DE60126799D1 - Halbleiter-Vorrichtung und deren Verwendung zur Identifizierung von organischen Molekülen - Google Patents

Halbleiter-Vorrichtung und deren Verwendung zur Identifizierung von organischen Molekülen

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Publication number
DE60126799D1
DE60126799D1 DE60126799T DE60126799T DE60126799D1 DE 60126799 D1 DE60126799 D1 DE 60126799D1 DE 60126799 T DE60126799 T DE 60126799T DE 60126799 T DE60126799 T DE 60126799T DE 60126799 D1 DE60126799 D1 DE 60126799D1
Authority
DE
Germany
Prior art keywords
identification
semiconductor device
organic molecules
molecules
organic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60126799T
Other languages
English (en)
Other versions
DE60126799T2 (de
Inventor
Takeshi Yagi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Application granted granted Critical
Publication of DE60126799D1 publication Critical patent/DE60126799D1/de
Publication of DE60126799T2 publication Critical patent/DE60126799T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00Nanotechnology for materials or surface science, e.g. nanocomposites
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/0046Sequential or parallel reactions, e.g. for the synthesis of polypeptides or polynucleotides; Apparatus and devices for combinatorial chemistry or for making molecular arrays
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64Fluorescence; Phosphorescence
    • G01N21/6428Measuring fluorescence of fluorescent products of reactions or of fluorochrome labelled reactive substances, e.g. measuring quenching effects, using measuring "optrodes"
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64Fluorescence; Phosphorescence
    • G01N21/645Specially adapted constructive features of fluorimeters
    • G01N21/6452Individual samples arranged in a regular 2D-array, e.g. multiwell plates
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/00277Apparatus
    • B01J2219/00351Means for dispensing and evacuation of reagents
    • B01J2219/00385Printing
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/00277Apparatus
    • B01J2219/00497Features relating to the solid phase supports
    • B01J2219/00527Sheets
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/00277Apparatus
    • B01J2219/0054Means for coding or tagging the apparatus or the reagents
    • B01J2219/00572Chemical means
    • B01J2219/00576Chemical means fluorophore
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/00583Features relative to the processes being carried out
    • B01J2219/00585Parallel processes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/00583Features relative to the processes being carried out
    • B01J2219/00596Solid-phase processes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/00583Features relative to the processes being carried out
    • B01J2219/00603Making arrays on substantially continuous surfaces
    • B01J2219/00653Making arrays on substantially continuous surfaces the compounds being bound to electrodes embedded in or on the solid supports
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/00583Features relative to the processes being carried out
    • B01J2219/00603Making arrays on substantially continuous surfaces
    • B01J2219/00659Two-dimensional arrays
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/00583Features relative to the processes being carried out
    • B01J2219/00603Making arrays on substantially continuous surfaces
    • B01J2219/00659Two-dimensional arrays
    • B01J2219/00662Two-dimensional arrays within two-dimensional arrays
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/00583Features relative to the processes being carried out
    • B01J2219/00603Making arrays on substantially continuous surfaces
    • B01J2219/00675In-situ synthesis on the substrate
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/00583Features relative to the processes being carried out
    • B01J2219/00603Making arrays on substantially continuous surfaces
    • B01J2219/00677Ex-situ synthesis followed by deposition on the substrate
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/0068Means for controlling the apparatus of the process
    • B01J2219/00702Processes involving means for analysing and characterising the products
    • B01J2219/00704Processes involving means for analysing and characterising the products integrated with the reactor apparatus
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/00709Type of synthesis
    • B01J2219/00711Light-directed synthesis
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/00718Type of compounds synthesised
    • B01J2219/0072Organic compounds
    • B01J2219/00722Nucleotides

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Engineering & Computer Science (AREA)
  • Pathology (AREA)
  • Biochemistry (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Nanotechnology (AREA)
  • General Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Composite Materials (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Optics & Photonics (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Apparatus Associated With Microorganisms And Enzymes (AREA)
  • Measuring Or Testing Involving Enzymes Or Micro-Organisms (AREA)
  • Solid State Image Pick-Up Elements (AREA)
DE60126799T 2000-12-27 2001-12-27 Halbleiter-Vorrichtung und deren Verwendung zur Identifizierung von organischen Molekülen Expired - Lifetime DE60126799T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2000399166 2000-12-27
JP2000399166A JP4534352B2 (ja) 2000-12-27 2000-12-27 有機分子検出用半導体素子、有機分子検出用半導体装置及びこれを用いた有機分子の測定方法

Publications (2)

Publication Number Publication Date
DE60126799D1 true DE60126799D1 (de) 2007-04-05
DE60126799T2 DE60126799T2 (de) 2007-10-31

Family

ID=18863997

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60126799T Expired - Lifetime DE60126799T2 (de) 2000-12-27 2001-12-27 Halbleiter-Vorrichtung und deren Verwendung zur Identifizierung von organischen Molekülen

Country Status (4)

Country Link
US (1) US20020081716A1 (de)
EP (1) EP1325776B1 (de)
JP (1) JP4534352B2 (de)
DE (1) DE60126799T2 (de)

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US20060014151A1 (en) * 2002-12-25 2006-01-19 Jun Ogura Optical dna sensor, dna reading apparatus, identification method of dna and manufacturing method of optical dna sensor
US20040175821A1 (en) * 2003-03-07 2004-09-09 Ehman Michael F. Integrated photodetector for heavy metals and biological activity analysis
JP2005024278A (ja) * 2003-06-30 2005-01-27 Canon Inc プローブ担体の製造方法及び製造装置
JP4179169B2 (ja) * 2004-01-08 2008-11-12 カシオ計算機株式会社 分析装置
JP4548002B2 (ja) * 2004-06-09 2010-09-22 カシオ計算機株式会社 分析チップ及び生体高分子の分析方法
JP4802508B2 (ja) * 2004-06-18 2011-10-26 カシオ計算機株式会社 撮像装置、生体高分子分析チップ及び分析支援装置
AT500855B1 (de) * 2004-09-08 2006-04-15 Bioident Biometric Technologie Vorrichtung zum auswerten biochemischer proben
US8000773B2 (en) * 2004-11-09 2011-08-16 Spectrum Dynamics Llc Radioimaging
JP4741855B2 (ja) * 2005-02-18 2011-08-10 カシオ計算機株式会社 生体高分子分析チップ、分析支援装置及び生体高分子分析方法
FR2892196B1 (fr) * 2005-10-18 2008-06-20 Genewave Soc Par Actions Simpl Procede de fabrication d'un biocapteur a detection integree
US7968833B2 (en) 2006-04-26 2011-06-28 National University Corporation NARA Institute of Science and Technology Image sensor with optical and electrical measurement functions
JP4909656B2 (ja) * 2006-06-26 2012-04-04 富士フイルム株式会社 Dna解析用デバイス、dna解析装置
JP4360687B2 (ja) * 2007-01-12 2009-11-11 国立大学法人 岡山大学 物質検出装置及び物質検出方法
KR100924174B1 (ko) * 2007-07-10 2009-10-28 한국전자통신연구원 비정질실리콘의 광전효과를 이용한 질병진단장치 및질병진단방법
JP4798204B2 (ja) * 2008-10-17 2011-10-19 カシオ計算機株式会社 蛍光検出チップ
US20120002201A1 (en) * 2009-03-18 2012-01-05 National University Corporation Toyohashi University Of Technology Spectral Device and Method for Controlling Same
JP2010237020A (ja) * 2009-03-31 2010-10-21 Japan Aerospace Exploration Agency 生体分子検出装置及び生体分子検出方法
JP5012873B2 (ja) * 2009-10-14 2012-08-29 カシオ計算機株式会社 画像処理装置
JP6017107B2 (ja) * 2009-12-28 2016-10-26 ソニー株式会社 イメージセンサ及びその製造方法、並びにセンサデバイス
JP2010204126A (ja) * 2010-06-23 2010-09-16 Casio Computer Co Ltd 生体高分子分析支援装置
US8794050B2 (en) 2011-01-27 2014-08-05 Nanoscopia (Cayman), Inc. Fluid sample analysis systems
US9469871B2 (en) 2011-04-14 2016-10-18 Corporos Inc. Methods and apparatus for point-of-care nucleic acid amplification and detection
JP5765081B2 (ja) * 2011-06-22 2015-08-19 ソニー株式会社 撮像素子、電子機器、製造方法、および検査装置
JP2013088378A (ja) 2011-10-21 2013-05-13 Sony Corp ケミカルセンサ、ケミカルセンサモジュール、生体分子検出装置及び生体分子検出方法
JP2013092393A (ja) 2011-10-24 2013-05-16 Sony Corp ケミカルセンサ、生体分子検出装置及び生体分子検出方法
EP2787340A4 (de) 2011-11-30 2015-08-05 Sony Corp Chemischer sensor, modul eines chemischen sensors, detektor für chemische substanz und verfahren zur detektion einer chemischen substanz
KR20140134285A (ko) 2012-03-19 2014-11-21 소니 주식회사 케미컬 센서, 케미컬 센서의 제조 방법, 화학물질 검출 장치
US9354159B2 (en) 2012-05-02 2016-05-31 Nanoscopia (Cayman), Inc. Opto-fluidic system with coated fluid channels
WO2014003743A1 (en) * 2012-06-27 2014-01-03 Aptina Imaging Corporation Fluid sample analysis systems
CN107110772B (zh) * 2014-11-25 2020-05-19 松下知识产权经营株式会社 电子标本保持部件、及其组装方法
CN105543071A (zh) * 2015-12-10 2016-05-04 严媚 一种用于高通量基因测序的cmos isfet双模式图像化学传感器芯片
US11630062B2 (en) * 2019-10-10 2023-04-18 Visera Technologies Company Limited Biosensor and method of forming the same
US11705472B2 (en) 2019-10-10 2023-07-18 Visera Technologies Company Limited Biosensor and method of distinguishing a light

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US5846708A (en) * 1991-11-19 1998-12-08 Massachusetts Institiute Of Technology Optical and electrical methods and apparatus for molecule detection
US6251685B1 (en) * 1999-02-18 2001-06-26 Agilent Technologies, Inc. Readout method for molecular biological electronically addressable arrays
US6325977B1 (en) * 2000-01-18 2001-12-04 Agilent Technologies, Inc. Optical detection system for the detection of organic molecules

Also Published As

Publication number Publication date
DE60126799T2 (de) 2007-10-31
EP1325776B1 (de) 2007-02-21
EP1325776A1 (de) 2003-07-09
JP2002202303A (ja) 2002-07-19
US20020081716A1 (en) 2002-06-27
JP4534352B2 (ja) 2010-09-01

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