DE60023917D1 - Sensor für ein mikrofluidisches bearbeitungssystem - Google Patents

Sensor für ein mikrofluidisches bearbeitungssystem

Info

Publication number
DE60023917D1
DE60023917D1 DE60023917T DE60023917T DE60023917D1 DE 60023917 D1 DE60023917 D1 DE 60023917D1 DE 60023917 T DE60023917 T DE 60023917T DE 60023917 T DE60023917 T DE 60023917T DE 60023917 D1 DE60023917 D1 DE 60023917D1
Authority
DE
Germany
Prior art keywords
micro
present
cantilevers
bridges
membranes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60023917T
Other languages
English (en)
Other versions
DE60023917T2 (de
Inventor
Hasin Francoisde Charmoy Grey
Tove Maria Henriette Jensenius
Jacob Thaysen
Anja Boisen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nanonord AS
Original Assignee
CANTION AS BROENDBY
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CANTION AS BROENDBY filed Critical CANTION AS BROENDBY
Publication of DE60023917D1 publication Critical patent/DE60023917D1/de
Application granted granted Critical
Publication of DE60023917T2 publication Critical patent/DE60023917T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N11/00—Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N9/00—Investigating density or specific gravity of materials; Analysing materials by determining density or specific gravity
    • G01N9/002—Investigating density or specific gravity of materials; Analysing materials by determining density or specific gravity using variation of the resonant frequency of an element vibrating in contact with the material submitted to analysis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N35/00—Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor
    • G01N2035/00178—Special arrangements of analysers
    • G01N2035/00237—Handling microquantities of analyte, e.g. microvalves, capillary networks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/025—Change of phase or condition
    • G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/04—Wave modes and trajectories
    • G01N2291/042—Wave modes
    • G01N2291/0427—Flexural waves, plate waves, e.g. Lamb waves, tuning fork, cantilever

Landscapes

  • Physics & Mathematics (AREA)
  • Immunology (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Pathology (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • Acoustics & Sound (AREA)
  • Apparatus Associated With Microorganisms And Enzymes (AREA)
  • Micromachines (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • Investigating Or Analyzing Non-Biological Materials By The Use Of Chemical Means (AREA)
  • Measuring Or Testing Involving Enzymes Or Micro-Organisms (AREA)
DE60023917T 1999-05-03 2000-05-03 Sensor für ein mikrofluidisches bearbeitungssystem Expired - Lifetime DE60023917T2 (de)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
DK60199 1999-05-03
DKPA199900601 1999-05-03
US13324099P 1999-05-07 1999-05-07
US133240P 1999-05-07
PCT/DK2000/000224 WO2000066266A1 (en) 1999-05-03 2000-05-03 Sensor for microfluid handling system

Publications (2)

Publication Number Publication Date
DE60023917D1 true DE60023917D1 (de) 2005-12-15
DE60023917T2 DE60023917T2 (de) 2006-07-27

Family

ID=26064291

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60023917T Expired - Lifetime DE60023917T2 (de) 1999-05-03 2000-05-03 Sensor für ein mikrofluidisches bearbeitungssystem

Country Status (7)

Country Link
EP (1) EP1207958B8 (de)
JP (1) JP2002543403A (de)
CN (1) CN1182920C (de)
AT (1) ATE309042T1 (de)
CA (1) CA2372508C (de)
DE (1) DE60023917T2 (de)
WO (1) WO2000066266A1 (de)

Families Citing this family (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10113254A1 (de) 2001-03-19 2002-10-02 Infineon Technologies Ag Mikromechanik-Sensorelement und elektrische Schaltungsanordnung
JP4188087B2 (ja) * 2001-03-23 2008-11-26 シュルンベルジェ ホールディングス リミテッド 流体特性センサー
FR2823998B1 (fr) * 2001-04-25 2004-01-02 Centre Nat Rech Scient Matrice de biocapteurs et son procede de fabrication
US7435578B2 (en) 2001-08-06 2008-10-14 Vanderbilt University Device and methods for monitoring the status of at least one cell
TWI220423B (en) 2001-08-30 2004-08-21 Hrl Lab Llc A method of fabrication of a sensor
US20030062193A1 (en) * 2001-09-07 2003-04-03 Jacob Thaysen Flexible structure with integrated sensor/actuator
US6926864B2 (en) 2001-11-09 2005-08-09 Protiveris Inc Microfluidics apparatus and methods for use thereof
EP1467948A1 (de) * 2002-01-24 2004-10-20 Cantion A/S Sensor
WO2003071258A1 (en) * 2002-02-22 2003-08-28 Cantion A/S Sensor comprising an array of piezoresistors
JP4329322B2 (ja) * 2002-10-04 2009-09-09 ソニー株式会社 相互反応作用検出方法及びバイオアッセイ装置、並びにバイオアッセイ用基板
JP2006512589A (ja) * 2002-12-27 2006-04-13 カンション アクティーゼルスカブ 縦および横の両方向のピエゾ抵抗係数を用いたカンチレバーセンサ
US20060177349A1 (en) * 2003-03-18 2006-08-10 Jacob Thaysen Chemical sensor
AT413767B (de) 2003-03-20 2006-05-15 Avl List Gmbh Verfahren, vorrichtung und sensor zur bestimmung des redoxzustandes eines katalysatormaterials
KR100552696B1 (ko) 2003-11-12 2006-02-20 삼성전자주식회사 발진회로가 적용된 미세 질량 측정 장치 및 방법
KR100613398B1 (ko) * 2003-11-25 2006-08-17 한국과학기술연구원 캔틸레버 센서형 분석 시스템, 제조 방법 및 이를 이용한극미세 물질 감지 방법
GB0328054D0 (en) 2003-12-04 2004-01-07 Council Cent Lab Res Councils Fluid probe
KR100631208B1 (ko) 2004-07-20 2006-10-04 삼성전자주식회사 전자기유도를 이용한 바이오결합 검출장치 및 이를 이용한검출 방법
JP2006214744A (ja) * 2005-02-01 2006-08-17 Gunma Univ バイオセンサ及びバイオセンサチップ
DE102005027788B4 (de) * 2005-06-15 2008-02-14 Technische Universität Kaiserslautern Verfahren und Vorrichtung zur Detektion von Analyten in flüssigen Medien
GB0605273D0 (en) * 2006-03-16 2006-04-26 Council Cent Lab Res Councils Fluid robe
CN103443624A (zh) * 2007-03-26 2013-12-11 纳米系统公司 形成受控单分子层的方法和装置
GB0716202D0 (en) 2007-08-11 2007-09-26 Microvisk Ltd Improved fluid probe
GB0803257D0 (en) 2008-02-22 2008-04-02 Univ Leeds Apparatus for inspection of a fliuid and method
EP2141490B1 (de) * 2008-07-02 2015-04-01 Stichting IMEC Nederland Chemische Messvorrichtung mit Mikroausleger
DE102008039624B4 (de) * 2008-08-25 2010-05-20 Kist-Europe Forschungsgesellschaft Mbh MIP-Nanopartikel-Chipsensor, dessen Verwendung und analytisches Nachweisverfahren
EP2336755A1 (de) 2009-12-11 2011-06-22 Honeywell Romania SRL SO2-Detektion unter Verwendung von Differenznanoresonatoren und damit zusammenhängende Verfahren
EP2461159B1 (de) * 2010-12-02 2017-10-25 Honeywell Romania S.R.L. Verfahren zur Herstellung von funktionalisierten, resonanten Cantilever-Sensoren
GB2491806B (en) * 2011-05-25 2013-07-10 Microvisk Ltd Apparatus and method for measuring properties of a fluid
US20140287403A1 (en) * 2011-10-14 2014-09-25 Ecole Polytechnique Federale De Lausanne (Epfl) Nanoscale motion detector
US9140684B2 (en) 2011-10-27 2015-09-22 University Of Washington Through Its Center For Commercialization Device to expose cells to fluid shear forces and associated systems and methods
CA2872731A1 (en) * 2012-05-10 2013-11-14 University Of Washington Through Its Center For Commercialization Microfluidic devices for measuring platelet coagulation, and associated systems and methods
KR102387367B1 (ko) * 2017-09-01 2022-04-14 엠쥐아이 테크 컴퍼니 엘티디. 실리콘 기반 센서와 통합된 사출 성형된 미세유체／유체 카트리지
CN111351733A (zh) * 2020-03-12 2020-06-30 中国科学院上海微系统与信息技术研究所 一种高精度热重分析仪
CN114534801B (zh) * 2020-11-25 2024-03-26 京东方科技集团股份有限公司 一种微流控器件、微流控系统、及液滴质量检测方法
DE102022121188B3 (de) * 2022-08-22 2024-01-18 digid GmbH Sensor zur Umwandlung chemischer und/oder biochemischer Information eines Analyten
CN117269323B (zh) * 2023-11-23 2024-02-13 吉林大学 一种液体中磁性悬浮物微谐振式质量传感器及检测方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1180914A (en) * 1981-08-17 1985-01-15 James M. O'connor Micromechanical chemical sensor
US6123819A (en) * 1997-11-12 2000-09-26 Protiveris, Inc. Nanoelectrode arrays
GB9801286D0 (en) * 1998-01-21 1998-03-18 Univ Cambridge Tech Sensor

Also Published As

Publication number Publication date
ATE309042T1 (de) 2005-11-15
EP1207958B8 (de) 2006-01-18
CA2372508C (en) 2009-09-29
CN1360521A (zh) 2002-07-24
JP2002543403A (ja) 2002-12-17
CN1182920C (zh) 2005-01-05
DE60023917T2 (de) 2006-07-27
CA2372508A1 (en) 2000-11-09
WO2000066266A1 (en) 2000-11-09
EP1207958B1 (de) 2005-11-09
EP1207958A1 (de) 2002-05-29

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Legal Events

Date Code Title Description
8327 Change in the person/name/address of the patent owner

Owner name: CANTION A/S, LYNGBY, DK

8327 Change in the person/name/address of the patent owner

Owner name: NANONORD A/S, AALBORG, DK

8364 No opposition during term of opposition