DE60131166D1 - Nano-elektromechanisches filter - Google Patents

Nano-elektromechanisches filter

Info

Publication number
DE60131166D1
DE60131166D1 DE60131166T DE60131166T DE60131166D1 DE 60131166 D1 DE60131166 D1 DE 60131166D1 DE 60131166 T DE60131166 T DE 60131166T DE 60131166 T DE60131166 T DE 60131166T DE 60131166 D1 DE60131166 D1 DE 60131166D1
Authority
DE
Germany
Prior art keywords
microtip
filter
nanostructure
electromechanical filter
nano
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60131166T
Other languages
English (en)
Other versions
DE60131166T2 (de
Inventor
Lionel Buchaillot
Dominique Jules Collard
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Original Assignee
Centre National de la Recherche Scientifique CNRS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National de la Recherche Scientifique CNRS filed Critical Centre National de la Recherche Scientifique CNRS
Application granted granted Critical
Publication of DE60131166D1 publication Critical patent/DE60131166D1/de
Publication of DE60131166T2 publication Critical patent/DE60131166T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/462—Microelectro-mechanical filters
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Filtering Materials (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Glass Compositions (AREA)
DE60131166T 2000-06-30 2001-06-29 Nano-elektromechanisches filter Expired - Lifetime DE60131166T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR0008490 2000-06-30
FR0008490A FR2811163B1 (fr) 2000-06-30 2000-06-30 Filtre nono-electromecanique
PCT/FR2001/002087 WO2002001717A1 (fr) 2000-06-30 2001-06-29 Filtre nano-electromecanique

Publications (2)

Publication Number Publication Date
DE60131166D1 true DE60131166D1 (de) 2007-12-13
DE60131166T2 DE60131166T2 (de) 2008-09-25

Family

ID=8851939

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60131166T Expired - Lifetime DE60131166T2 (de) 2000-06-30 2001-06-29 Nano-elektromechanisches filter

Country Status (10)

Country Link
US (1) US6947719B2 (de)
EP (1) EP1295389B1 (de)
JP (1) JP4794805B2 (de)
KR (1) KR100749030B1 (de)
AT (1) ATE377291T1 (de)
AU (1) AU2001270710A1 (de)
CA (1) CA2414354C (de)
DE (1) DE60131166T2 (de)
FR (1) FR2811163B1 (de)
WO (1) WO2002001717A1 (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7098757B2 (en) 2002-09-23 2006-08-29 Georgia Tech Research Corporation Electrically-coupled micro-electro-mechanical filter systems and methods
JP4593239B2 (ja) * 2003-11-19 2010-12-08 パナソニック株式会社 電気機械フィルタ
US20050261559A1 (en) * 2004-05-18 2005-11-24 Mumford John R Wireless physiological monitoring system
US20110068834A1 (en) * 2005-01-07 2011-03-24 Trustees Of Boston University Electro-mechanical oscillating devices and associated methods
JP2008527857A (ja) * 2005-01-07 2008-07-24 トラスティーズ オブ ボストン ユニバーシティ ナノメカニカル発振器
JP4994096B2 (ja) * 2006-04-20 2012-08-08 パナソニック株式会社 半導体装置の製造方法およびこれを用いた半導体装置
WO2008036845A2 (en) * 2006-09-20 2008-03-27 Trustees Of Boston University Nano electromechanical integrated-circuit bank and switch
WO2008036830A2 (en) * 2006-09-20 2008-03-27 Trustees Of Boston University Nano electromechanical integrated-circuit filter
JP5046966B2 (ja) * 2007-01-23 2012-10-10 パナソニック株式会社 電気機械共振器及びその製造方法
FR2929464B1 (fr) * 2008-03-28 2011-09-09 Commissariat Energie Atomique Nano resonnateur magnetique
US7990229B2 (en) 2008-04-01 2011-08-02 Sand9, Inc. Methods and devices for compensating a signal using resonators
US8410868B2 (en) 2009-06-04 2013-04-02 Sand 9, Inc. Methods and apparatus for temperature control of devices and mechanical resonating structures
US8044736B2 (en) * 2008-04-29 2011-10-25 Sand9, Inc. Timing oscillators and related methods
US8476809B2 (en) 2008-04-29 2013-07-02 Sand 9, Inc. Microelectromechanical systems (MEMS) resonators and related apparatus and methods
US8111108B2 (en) 2008-07-29 2012-02-07 Sand9, Inc. Micromechanical resonating devices and related methods
US9048811B2 (en) 2009-03-31 2015-06-02 Sand 9, Inc. Integration of piezoelectric materials with substrates

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1437288A (en) * 1973-06-11 1976-05-26 Kokusai Electric Co Ltd Mechanical filter
US5023503A (en) * 1990-01-03 1991-06-11 Motorola, Inc. Super high frequency oscillator/resonator
DE4414969C1 (de) * 1994-04-28 1995-06-08 Siemens Ag Mikromechanisches Bauteil mit einer dielektrischen beweglichen Struktur, Mikrosystem und Herstellverfahren
JP3139339B2 (ja) * 1995-09-13 2001-02-26 株式会社村田製作所 真空封止デバイスおよびその製造方法
JPH10148643A (ja) * 1996-11-19 1998-06-02 Tdk Corp 加速度センサ及びその製造方法
GB9815820D0 (en) * 1998-07-22 1998-09-16 Secr Defence Improvements relating to micro-machining
JP2001016068A (ja) * 1999-06-30 2001-01-19 Kyocera Corp 圧電共振子
US6601276B2 (en) * 2001-05-11 2003-08-05 Agere Systems Inc. Method for self alignment of patterned layers in thin film acoustic devices
US6985051B2 (en) * 2002-12-17 2006-01-10 The Regents Of The University Of Michigan Micromechanical resonator device and method of making a micromechanical device
JP4617904B2 (ja) * 2005-02-01 2011-01-26 ソニー株式会社 微小振動子、半導体装置及び通信装置

Also Published As

Publication number Publication date
CA2414354A1 (fr) 2002-01-03
US6947719B2 (en) 2005-09-20
DE60131166T2 (de) 2008-09-25
KR20030024712A (ko) 2003-03-26
JP2004502374A (ja) 2004-01-22
EP1295389B1 (de) 2007-10-31
FR2811163A1 (fr) 2002-01-04
WO2002001717A1 (fr) 2002-01-03
FR2811163B1 (fr) 2002-10-04
JP4794805B2 (ja) 2011-10-19
EP1295389A1 (de) 2003-03-26
ATE377291T1 (de) 2007-11-15
AU2001270710A1 (en) 2002-01-08
CA2414354C (fr) 2009-09-29
KR100749030B1 (ko) 2007-08-13
US20030186672A1 (en) 2003-10-02

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