02-27 2016-09-28 株式会社日立製作所 超音波振動子ユニット
FR3047355B1 (fr) 2016-02-01 2019-04-19 Soitec Structure hybride pour dispositif a ondes acoustiques de surface
CN107016988B (zh) * 2017-03-03 2021-02-05 中南大学 一种轻质反声材料及其制备方法
DE102018117520B3 (de) * 2018-07-19 2019-12-05 RF360 Europe GmbH HF-Filtereinrichtung
CN118891824A (zh) * 2022-03-28 2024-11-01 日本碍子株式会社 复合基板、弹性表面波元件以及复合基板的制造方法
EP4300823A1 (en) * 2022-06-29 2024-01-03 Silicon Austria Labs GmbH A layer for an acoustic device and a method for depositing the same
WO2025258231A1 (ja) * 2024-06-13 2025-12-18 株式会社村田製作所 弾性波装置

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Also Published As

Publication number Publication date
EP1158671A3 (en) 2002-01-30
EP1158671A2 (en) 2001-11-28
EP1158671B1 (en) 2009-07-15
US6603241B1 (en) 2003-08-05
JP2002041052A (ja) 2002-02-08

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition