DE60021212T2 - Hydrofluorether als wärmeübertragungsflüssigkeit - Google Patents

Hydrofluorether als wärmeübertragungsflüssigkeit Download PDF

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Publication number
DE60021212T2
DE60021212T2 DE60021212T DE60021212T DE60021212T2 DE 60021212 T2 DE60021212 T2 DE 60021212T2 DE 60021212 T DE60021212 T DE 60021212T DE 60021212 T DE60021212 T DE 60021212T DE 60021212 T2 DE60021212 T2 DE 60021212T2
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DE
Germany
Prior art keywords
heat transfer
temperature
heat
transfer fluid
fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60021212T
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German (de)
English (en)
Other versions
DE60021212D1 (de
Inventor
A. Lew TOUSIGNANT
E. Phillip TUMA
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
3M Innovative Properties Co
Original Assignee
3M Innovative Properties Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 3M Innovative Properties Co filed Critical 3M Innovative Properties Co
Publication of DE60021212D1 publication Critical patent/DE60021212D1/de
Application granted granted Critical
Publication of DE60021212T2 publication Critical patent/DE60021212T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09KMATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K5/00Heat-transfer, heat-exchange or heat-storage materials, e.g. refrigerants; Materials for the production of heat or cold by chemical reactions other than by combustion
    • C09K5/08Materials not undergoing a change of physical state when used
    • C09K5/10Liquid materials
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04Apparatus for manufacture or treatment
    • H10P72/0431Apparatus for thermal treatment
    • CCHEMISTRY; METALLURGY
    • C07ORGANIC CHEMISTRY
    • C07CACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C19/00Acyclic saturated compounds containing halogen atoms
    • C07C19/08Acyclic saturated compounds containing halogen atoms containing fluorine
    • CCHEMISTRY; METALLURGY
    • C07ORGANIC CHEMISTRY
    • C07CACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C43/00Ethers; Compounds having groups, groups or groups
    • C07C43/02Ethers
    • C07C43/03Ethers having all ether-oxygen atoms bound to acyclic carbon atoms
    • C07C43/04Saturated ethers
    • C07C43/12Saturated ethers containing halogen

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Combustion & Propulsion (AREA)
  • Thermal Sciences (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Lubricants (AREA)
DE60021212T 1999-10-08 2000-09-29 Hydrofluorether als wärmeübertragungsflüssigkeit Expired - Lifetime DE60021212T2 (de)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US15869799P 1999-10-08 1999-10-08
US158697P 1999-10-08
US661935 2000-09-14
US09/661,935 US6374907B1 (en) 1999-10-08 2000-09-14 Hydrofluoroether as a heat-transfer fluid
PCT/US2000/026968 WO2001027217A1 (en) 1999-10-08 2000-09-29 Hydrofluoroether as a heat-transfer fluid

Publications (2)

Publication Number Publication Date
DE60021212D1 DE60021212D1 (de) 2005-08-11
DE60021212T2 true DE60021212T2 (de) 2006-05-18

Family

ID=26855295

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60021212T Expired - Lifetime DE60021212T2 (de) 1999-10-08 2000-09-29 Hydrofluorether als wärmeübertragungsflüssigkeit

Country Status (7)

Country Link
US (1) US6374907B1 (https=)
EP (1) EP1261676B1 (https=)
JP (1) JP2003526906A (https=)
KR (1) KR100669264B1 (https=)
AU (1) AU7741500A (https=)
DE (1) DE60021212T2 (https=)
WO (1) WO2001027217A1 (https=)

Families Citing this family (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001038811A1 (en) 1999-11-26 2001-05-31 Nkk Corporation Thermal storage material using hydrate and thermal storage device therefor, and production method of the thermal storage material
EP1306417B1 (en) * 2001-10-23 2012-08-01 Solvay Specialty Polymers Italy S.p.A. Use of fluorinated liquids for the heat exchange or as working fluids in the presence of ionizing radiations and/or irradiation with neutrons
EP1510763B1 (en) * 2002-05-31 2012-02-01 JFE Engineering Corporation Apparatus for producing hydrate slurry
WO2005007771A1 (en) * 2003-07-23 2005-01-27 Dupont Canada Inc. Coolant liquids having a low dielectric constant and high resistivity for use in fuel cells & other electrochemical reactor stacks
WO2005008819A2 (en) * 2003-07-23 2005-01-27 Dupont Canada Inc. Evaporative coolants having low dielectric constant for use in fuel cells & other electrochemical reactor stacks
US7128133B2 (en) * 2003-12-16 2006-10-31 3M Innovative Properties Company Hydrofluoroether as a heat-transfer fluid
US6953082B2 (en) * 2003-12-16 2005-10-11 3M Innovative Properties Company Hydrofluoroether as a heat-transfer fluid
US7055579B2 (en) * 2003-12-16 2006-06-06 3M Innovative Properties Company Hydrofluoroether as a heat-transfer fluid
US7788939B2 (en) 2004-07-15 2010-09-07 Parker-Hannifin Corporation Azeotrope spray cooling system
US7428816B2 (en) * 2004-07-16 2008-09-30 Honeywell International Inc. Working fluids for thermal energy conversion of waste heat from fuel cells using Rankine cycle systems
US7338575B2 (en) * 2004-09-10 2008-03-04 Axcelis Technologies, Inc. Hydrocarbon dielectric heat transfer fluids for microwave plasma generators
EP1655358A1 (de) * 2004-11-04 2006-05-10 Solvay Fluor GmbH Arbeitsfluid zur Wärmeübertragung
US7691282B2 (en) 2005-09-08 2010-04-06 3M Innovative Properties Company Hydrofluoroether compounds and processes for their preparation and use
US7385089B2 (en) * 2005-12-23 2008-06-10 3M Innovative Properties Company Fluorochemical ketone compounds and processes for their use
ITMI20060381A1 (it) 2006-03-02 2007-09-03 Solvay Solexis Spa Fluidi di scambio termico
US8791254B2 (en) * 2006-05-19 2014-07-29 3M Innovative Properties Company Cyclic hydrofluoroether compounds and processes for their preparation and use
US8193397B2 (en) * 2006-12-06 2012-06-05 3M Innovative Properties Company Hydrofluoroether compounds and processes for their preparation and use
US8905124B2 (en) * 2007-06-27 2014-12-09 Taiwan Semiconductor Manufacturing Company, Ltd. Temperature controlled loadlock chamber
US20090176148A1 (en) * 2008-01-04 2009-07-09 3M Innovative Properties Company Thermal management of electrochemical cells
US8003004B2 (en) * 2008-01-23 2011-08-23 3M Innovative Properties Company Heat transfer apparatus and methods including hydrofluorocarbonates
US20090269521A1 (en) * 2008-04-24 2009-10-29 3M Innovative Properties Company Porous structured thermal transfer article
US8071816B2 (en) * 2008-06-30 2011-12-06 3M Innovative Properties Company Hydrofluoroacetal compounds and processes for their preparation and use
US20100263885A1 (en) * 2009-04-21 2010-10-21 3M Innovative Properties Company Protection systems and methods for electronic devices
US9010318B2 (en) 2009-09-04 2015-04-21 Wisconsin Alumni Research Foundation Extended-range heat transfer fluid using variable composition
US8323524B2 (en) * 2009-10-01 2012-12-04 3M Innovative Properties Company Apparatus including hydrofluoroether with high temperature stability and uses thereof
US8193393B2 (en) * 2010-03-26 2012-06-05 3M Innovative Properties Company Fluoroether diketones for high temperature heat transfer
US8535559B2 (en) * 2010-03-26 2013-09-17 3M Innovative Properties Company Nitrogen-containing fluoroketones for high temperature heat transfer
EP2718253B1 (en) 2011-06-10 2020-09-09 3M Innovative Properties Company Partially fluorinated ketones and methods of making and using the same
DE102012221923A1 (de) * 2012-11-29 2014-06-05 Carl Zeiss Smt Gmbh Kühlsystem für zumindest eine Systemkomponente eines optischen Systems für EUV-Anwendungen sowie derartige Systemkomponente und derartiges optisches System
KR102341140B1 (ko) 2013-07-25 2021-12-21 쓰리엠 이노베이티브 프로퍼티즈 컴파니 질소 함유 하이드로플루오로에테르 및 이의 제조 방법
CN106574172B (zh) 2014-07-16 2018-11-02 3M创新有限公司 氢氟醚烯烃及其使用方法
CN105457575B (zh) * 2014-09-12 2017-06-06 张宝权 氯化物成品质量控制工艺
WO2016064585A1 (en) 2014-10-24 2016-04-28 3M Innovative Properties Company Segregated fluorinated esters
JP6971253B2 (ja) 2017-03-21 2021-11-24 スリーエム イノベイティブ プロパティズ カンパニー 熱伝達流体及び同流体の使用方法
FR3083800B1 (fr) * 2018-07-13 2020-12-25 Total Marketing Services Composition refroidissante et ignifugeante pour systeme de propulsion d'un vehicule electrique ou hybride
FR3094744B1 (fr) * 2019-04-03 2021-12-10 Safran Nacelles Fluide caloporteur pour système de refroidissement de turboréacteur pour aéronef
CA3153966A1 (en) * 2019-10-28 2021-05-06 The Chemours Company Fc, Llc Heat transfer fluids for use in low temperature chiller applications

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1993011201A1 (en) * 1991-12-03 1993-06-10 United States Environmental Protection Agency Refrigerant compositions and processes for using same
DE4305239A1 (de) 1993-02-20 1994-08-25 Hoechst Ag Verwendung von weitgehend fluorierten Verbindungen als Wärmeträger
CA2129380A1 (en) * 1993-08-11 1995-02-12 Kenichi Sanechika Lubricant oil composition comprising a fluorine-containing aromatic compound and an alkyl- or alkyl derivative-substituted aromatic compound, and a refrigerant composition containing the same
US5737923A (en) * 1995-10-17 1998-04-14 Marlow Industries, Inc. Thermoelectric device with evaporating/condensing heat exchanger
CA2233874A1 (en) * 1995-10-20 1997-04-24 Gregory J. Sherwood Hydrofluoroethers as low temperature refrigerants
US6023002A (en) 1998-01-26 2000-02-08 3M Innovative Properties Company Process for preparing hydrofluoroethers

Also Published As

Publication number Publication date
EP1261676A1 (en) 2002-12-04
WO2001027217A1 (en) 2001-04-19
DE60021212D1 (de) 2005-08-11
JP2003526906A (ja) 2003-09-09
EP1261676B1 (en) 2005-07-06
US6374907B1 (en) 2002-04-23
KR20020042859A (ko) 2002-06-07
KR100669264B1 (ko) 2007-01-17
AU7741500A (en) 2001-04-23

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