DE60127716D1 - Verwendung eines systems zur endpunktdetektierung um verschiedene prozess-stationen innerhalb einer anlage aneinander anzupassen - Google Patents

Verwendung eines systems zur endpunktdetektierung um verschiedene prozess-stationen innerhalb einer anlage aneinander anzupassen

Info

Publication number
DE60127716D1
DE60127716D1 DE60127716T DE60127716T DE60127716D1 DE 60127716 D1 DE60127716 D1 DE 60127716D1 DE 60127716 T DE60127716 T DE 60127716T DE 60127716 T DE60127716 T DE 60127716T DE 60127716 D1 DE60127716 D1 DE 60127716D1
Authority
DE
Germany
Prior art keywords
investment
adapt
point detection
different process
final point
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60127716T
Other languages
English (en)
Other versions
DE60127716T2 (de
Inventor
Alexander J Pasadyn
Joyce S Hewett
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
GlobalFoundries Inc
Original Assignee
Advanced Micro Devices Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advanced Micro Devices Inc filed Critical Advanced Micro Devices Inc
Application granted granted Critical
Publication of DE60127716D1 publication Critical patent/DE60127716D1/de
Publication of DE60127716T2 publication Critical patent/DE60127716T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • General Factory Administration (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Control By Computers (AREA)
DE60127716T 2001-01-03 2001-10-02 Verwendung eines systems zur endpunktdetektierung um verschiedene prozess-stationen innerhalb einer anlage aneinander anzupassen Expired - Lifetime DE60127716T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/753,705 US6588007B1 (en) 2001-01-03 2001-01-03 Use of endpoint system to match individual processing stations within a tool
US753705 2001-01-03
PCT/US2001/030776 WO2002054481A2 (en) 2001-01-03 2001-10-02 Use of endpoint system to match individual processing stations within a tool

Publications (2)

Publication Number Publication Date
DE60127716D1 true DE60127716D1 (de) 2007-05-16
DE60127716T2 DE60127716T2 (de) 2007-12-27

Family

ID=25031785

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60127716T Expired - Lifetime DE60127716T2 (de) 2001-01-03 2001-10-02 Verwendung eines systems zur endpunktdetektierung um verschiedene prozess-stationen innerhalb einer anlage aneinander anzupassen

Country Status (8)

Country Link
US (1) US6588007B1 (de)
EP (1) EP1354343B1 (de)
JP (1) JP4416401B2 (de)
KR (1) KR100946394B1 (de)
CN (1) CN100392836C (de)
DE (1) DE60127716T2 (de)
TW (1) TW563197B (de)
WO (1) WO2002054481A2 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7047099B2 (en) * 2001-06-19 2006-05-16 Applied Materials Inc. Integrating tool, module, and fab level control
US20020192966A1 (en) * 2001-06-19 2002-12-19 Shanmugasundram Arulkumar P. In situ sensor based control of semiconductor processing procedure
US7375035B2 (en) * 2003-04-29 2008-05-20 Ronal Systems Corporation Host and ancillary tool interface methodology for distributed processing
WO2005004218A1 (en) 2003-07-02 2005-01-13 Ebara Corporation Polishing apparatus and polishing method
US6980873B2 (en) 2004-04-23 2005-12-27 Taiwan Semiconductor Manufacturing Company, Ltd. System and method for real-time fault detection, classification, and correction in a semiconductor manufacturing environment
US7437404B2 (en) * 2004-05-20 2008-10-14 Taiwan Semiconductor Manufacturing Company, Ltd. System and method for improving equipment communication in semiconductor manufacturing equipment
US20060139587A1 (en) * 2004-12-23 2006-06-29 Asml Netherlands B.V. Software mechanism for generating flexible equipment state model views, software mechanism for measuring equipment reliability
CN100461055C (zh) * 2005-08-22 2009-02-11 力晶半导体股份有限公司 共享半导体机台的方法与使用该方法的制造系统
US7642100B2 (en) * 2006-09-13 2010-01-05 Taiwan Semiconductor Manufacturing Co., Ltd. Method and system for yield and productivity improvements in semiconductor processing
JP4975656B2 (ja) 2008-02-01 2012-07-11 東京エレクトロン株式会社 情報処理装置、情報処理方法、およびプログラム
US9606519B2 (en) * 2013-10-14 2017-03-28 Applied Materials, Inc. Matching process controllers for improved matching of process
CN112527268B (zh) * 2020-12-16 2023-10-27 成都立思方信息技术有限公司 一种面向高性能复杂测试测量应用的软件开发系统
TWI788855B (zh) * 2021-05-25 2023-01-01 旺宏電子股份有限公司 偵測系統

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5160402A (en) * 1990-05-24 1992-11-03 Applied Materials, Inc. Multi-channel plasma discharge endpoint detection method
US5499733A (en) * 1992-09-17 1996-03-19 Luxtron Corporation Optical techniques of measuring endpoint during the processing of material layers in an optically hostile environment
US5586039A (en) * 1993-03-29 1996-12-17 Texas Instruments Incorporated Computer-aided manufacturing support method and system for specifying relationships and dependencies between process type components
US5910846A (en) * 1996-05-16 1999-06-08 Micron Technology, Inc. Method and apparatus for detecting the endpoint in chemical-mechanical polishing of semiconductor wafers
JP3231659B2 (ja) * 1997-04-28 2001-11-26 日本電気株式会社 自動研磨装置
US5910011A (en) * 1997-05-12 1999-06-08 Applied Materials, Inc. Method and apparatus for monitoring processes using multiple parameters of a semiconductor wafer processing system
JPH11285968A (ja) * 1998-04-01 1999-10-19 Nikon Corp 研磨方法及び研磨装置
US6179688B1 (en) * 1999-03-17 2001-01-30 Advanced Micro Devices, Inc. Method and apparatus for detecting the endpoint of a chemical-mechanical polishing operation
TW455973B (en) * 1999-04-05 2001-09-21 Applied Materials Inc Endpoint detection in the fabrication of electronic devices

Also Published As

Publication number Publication date
US6588007B1 (en) 2003-07-01
DE60127716T2 (de) 2007-12-27
EP1354343A2 (de) 2003-10-22
EP1354343B1 (de) 2007-04-04
CN1554117A (zh) 2004-12-08
KR100946394B1 (ko) 2010-03-09
CN100392836C (zh) 2008-06-04
JP2004517495A (ja) 2004-06-10
KR20030066795A (ko) 2003-08-09
TW563197B (en) 2003-11-21
WO2002054481A2 (en) 2002-07-11
WO2002054481A3 (en) 2003-08-07
JP4416401B2 (ja) 2010-02-17

Similar Documents

Publication Publication Date Title
DE60127716D1 (de) Verwendung eines systems zur endpunktdetektierung um verschiedene prozess-stationen innerhalb einer anlage aneinander anzupassen
DE60239030D1 (de) Verfahren und Vorrichtung zur Signalisierung zwischen Geräten eines Speichersystems
DE60137766D1 (de) Verfahren zur fernüberwachung einer konfiguration in einem industriellen steuerungssystem
DE50213073D1 (de) Verfahren und Vorrichtung zur Überwachung eines Bussystems und Bussystem
DE69905272D1 (de) Verfahren zur behandlung eines vorübergehenden fehlern unterworfenes elektronisches systems
DE10161308B8 (de) Optisches System und Verfahren zur Detektion eines Leistungspegels einer Quelle
DE50013020D1 (de) Verfahren zur Überwachung der Funktion eines Systems zur Abgasnachbehandlung
DE60034582D1 (de) Verfahren zur Regelung der Dienstgüte eines CDMA-basierenden Systems
DE60232943D1 (de) Verfahren und System zur Bereitstellung eines Dienstes
DE69904248D1 (de) Verfahren zur Beschichtung eines thermischen Sperrschichtsystems, sowie beschichteter Gegenstand
DE69926761D1 (de) Cvd-reaktorsystem und verfahren zur cvd-oberflächenbeschichtung
DE60230371D1 (de) Verfahren zur Reparatur eines Gegenstandes
DE10295157D2 (de) Transpondersystem und Verfahren zur Entfernungsmessung
DE10080916T1 (de) Verfahren zur Herstellung einer photovoltaischen Vorrichtung
DE50114545D1 (de) Verfahren zur abstandsregelung eines fahrzeugs zu einem vorausfahrenden fremdfahrzeug und abstandsregelsystem
DE60110775D1 (de) Verfahren zur Reparaturbeschichtung
DE50208910D1 (de) Verfahren zur inbetriebnahme eines bedien- und beobachtungssystems von feldgeräten
DE69938151D1 (de) Verfahren und system zur schätzung einer ankunftszeit eines funksignals
DE50109521D1 (de) Vorrichtung und verfahren zur blickrichtungsbestimmung bezüglich eines festen referenzkoordinatensystems
DE10291055D2 (de) Verfahren zur Ansteuerung einer Komponente eines verteilten sicherheitsrelevanten Systems
DE59911752D1 (de) Verfahren zur optoelektronischen Überwachung eines Schutzbereichs
DE50000878D1 (de) Verfahren und vorrichtung zur ermittlung der position eines objektes innerhalb einer szene
DE60202438D1 (de) Verfahren zur Übertragung eines Signals zwischen einem Endgerät und einer Netzwerkeinheit
DE60220243D1 (de) Verfahren und Vorrichtung zur Steuerung eines optischen Systems
DE50110924D1 (de) Verfahren zur Überprüfung einer Abgasrückführanlage

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: GLOBALFOUNDRIES INC., GRAND CAYMAN, KY

8328 Change in the person/name/address of the agent

Representative=s name: GRUENECKER, KINKELDEY, STOCKMAIR & SCHWANHAEUSSER,