DE60018389D1 - Senkrecht detektierendes fluxgate-mikromagnetometer und verfahren zu seiner herstellung - Google Patents

Senkrecht detektierendes fluxgate-mikromagnetometer und verfahren zu seiner herstellung

Info

Publication number
DE60018389D1
DE60018389D1 DE60018389T DE60018389T DE60018389D1 DE 60018389 D1 DE60018389 D1 DE 60018389D1 DE 60018389 T DE60018389 T DE 60018389T DE 60018389 T DE60018389 T DE 60018389T DE 60018389 D1 DE60018389 D1 DE 60018389D1
Authority
DE
Germany
Prior art keywords
micromagnetometer
fluxgate
production
vertical detecting
detecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60018389T
Other languages
English (en)
Other versions
DE60018389T2 (de
Inventor
Jean-Marc Fedeli
Robert Cuchet
Denis Duret
Pierre Gaud
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Application granted granted Critical
Publication of DE60018389D1 publication Critical patent/DE60018389D1/de
Publication of DE60018389T2 publication Critical patent/DE60018389T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/0206—Three-component magnetometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/04—Measuring direction or magnitude of magnetic fields or magnetic flux using the flux-gate principle

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Magnetic Variables (AREA)
DE60018389T 1999-12-17 2000-12-14 Senkrecht detektierendes fluxgate-mikromagnetometer und verfahren zu seiner herstellung Expired - Lifetime DE60018389T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR9915961A FR2802649B1 (fr) 1999-12-17 1999-12-17 Micromagnetometre a porte de flux a detection perpendiculaire et son procede de realisation
FR9915961 1999-12-17
PCT/FR2000/003521 WO2001044826A1 (fr) 1999-12-17 2000-12-14 Micromagnetometre a porte de flux a detection perpendiculaire et son procede de realisation

Publications (2)

Publication Number Publication Date
DE60018389D1 true DE60018389D1 (de) 2005-04-07
DE60018389T2 DE60018389T2 (de) 2005-12-29

Family

ID=9553399

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60018389T Expired - Lifetime DE60018389T2 (de) 1999-12-17 2000-12-14 Senkrecht detektierendes fluxgate-mikromagnetometer und verfahren zu seiner herstellung

Country Status (5)

Country Link
US (1) US6690164B1 (de)
EP (1) EP1153312B1 (de)
DE (1) DE60018389T2 (de)
FR (1) FR2802649B1 (de)
WO (1) WO2001044826A1 (de)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1260825A1 (de) 2001-05-25 2002-11-27 Sentron Ag Magnetfeldsensor
KR100464093B1 (ko) * 2002-03-13 2005-01-03 삼성전기주식회사 인쇄회로기판에 집적된 자계검출소자 및 그 제조방법
KR100464097B1 (ko) * 2002-03-14 2005-01-03 삼성전자주식회사 반도체기판에 집적된 자계검출소자 및 그 제조방법
KR100481552B1 (ko) * 2002-07-30 2005-04-07 삼성전기주식회사 2축 자계검출소자가 집적된 인쇄회로기판 및 그 제조방법
KR100494472B1 (ko) * 2002-12-31 2005-06-10 삼성전기주식회사 인쇄회로기판 기술을 이용한 미약자계 감지용 센서 및 그제조 방법
KR100544475B1 (ko) * 2003-01-25 2006-01-24 삼성전자주식회사 반도체기판에 집적된 자계검출소자 및 그 제조방법
KR100503455B1 (ko) * 2003-06-04 2005-07-25 삼성전자주식회사 아몰포스 자성코어를 사용하여 제조된 마이크로플럭스게이트 센서 및 그 제조 방법
DE102005032145A1 (de) * 2005-07-07 2007-01-11 Zf Friedrichshafen Ag Gelenk für ein Kraftfahrzeug
CZ301546B6 (cs) * 2005-07-07 2010-04-14 Ceské vysoké ucení technické v Praze, Fakulta elektrotechnická Feromagnetická sonda
EP1746430A1 (de) * 2005-07-22 2007-01-24 Liaisons Electroniques-Mecaniques Lem S.A. Orthogonale Fluxgate-Magnetfeldsensor
EP2013925A4 (de) * 2006-04-28 2012-01-04 Microgate Inc Dünnfilm-dreiachsen-fluxgate und implementierungsverfarhen dafür
FR2900735B1 (fr) * 2006-05-04 2008-08-22 Commissariat Energie Atomique Micromagnetometre de type fluxgate a bobinage d'excitation ameliore
US7605580B2 (en) * 2007-06-29 2009-10-20 Infineon Technologies Austria Ag Integrated hybrid current sensor
US20090256687A1 (en) * 2008-04-11 2009-10-15 William French Magnetic field guard rings
US9859043B2 (en) * 2008-07-11 2018-01-02 Cooper Technologies Company Magnetic components and methods of manufacturing the same
US20100301987A1 (en) * 2009-05-27 2010-12-02 Stmicroelectronics S.A. Millimeter wave transformer with a high transformation factor and a low insertion loss
US8803515B2 (en) 2010-02-10 2014-08-12 Jentek Sensors, Inc. Durability enhanced and redundant embedded sensors
FR2959570B1 (fr) 2010-04-29 2012-11-02 Commissariat Energie Atomique Magnetometre a porte de flux et procede de fabrication de ce magnetometre
FR2979791B1 (fr) 2011-09-07 2013-10-11 Commissariat Energie Atomique Anneau magnetique bobine
FR2979788B1 (fr) 2011-09-07 2013-10-11 Commissariat Energie Atomique Circuit imprime
FR2979789A1 (fr) 2011-09-07 2013-03-08 Commissariat Energie Atomique Circuit imprime comportant deux bobines
KR102198528B1 (ko) * 2015-05-19 2021-01-06 삼성전기주식회사 코일 전자부품 및 그 제조방법

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2321355A (en) * 1942-01-15 1943-06-08 Waugh Equipment Co Surgical probe for locating foreign metal particles in body tissue
GB721731A (en) * 1949-10-28 1955-01-12 Mini Of Supply Improvements in the production of magnetic fluxgates
US2971151A (en) * 1958-02-14 1961-02-07 Souare D Company Metal detectors
CA1208292A (en) * 1982-08-27 1986-07-22 Malcolm E. Bell Magnetometer with precision aligned sensors
US5199178A (en) * 1991-10-23 1993-04-06 Apac, Inc. Thin film compass and method for manufacturing the same
US5479099A (en) * 1993-10-18 1995-12-26 Iowa State University Research Foundation, Inc. Magnetic inspection head suited for contoured or irregular surfaces
KR100468833B1 (ko) * 1998-07-28 2005-03-16 삼성전자주식회사 차동스파이어럴형자계검출소자및이를채용한자계검출모듈

Also Published As

Publication number Publication date
WO2001044826A1 (fr) 2001-06-21
EP1153312B1 (de) 2005-03-02
DE60018389T2 (de) 2005-12-29
US6690164B1 (en) 2004-02-10
EP1153312A1 (de) 2001-11-14
FR2802649A1 (fr) 2001-06-22
FR2802649B1 (fr) 2002-02-08

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Legal Events

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8364 No opposition during term of opposition