DE60118678T2 - Herstellung von mikro-elektromechanischen Spiegelstrukturen - Google Patents

Herstellung von mikro-elektromechanischen Spiegelstrukturen Download PDF

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Publication number
DE60118678T2
DE60118678T2 DE60118678T DE60118678T DE60118678T2 DE 60118678 T2 DE60118678 T2 DE 60118678T2 DE 60118678 T DE60118678 T DE 60118678T DE 60118678 T DE60118678 T DE 60118678T DE 60118678 T2 DE60118678 T2 DE 60118678T2
Authority
DE
Germany
Prior art keywords
layer
mirror
mask
suspension arms
photoresist
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60118678T
Other languages
German (de)
English (en)
Other versions
DE60118678D1 (de
Inventor
Michel A. San Jose Rosa
Eric Fremont Peeters
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Xerox Corp
Original Assignee
Xerox Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xerox Corp filed Critical Xerox Corp
Publication of DE60118678D1 publication Critical patent/DE60118678D1/de
Application granted granted Critical
Publication of DE60118678T2 publication Critical patent/DE60118678T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G02B6/3518—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/3554—3D constellations, i.e. with switching elements and switched beams located in a volume
    • G02B6/3556—NxM switch, i.e. regular arrays of switches elements of matrix type constellation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/358—Latching of the moving element, i.e. maintaining or holding the moving element in place once operation has been performed; includes a mechanically bistable system
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3584—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S359/00—Optical: systems and elements
    • Y10S359/904—Micromirror

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
DE60118678T 2000-09-28 2001-09-07 Herstellung von mikro-elektromechanischen Spiegelstrukturen Expired - Lifetime DE60118678T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/672,381 US6501588B1 (en) 2000-09-28 2000-09-28 Method for an optical switch on a silicon substrate
US672381 2000-09-28

Publications (2)

Publication Number Publication Date
DE60118678D1 DE60118678D1 (de) 2006-05-24
DE60118678T2 true DE60118678T2 (de) 2006-08-31

Family

ID=24698305

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60118678T Expired - Lifetime DE60118678T2 (de) 2000-09-28 2001-09-07 Herstellung von mikro-elektromechanischen Spiegelstrukturen

Country Status (4)

Country Link
US (1) US6501588B1 (fr)
EP (1) EP1193522B1 (fr)
JP (1) JP2002156592A (fr)
DE (1) DE60118678T2 (fr)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6706202B1 (en) * 2000-09-28 2004-03-16 Xerox Corporation Method for shaped optical MEMS components with stressed thin films
KR100389865B1 (ko) * 2001-03-02 2003-07-04 삼성전자주식회사 마이크로미러 디바이스 및 이를 채용한 프로젝터
US7072090B2 (en) * 2004-04-22 2006-07-04 Micronic Laser Systems Ab Addressing of an SLM
US7356880B2 (en) * 2004-07-26 2008-04-15 Pentax Corporation Hinge structure of micromirror device
US7894174B2 (en) * 2004-08-23 2011-02-22 Monolithic Power Systems, Inc. Method and apparatus for fault detection scheme for cold cathode fluorescent lamp (CCFL) integrated circuits
CN101453818B (zh) 2007-11-29 2014-03-19 杭州茂力半导体技术有限公司 放电灯的电路保护和调节装置
US8851442B2 (en) 2008-01-22 2014-10-07 Honeywell International Inc. Aerogel-bases mold for MEMS fabrication and formation thereof
JP5381801B2 (ja) * 2010-02-23 2014-01-08 セイコーエプソン株式会社 画像形成装置
JP5333286B2 (ja) * 2010-02-23 2013-11-06 セイコーエプソン株式会社 光スキャナーおよび画像形成装置
US10831018B2 (en) * 2017-12-08 2020-11-10 Texas Instruments Incorporated Methods and apparatus for increasing efficiency and optical bandwidth of a microelectromechanical system piston-mode spatial light modulator
CN110954994A (zh) * 2019-12-18 2020-04-03 华中科技大学 一种光开关
JP7459580B2 (ja) * 2020-03-16 2024-04-02 株式会社リコー 可動装置、画像投影装置、ヘッドアップディスプレイ、レーザヘッドランプ、ヘッドマウントディスプレイ、物体認識装置、及び移動体

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0756531B2 (ja) * 1984-07-31 1995-06-14 テキサス インスツルメンツ インコーポレイテツド 空間光変調器とその製法
US6674562B1 (en) * 1994-05-05 2004-01-06 Iridigm Display Corporation Interferometric modulation of radiation
US5673139A (en) * 1993-07-19 1997-09-30 Medcom, Inc. Microelectromechanical television scanning device and method for making the same
JPH0990249A (ja) * 1995-09-25 1997-04-04 Olympus Optical Co Ltd 光偏向子及びその製造方法
JPH1114933A (ja) * 1997-06-24 1999-01-22 Toshiba Corp ガルバノミラーおよびこれを用いた光ディスク装置
JPH1151967A (ja) * 1997-08-08 1999-02-26 Mitsubishi Electric Corp 多軸加速度センサ及びその製造方法
US6091050A (en) * 1997-11-17 2000-07-18 Roxburgh Limited Thermal microplatform
JP2000164105A (ja) * 1998-11-25 2000-06-16 Omron Corp マイクロマシン、マイクロアクチュエータ及びマイクロリレー
JP2000162538A (ja) * 1998-11-30 2000-06-16 Mitsubishi Electric Corp マイクロミラー装置
US6267605B1 (en) * 1999-11-15 2001-07-31 Xerox Corporation Self positioning, passive MEMS mirror structures
US6341039B1 (en) * 2000-03-03 2002-01-22 Axsun Technologies, Inc. Flexible membrane for tunable fabry-perot filter
US6283601B1 (en) * 2000-04-14 2001-09-04 C Speed Corporation Optical mirror system with multi-axis rotational control
US6300665B1 (en) * 2000-09-28 2001-10-09 Xerox Corporation Structure for an optical switch on a silicon on insulator substrate

Also Published As

Publication number Publication date
EP1193522A2 (fr) 2002-04-03
JP2002156592A (ja) 2002-05-31
EP1193522B1 (fr) 2006-04-12
DE60118678D1 (de) 2006-05-24
US6501588B1 (en) 2002-12-31
EP1193522A3 (fr) 2003-05-07

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