Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Interuniversitair Microelektronica Centrum vzw IMEC
Original Assignee
Interuniversitair Microelektronica Centrum vzw IMEC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from EP99870194Aexternal-prioritypatent/EP1087432A1/de
Application filed by Interuniversitair Microelektronica Centrum vzw IMECfiledCriticalInteruniversitair Microelektronica Centrum vzw IMEC
Application grantedgrantedCritical
Publication of DE60036052D1publicationCriticalpatent/DE60036052D1/de
Publication of DE60036052T2publicationCriticalpatent/DE60036052T2/de
DE20006360521999-06-222000-06-22Verbesserung der Qualität einer in einem Plattierungsbad abgeschiedenen metallhaltigen Schicht
Expired - LifetimeDE60036052T2
(de)