DE60138224D1 - Herstellungsverfahren für aktivmatrix-substrat - Google Patents

Herstellungsverfahren für aktivmatrix-substrat

Info

Publication number
DE60138224D1
DE60138224D1 DE60138224T DE60138224T DE60138224D1 DE 60138224 D1 DE60138224 D1 DE 60138224D1 DE 60138224 T DE60138224 T DE 60138224T DE 60138224 T DE60138224 T DE 60138224T DE 60138224 D1 DE60138224 D1 DE 60138224D1
Authority
DE
Germany
Prior art keywords
matrix substrate
active matrix
manufacturing
row
esd
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60138224T
Other languages
English (en)
Inventor
Michael J Trainor
John R Ayres
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TPO Hong Kong Holding Ltd
Original Assignee
TPO Hong Kong Holding Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TPO Hong Kong Holding Ltd filed Critical TPO Hong Kong Holding Ltd
Application granted granted Critical
Publication of DE60138224D1 publication Critical patent/DE60138224D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • G02F1/136204—Arrangements to prevent high voltage or static electricity failures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/0203—Particular design considerations for integrated circuits
    • H01L27/0248—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection
    • H01L27/0251—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection for MOS devices
    • H01L27/0255—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection for MOS devices using diodes as protective elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Nonlinear Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Mathematical Physics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Liquid Crystal (AREA)
  • Thin Film Transistor (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
DE60138224T 2001-01-11 2001-12-12 Herstellungsverfahren für aktivmatrix-substrat Expired - Lifetime DE60138224D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB0100733.5A GB0100733D0 (en) 2001-01-11 2001-01-11 A method of manufacturing an active matrix substrate
PCT/IB2001/002533 WO2002056380A1 (en) 2001-01-11 2001-12-12 A method of manufacturing an active matrix substrate

Publications (1)

Publication Number Publication Date
DE60138224D1 true DE60138224D1 (de) 2009-05-14

Family

ID=9906656

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60138224T Expired - Lifetime DE60138224D1 (de) 2001-01-11 2001-12-12 Herstellungsverfahren für aktivmatrix-substrat

Country Status (10)

Country Link
US (2) US6599787B2 (de)
EP (1) EP1352428B1 (de)
JP (2) JP4366076B2 (de)
KR (2) KR20020092975A (de)
CN (1) CN1263132C (de)
AT (1) ATE427562T1 (de)
DE (1) DE60138224D1 (de)
GB (1) GB0100733D0 (de)
TW (1) TW550820B (de)
WO (1) WO2002056380A1 (de)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100386849B1 (ko) * 2001-07-10 2003-06-09 엘지.필립스 엘시디 주식회사 박막 트랜지스터 표시장치의 정전방전 방지회로
TW584953B (en) * 2003-04-25 2004-04-21 Toppoly Optoelectronics Corp ESD protection device with thick poly film, electronic device and method for forming the same
US6936895B2 (en) 2003-10-09 2005-08-30 Chartered Semiconductor Manufacturing Ltd. ESD protection device
DE102004008803B3 (de) * 2004-02-20 2005-10-27 Zentrum Mikroelektronik Dresden Ag Schutzdiode zum Schutz von Halbleiterschaltkreisen gegen elektrostatische Entladungen
CN100421208C (zh) * 2004-03-04 2008-09-24 统宝光电股份有限公司 薄膜晶体管阵列的制造方法与装置
JP4207858B2 (ja) 2004-07-05 2009-01-14 セイコーエプソン株式会社 半導体装置、表示装置及び電子機器
US20060118787A1 (en) * 2004-12-02 2006-06-08 Toppoly Optoelectronics Corp. Electronic device with electrostatic discharge protection
US20070091218A1 (en) * 2005-10-25 2007-04-26 Chin-Hai Huang Electrostatic discharge protection structure and thin film transistor substrate including the same
CN100388069C (zh) * 2005-11-23 2008-05-14 友达光电股份有限公司 显示装置及其共同电极的配置结构
TWI285950B (en) * 2006-01-20 2007-08-21 Au Optronics Corp Electro static discharge protection circuit and diode thereof
JP5006580B2 (ja) * 2006-05-31 2012-08-22 ルネサスエレクトロニクス株式会社 保護回路を備える半導体装置
US20080024427A1 (en) * 2006-07-26 2008-01-31 Prime View International Co., Ltd. Electronic ink display panel
KR101301155B1 (ko) * 2006-12-12 2013-09-03 삼성디스플레이 주식회사 박막 트랜지스터 기판 및 이의 제조방법
JP4723654B2 (ja) * 2006-12-22 2011-07-13 シャープ株式会社 アクティブマトリクス基板及びそれを備えた表示パネル
TWI401019B (zh) * 2007-01-11 2013-07-01 Prime View Int Co Ltd 具有靜電防護功能之主動陣列裝置
JP5284553B2 (ja) * 2011-04-08 2013-09-11 シャープ株式会社 半導体装置および表示装置
KR102038633B1 (ko) 2012-11-13 2019-10-30 삼성전자주식회사 디스플레이 장치의 구동 소자 및 그 제조 방법
US9548293B2 (en) * 2014-02-14 2017-01-17 Infineon Technologies Ag III-nitride based ESD protection device
KR20160023977A (ko) 2014-08-21 2016-03-04 삼성디스플레이 주식회사 액정 표시 장치
CN106920768A (zh) * 2015-12-24 2017-07-04 中微半导体设备(上海)有限公司 多区主动矩阵温控系统和温控方法及其适用的静电吸盘和等离子处理装置

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5219771A (en) * 1988-07-30 1993-06-15 Fuji Xerox Co., Ltd. Method of producing a thin film transistor device
US5019002A (en) * 1989-07-12 1991-05-28 Honeywell, Inc. Method of manufacturing flat panel backplanes including electrostatic discharge prevention and displays made thereby
JP2764139B2 (ja) 1989-10-20 1998-06-11 ホシデン・フィリップス・ディスプレイ株式会社 アクティブマトリックス液晶表示素子
JP3071851B2 (ja) 1991-03-25 2000-07-31 株式会社半導体エネルギー研究所 電気光学装置
US5220443A (en) * 1991-04-29 1993-06-15 Nec Corporation Matrix wiring substrate and active matrix display having non-linear resistance elements for electrostatic discharge protection
JP3029531B2 (ja) * 1994-03-02 2000-04-04 シャープ株式会社 液晶表示装置
GB9416899D0 (en) * 1994-08-20 1994-10-12 Philips Electronics Uk Ltd Manufacture of electronic devices comprising thin-film circuitry
US5737041A (en) * 1995-07-31 1998-04-07 Image Quest Technologies, Inc. TFT, method of making and matrix displays incorporating the TFT
DE69528384D1 (de) * 1995-07-31 2002-10-31 Fire Technology Inc Halbleiterschaltermatrix mit schutz vor elektrischer entladung und herstellungsverfahren
DE69532724T2 (de) * 1995-08-07 2005-03-17 Hitachi, Ltd. Gegen statische elektrizität unempfindliche flüssigkristall-anzeigevorrichtung mit aktiver matrix
USRE44267E1 (en) 1995-10-03 2013-06-04 Seiko Epson Corporation Method to prevent static destruction of an active element comprised in a liquid crystal display device
US5731216A (en) * 1996-03-27 1998-03-24 Image Quest Technologies, Inc. Method of making an active matrix display incorporating an improved TFT
US6111424A (en) * 1997-09-04 2000-08-29 Lucent Technologies Inc. Testing method and apparatus for flat panel displays using infrared imaging

Also Published As

Publication number Publication date
US6838700B2 (en) 2005-01-04
US20040066134A1 (en) 2004-04-08
ATE427562T1 (de) 2009-04-15
US6599787B2 (en) 2003-07-29
GB0100733D0 (en) 2001-02-21
TW550820B (en) 2003-09-01
JP2009094524A (ja) 2009-04-30
CN1416596A (zh) 2003-05-07
KR20080059688A (ko) 2008-06-30
EP1352428B1 (de) 2009-04-01
JP2004518278A (ja) 2004-06-17
CN1263132C (zh) 2006-07-05
WO2002056380A1 (en) 2002-07-18
US20020088978A1 (en) 2002-07-11
JP4366076B2 (ja) 2009-11-18
EP1352428A1 (de) 2003-10-15
KR20020092975A (ko) 2002-12-12

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