DE60126731D1 - Mikrovorrichtung mit thermischem Betätiger - Google Patents

Mikrovorrichtung mit thermischem Betätiger

Info

Publication number
DE60126731D1
DE60126731D1 DE60126731T DE60126731T DE60126731D1 DE 60126731 D1 DE60126731 D1 DE 60126731D1 DE 60126731 T DE60126731 T DE 60126731T DE 60126731 T DE60126731 T DE 60126731T DE 60126731 D1 DE60126731 D1 DE 60126731D1
Authority
DE
Germany
Prior art keywords
thermal actuator
micro device
actuator
micro
thermal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60126731T
Other languages
English (en)
Other versions
DE60126731T2 (de
Inventor
Pierre-Louis Charvet
Michel Dufour
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Application granted granted Critical
Publication of DE60126731D1 publication Critical patent/DE60126731D1/de
Publication of DE60126731T2 publication Critical patent/DE60126731T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H61/00—Electrothermal relays
    • H01H61/02—Electrothermal relays wherein the thermally-sensitive member is heated indirectly, e.g. resistively, inductively
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/16—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of distance between electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0063—Switches making use of microelectromechanical systems [MEMS] having electrostatic latches, i.e. the activated position is kept by electrostatic forces other than the activation force
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H37/00—Thermally-actuated switches
    • H01H2037/008—Micromechanical switches operated thermally
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H61/00—Electrothermal relays
    • H01H2061/006—Micromechanical thermal relay

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Thermally Actuated Switches (AREA)
  • Micromachines (AREA)
  • Contacts (AREA)
DE60126731T 2000-12-27 2001-12-26 Mikrovorrichtung mit thermischem Betätiger Expired - Lifetime DE60126731T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0017113A FR2818795B1 (fr) 2000-12-27 2000-12-27 Micro-dispositif a actionneur thermique
FR0017113 2000-12-27

Publications (2)

Publication Number Publication Date
DE60126731D1 true DE60126731D1 (de) 2007-04-05
DE60126731T2 DE60126731T2 (de) 2007-11-15

Family

ID=8858265

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60126731T Expired - Lifetime DE60126731T2 (de) 2000-12-27 2001-12-26 Mikrovorrichtung mit thermischem Betätiger

Country Status (5)

Country Link
US (1) US6703916B2 (de)
EP (1) EP1220256B1 (de)
JP (1) JP4130736B2 (de)
DE (1) DE60126731T2 (de)
FR (1) FR2818795B1 (de)

Families Citing this family (53)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100703140B1 (ko) 1998-04-08 2007-04-05 이리다임 디스플레이 코포레이션 간섭 변조기 및 그 제조 방법
US8928967B2 (en) 1998-04-08 2015-01-06 Qualcomm Mems Technologies, Inc. Method and device for modulating light
US6911891B2 (en) * 2001-01-19 2005-06-28 Massachusetts Institute Of Technology Bistable actuation techniques, mechanisms, and applications
JP2003062798A (ja) * 2001-08-21 2003-03-05 Advantest Corp アクチュエータ及びスイッチ
FR2845157B1 (fr) 2002-10-01 2004-11-05 Commissariat Energie Atomique Detecteur bolometrique a antenne comportant un interrupteur et dispositif d'imagerie le comportant.
FR2854726B1 (fr) 2003-05-09 2005-08-26 St Microelectronics Sa Microcommutateur a plusieurs positions fermees a deplacement lateral
FR2857153B1 (fr) * 2003-07-01 2005-08-26 Commissariat Energie Atomique Micro-commutateur bistable a faible consommation.
US7161728B2 (en) * 2003-12-09 2007-01-09 Idc, Llc Area array modulation and lead reduction in interferometric modulators
US7142346B2 (en) * 2003-12-09 2006-11-28 Idc, Llc System and method for addressing a MEMS display
FR2865724A1 (fr) * 2004-02-04 2005-08-05 St Microelectronics Sa Microsysteme electromecanique pouvant basculer entre deux positions stables
FR2868591B1 (fr) * 2004-04-06 2006-06-09 Commissariat Energie Atomique Microcommutateur a faible tension d'actionnement et faible consommation
US7889163B2 (en) 2004-08-27 2011-02-15 Qualcomm Mems Technologies, Inc. Drive method for MEMS devices
US7551159B2 (en) * 2004-08-27 2009-06-23 Idc, Llc System and method of sensing actuation and release voltages of an interferometric modulator
US7499208B2 (en) * 2004-08-27 2009-03-03 Udc, Llc Current mode display driver circuit realization feature
US7843410B2 (en) 2004-09-27 2010-11-30 Qualcomm Mems Technologies, Inc. Method and device for electrically programmable display
US7532195B2 (en) 2004-09-27 2009-05-12 Idc, Llc Method and system for reducing power consumption in a display
US7724993B2 (en) 2004-09-27 2010-05-25 Qualcomm Mems Technologies, Inc. MEMS switches with deforming membranes
US7679627B2 (en) * 2004-09-27 2010-03-16 Qualcomm Mems Technologies, Inc. Controller and driver features for bi-stable display
US7310179B2 (en) * 2004-09-27 2007-12-18 Idc, Llc Method and device for selective adjustment of hysteresis window
US8878825B2 (en) 2004-09-27 2014-11-04 Qualcomm Mems Technologies, Inc. System and method for providing a variable refresh rate of an interferometric modulator display
US7136213B2 (en) 2004-09-27 2006-11-14 Idc, Llc Interferometric modulators having charge persistence
US8310441B2 (en) * 2004-09-27 2012-11-13 Qualcomm Mems Technologies, Inc. Method and system for writing data to MEMS display elements
US7675669B2 (en) 2004-09-27 2010-03-09 Qualcomm Mems Technologies, Inc. Method and system for driving interferometric modulators
US7446927B2 (en) 2004-09-27 2008-11-04 Idc, Llc MEMS switch with set and latch electrodes
US7283030B2 (en) * 2004-11-22 2007-10-16 Eastman Kodak Company Doubly-anchored thermal actuator having varying flexural rigidity
US7339454B1 (en) * 2005-04-11 2008-03-04 Sandia Corporation Tensile-stressed microelectromechanical apparatus and microelectromechanical relay formed therefrom
KR20080027236A (ko) 2005-05-05 2008-03-26 콸콤 인코포레이티드 다이나믹 드라이버 ｉｃ 및 디스플레이 패널 구성
US7948457B2 (en) 2005-05-05 2011-05-24 Qualcomm Mems Technologies, Inc. Systems and methods of actuating MEMS display elements
US7920136B2 (en) 2005-05-05 2011-04-05 Qualcomm Mems Technologies, Inc. System and method of driving a MEMS display device
JP4552768B2 (ja) * 2005-06-14 2010-09-29 ソニー株式会社 可動素子、ならびにその可動素子を内蔵する半導体デバイス、モジュールおよび電子機器
JP2006346787A (ja) * 2005-06-14 2006-12-28 Sony Corp 可動素子、ならびにその可動素子を内蔵する半導体デバイス、モジュールおよび電子機器
JP4586642B2 (ja) * 2005-06-14 2010-11-24 ソニー株式会社 可動素子、ならびにその可動素子を内蔵する半導体デバイス、モジュールおよび電子機器
US20070126673A1 (en) * 2005-12-07 2007-06-07 Kostadin Djordjev Method and system for writing data to MEMS display elements
US8391630B2 (en) 2005-12-22 2013-03-05 Qualcomm Mems Technologies, Inc. System and method for power reduction when decompressing video streams for interferometric modulator displays
US7916980B2 (en) 2006-01-13 2011-03-29 Qualcomm Mems Technologies, Inc. Interconnect structure for MEMS device
TW200728605A (en) * 2006-01-20 2007-08-01 Univ Tamkang Thermo-buckled micro-actuator unit made of polymer with high thermal expansion coefficient
US8194056B2 (en) 2006-02-09 2012-06-05 Qualcomm Mems Technologies Inc. Method and system for writing data to MEMS display elements
US8049713B2 (en) 2006-04-24 2011-11-01 Qualcomm Mems Technologies, Inc. Power consumption optimized display update
US7702192B2 (en) 2006-06-21 2010-04-20 Qualcomm Mems Technologies, Inc. Systems and methods for driving MEMS display
US7777715B2 (en) 2006-06-29 2010-08-17 Qualcomm Mems Technologies, Inc. Passive circuits for de-multiplexing display inputs
US7724121B2 (en) * 2006-09-07 2010-05-25 Innovative Micro Technology Singly attached MEMS thermal device and method of manufacture
US7724417B2 (en) * 2006-12-19 2010-05-25 Qualcomm Mems Technologies, Inc. MEMS switches with deforming membranes
JP5103951B2 (ja) * 2007-03-08 2012-12-19 ブラザー工業株式会社 駆動装置及び液滴吐出ヘッド
US8022896B2 (en) * 2007-08-08 2011-09-20 Qualcomm Mems Technologies, Inc. ESD protection for MEMS display panels
US8232858B1 (en) * 2008-02-20 2012-07-31 Sandia Corporation Microelectromechanical (MEM) thermal actuator
FR2940503B1 (fr) * 2008-12-23 2011-03-04 Thales Sa Condensateur commute compact mems
US8736590B2 (en) 2009-03-27 2014-05-27 Qualcomm Mems Technologies, Inc. Low voltage driver scheme for interferometric modulators
JP2010243695A (ja) * 2009-04-03 2010-10-28 Konica Minolta Opto Inc アクチュエータ、駆動装置、および撮像装置
US8779886B2 (en) * 2009-11-30 2014-07-15 General Electric Company Switch structures
US8570705B2 (en) 2010-01-15 2013-10-29 Wispry, Inc. MEMS sprung cantilever tunable capacitors and methods
FR2981507B1 (fr) * 2011-10-12 2013-12-06 Commissariat Energie Atomique Dispositif thermoelectrique securise
EP2780925B1 (de) * 2011-12-21 2018-09-05 Siemens Aktiengesellschaft Schütz
CN113213218A (zh) * 2021-05-31 2021-08-06 段中容 一种节能型可降解塑料包装薄膜除尘收卷装置

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4423401A (en) * 1982-07-21 1983-12-27 Tektronix, Inc. Thin-film electrothermal device
DE3809597A1 (de) * 1988-03-22 1989-10-05 Fraunhofer Ges Forschung Mikromechanisches stellelement
DE3814150A1 (de) * 1988-04-27 1989-11-09 Draegerwerk Ag Ventilanordnung aus mikrostrukturierten komponenten
US5058856A (en) * 1991-05-08 1991-10-22 Hewlett-Packard Company Thermally-actuated microminiature valve
US5619061A (en) * 1993-07-27 1997-04-08 Texas Instruments Incorporated Micromechanical microwave switching
US5467068A (en) * 1994-07-07 1995-11-14 Hewlett-Packard Company Micromachined bi-material signal switch
US5619177A (en) * 1995-01-27 1997-04-08 Mjb Company Shape memory alloy microactuator having an electrostatic force and heating means
US5796152A (en) * 1997-01-24 1998-08-18 Roxburgh Ltd. Cantilevered microstructure
FR2766962B1 (fr) * 1997-07-29 1999-10-15 Sgs Thomson Microelectronics Microinterrupteur thermique compatible avec un circuit integre
SE9703969L (sv) * 1997-10-29 1999-04-30 Gert Andersson Anordning för mekanisk omkoppling av signaler
FR2772512B1 (fr) * 1997-12-16 2004-04-16 Commissariat Energie Atomique Microsysteme a element deformable sous l'effet d'un actionneur thermique
US6239685B1 (en) * 1999-10-14 2001-05-29 International Business Machines Corporation Bistable micromechanical switches
US6504447B1 (en) * 1999-10-30 2003-01-07 Hrl Laboratories, Llc Microelectromechanical RF and microwave frequency power limiter and electrostatic device protection
US6262512B1 (en) * 1999-11-08 2001-07-17 Jds Uniphase Inc. Thermally actuated microelectromechanical systems including thermal isolation structures
US6355534B1 (en) * 2000-01-26 2002-03-12 Intel Corporation Variable tunable range MEMS capacitor
US6437965B1 (en) * 2000-11-28 2002-08-20 Harris Corporation Electronic device including multiple capacitance value MEMS capacitor and associated methods
US6418006B1 (en) * 2000-12-20 2002-07-09 The Board Of Trustees Of The University Of Illinois Wide tuning range variable MEMs capacitor

Also Published As

Publication number Publication date
US6703916B2 (en) 2004-03-09
FR2818795B1 (fr) 2003-12-05
DE60126731T2 (de) 2007-11-15
JP4130736B2 (ja) 2008-08-06
EP1220256B1 (de) 2007-02-21
JP2002264090A (ja) 2002-09-18
FR2818795A1 (fr) 2002-06-28
EP1220256A1 (de) 2002-07-03
US20020097133A1 (en) 2002-07-25

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Legal Events

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8364 No opposition during term of opposition