DE60035738D1 - Verfahren und Vorrichtung zur Charakterisierung optischer Systeme - Google Patents

Verfahren und Vorrichtung zur Charakterisierung optischer Systeme

Info

Publication number
DE60035738D1
DE60035738D1 DE60035738T DE60035738T DE60035738D1 DE 60035738 D1 DE60035738 D1 DE 60035738D1 DE 60035738 T DE60035738 T DE 60035738T DE 60035738 T DE60035738 T DE 60035738T DE 60035738 D1 DE60035738 D1 DE 60035738D1
Authority
DE
Germany
Prior art keywords
optical systems
characterizing optical
characterizing
systems
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60035738T
Other languages
English (en)
Other versions
DE60035738T2 (de
Inventor
Matthew E Hansen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ASML Holding NV
Original Assignee
ASML Holding NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ASML Holding NV filed Critical ASML Holding NV
Application granted granted Critical
Publication of DE60035738D1 publication Critical patent/DE60035738D1/de
Publication of DE60035738T2 publication Critical patent/DE60035738T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/70591—Testing optical components
    • G03F7/706—Aberration measurement
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/70605—Workpiece metrology
    • G03F7/70616—Monitoring the printed patterns

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Lenses (AREA)
DE60035738T 1999-06-24 2000-06-20 Verfahren und Vorrichtung zur Charakterisierung optischer Systeme Expired - Lifetime DE60035738T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US339506 1999-06-24
US09/339,506 US7016025B1 (en) 1999-06-24 1999-06-24 Method and apparatus for characterization of optical systems

Publications (2)

Publication Number Publication Date
DE60035738D1 true DE60035738D1 (de) 2007-09-13
DE60035738T2 DE60035738T2 (de) 2008-04-30

Family

ID=23329316

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60035738T Expired - Lifetime DE60035738T2 (de) 1999-06-24 2000-06-20 Verfahren und Vorrichtung zur Charakterisierung optischer Systeme

Country Status (6)

Country Link
US (2) US7016025B1 (de)
EP (1) EP1063569B1 (de)
JP (2) JP4220656B2 (de)
KR (1) KR100709922B1 (de)
CA (1) CA2311053A1 (de)
DE (1) DE60035738T2 (de)

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US7016025B1 (en) 1999-06-24 2006-03-21 Asml Holding N.V. Method and apparatus for characterization of optical systems
US7242464B2 (en) * 1999-06-24 2007-07-10 Asml Holdings N.V. Method for characterizing optical systems using holographic reticles
DE10126185B4 (de) * 2001-05-30 2007-07-19 Robert Bosch Gmbh Prüfkörper für optoelektronische Bildanalysesysteme
US6885429B2 (en) * 2002-06-28 2005-04-26 Asml Holding N.V. System and method for automated focus measuring of a lithography tool
US7057715B2 (en) * 2003-06-27 2006-06-06 International Business Machines Corporation Lithography tool test patterns and method
US20050048412A1 (en) * 2003-08-28 2005-03-03 Pary Baluswamy Methods for reducing spherical aberration effects in photolithography
US7113255B2 (en) 2003-12-19 2006-09-26 Asml Holding N.V. Grating patch arrangement, lithographic apparatus, method of testing, device manufacturing method, and device manufactured thereby
US7671979B2 (en) 2004-04-28 2010-03-02 Litel Instruments Apparatus and process for determination of dynamic lens field curvature
US7177012B2 (en) * 2004-10-18 2007-02-13 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
WO2007034379A2 (en) * 2005-09-21 2007-03-29 Koninklijke Philips Electronics, N.V. System for detecting motion of a body
JP2007250947A (ja) * 2006-03-17 2007-09-27 Canon Inc 露光装置および像面検出方法
DE102006056625B4 (de) * 2006-11-30 2014-11-20 Globalfoundries Inc. Verfahren und Teststruktur zum Bestimmen von Fokuseinstellungen in einem Lithographieprozess auf der Grundlage von CD-Messungen
CN100470377C (zh) * 2007-08-22 2009-03-18 中国科学院上海光学精密机械研究所 光刻机投影物镜彗差原位检测系统及检测方法
KR20100087103A (ko) * 2007-09-16 2010-08-03 마하비전 아이엔씨. 주기적 패턴 조명과 ｔｄｉ를 구비한 이미지 측정 시스템
DE102008007319A1 (de) * 2008-02-02 2009-08-06 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
DE102008014898B4 (de) * 2008-03-19 2018-09-27 Siemens Aktiengesellschaft Verfahren zur Steuerung eines mehrphasigen Stromrichters mit verteilten Energiespeichern bei niedrigen Ausgangsfrequenzen
JP5451232B2 (ja) * 2009-07-29 2014-03-26 キヤノン株式会社 評価方法、測定方法、プログラム、露光方法、デバイスの製造方法、測定装置、調整方法、露光装置、処理装置及び処理方法
US20110242520A1 (en) * 2009-11-17 2011-10-06 Nikon Corporation Optical properties measurement method, exposure method and device manufacturing method
KR20140068970A (ko) 2011-08-31 2014-06-09 에이에스엠엘 네델란즈 비.브이. 포커스 보정을 결정하는 방법, 리소그래피 처리 셀 및 디바이스 제조 방법
JP2015062207A (ja) * 2012-01-18 2015-04-02 株式会社ニコン 光学装置および収差測定方法
KR101479249B1 (ko) 2013-11-08 2015-01-05 한국표준과학연구원 간섭성 구조조명 이미징 방법 및 간섭성 구조조명 현미경 시스템
US10714366B2 (en) * 2018-04-12 2020-07-14 Kla-Tencor Corp. Shape metric based scoring of wafer locations
JP7320986B2 (ja) * 2019-05-22 2023-08-04 キヤノン株式会社 露光装置及び物品の製造方法

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US3829219A (en) 1973-03-30 1974-08-13 Itek Corp Shearing interferometer
JPS5567635A (en) 1978-11-15 1980-05-21 Olympus Optical Co Ltd Focus matching detector
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JPH061754B2 (ja) * 1989-09-01 1994-01-05 株式会社日立製作所 パターン露光装置
JPH03155112A (ja) * 1989-11-13 1991-07-03 Nikon Corp 露光条件測定方法
JP2922958B2 (ja) 1990-02-13 1999-07-26 株式会社日立製作所 拡大投影露光方法及びその装置
JPH0478126A (ja) * 1990-07-20 1992-03-12 Canon Inc 自動焦点検出装置
US5128530A (en) 1991-05-28 1992-07-07 Hughes Aircraft Company Piston error estimation method for segmented aperture optical systems while observing arbitrary unknown extended scenes
JPH0728226A (ja) 1993-04-30 1995-01-31 Internatl Business Mach Corp <Ibm> 領域的イメージを測定する装置及び方法
WO1995034800A1 (en) 1994-06-14 1995-12-21 Visionix Ltd. Apparatus for mapping optical elements
JP3297545B2 (ja) 1994-09-02 2002-07-02 キヤノン株式会社 露光条件及び投影光学系の収差測定方法
US5923423A (en) * 1996-09-12 1999-07-13 Sentec Corporation Heterodyne scatterometer for detecting and analyzing wafer surface defects
CA2688799C (en) 1996-11-15 2014-09-30 Marsupial Holdings, Inc. In-line holographic mask for micromachining
JPH10254123A (ja) * 1997-03-10 1998-09-25 Nikon Corp テストパターンが形成されたレチクル
US6257763B1 (en) 1997-04-08 2001-07-10 Huntsman Kcl Corporation Tamper evident zipper slider
US5898479A (en) * 1997-07-10 1999-04-27 Vlsi Technology, Inc. System for monitoring optical properties of photolithography equipment
JP4032501B2 (ja) * 1998-04-22 2008-01-16 株式会社ニコン 投影光学系の結像特性計測方法及び投影露光装置
US6368763B2 (en) * 1998-11-23 2002-04-09 U.S. Philips Corporation Method of detecting aberrations of an optical imaging system
KR100278123B1 (ko) * 1998-11-30 2001-01-15 강성모 보일러의 원격 제어방법 및 그 장치
US7016025B1 (en) 1999-06-24 2006-03-21 Asml Holding N.V. Method and apparatus for characterization of optical systems
US7242464B2 (en) 1999-06-24 2007-07-10 Asml Holdings N.V. Method for characterizing optical systems using holographic reticles
US6360012B1 (en) * 1999-06-25 2002-03-19 Svg Lithography Systems, Inc. In situ projection optic metrology method and apparatus
US6885429B2 (en) 2002-06-28 2005-04-26 Asml Holding N.V. System and method for automated focus measuring of a lithography tool

Also Published As

Publication number Publication date
EP1063569A3 (de) 2004-05-26
DE60035738T2 (de) 2008-04-30
US20040165194A1 (en) 2004-08-26
JP4220656B2 (ja) 2009-02-04
JP4781414B2 (ja) 2011-09-28
US7016025B1 (en) 2006-03-21
JP2009042234A (ja) 2009-02-26
JP2001035785A (ja) 2001-02-09
EP1063569B1 (de) 2007-08-01
CA2311053A1 (en) 2000-12-24
KR100709922B1 (ko) 2007-04-24
KR20010007495A (ko) 2001-01-26
US7081961B2 (en) 2006-07-25
EP1063569A2 (de) 2000-12-27

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