DE60016040T2 - Positionsdetektoreinrichtung mit variabler reaktanz - Google Patents

Positionsdetektoreinrichtung mit variabler reaktanz Download PDF

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Publication number
DE60016040T2
DE60016040T2 DE60016040T DE60016040T DE60016040T2 DE 60016040 T2 DE60016040 T2 DE 60016040T2 DE 60016040 T DE60016040 T DE 60016040T DE 60016040 T DE60016040 T DE 60016040T DE 60016040 T2 DE60016040 T2 DE 60016040T2
Authority
DE
Germany
Prior art keywords
transducer
sensor
inductor
circuit
driver circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE60016040T
Other languages
German (de)
English (en)
Other versions
DE60016040D1 (de
Inventor
B. Michael NUSSBAUM
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Novanta Inc
Original Assignee
GSI Lumonics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by GSI Lumonics Inc filed Critical GSI Lumonics Inc
Application granted granted Critical
Publication of DE60016040D1 publication Critical patent/DE60016040D1/de
Publication of DE60016040T2 publication Critical patent/DE60016040T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R29/00—Arrangements for measuring or indicating electric quantities not covered by groups G01R19/00 - G01R27/00
    • G01R29/26—Measuring noise figure; Measuring signal-to-noise ratio

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Measuring Instrument Details And Bridges, And Automatic Balancing Devices (AREA)
  • Geophysics And Detection Of Objects (AREA)
DE60016040T 1999-12-30 2000-07-26 Positionsdetektoreinrichtung mit variabler reaktanz Expired - Fee Related DE60016040T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/475,960 US6486683B1 (en) 1999-12-30 1999-12-30 Variable reactance position detector
US475960 1999-12-30
PCT/US2000/020681 WO2001050093A1 (en) 1999-12-30 2000-07-26 Variable reactance position detector

Publications (2)

Publication Number Publication Date
DE60016040D1 DE60016040D1 (de) 2004-12-23
DE60016040T2 true DE60016040T2 (de) 2005-03-31

Family

ID=23889910

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60016040T Expired - Fee Related DE60016040T2 (de) 1999-12-30 2000-07-26 Positionsdetektoreinrichtung mit variabler reaktanz

Country Status (6)

Country Link
US (1) US6486683B1 (enExample)
EP (1) EP1250568B1 (enExample)
JP (1) JP2003519374A (enExample)
AT (1) ATE282816T1 (enExample)
DE (1) DE60016040T2 (enExample)
WO (1) WO2001050093A1 (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2385946A (en) * 2002-02-28 2003-09-03 Bookham Technology Plc Micro electro mechanical system
US7005864B2 (en) * 2002-10-21 2006-02-28 Synchrony, Inc. Capacitive position sensing system with resonant amplification
JP4391093B2 (ja) * 2003-01-20 2009-12-24 日立ビアメカニクス株式会社 スキャナ装置およびレーザ加工機
AU2009251484B2 (en) 2008-04-17 2011-12-15 Synchrony, Inc. High-speed permanent magnet motor and generator with low-loss metal rotor
AU2009246773A1 (en) 2008-04-18 2009-11-19 Synchrony, Inc. Magnetic thrust bearing with integrated electronics
US9583991B2 (en) 2009-06-24 2017-02-28 Synchrony, Inc. Systems, devices, and/or methods for managing magnetic bearings
EP2586121B1 (en) 2010-06-23 2019-12-11 Synchrony, Inc. Split magnetic thrust bearing
CN102506945B (zh) * 2011-10-18 2013-05-15 潘兆铿 轴流阻抗式水流量传感器
CN112904093B (zh) * 2019-11-19 2022-03-25 北京铁路信号有限公司 一种相位模拟设备

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4864295A (en) * 1988-06-30 1989-09-05 Cambridge Technology, Inc. Capacitance sensing system using multiple capacitances to sense rotary motion
US5392657A (en) * 1991-02-13 1995-02-28 Onicon Incorporated Flow sensor having high impedance circuit with capacitive sensing electrode
US5381698A (en) * 1992-04-06 1995-01-17 Onicon Inc. Flow-responsive apparatus
US5537109A (en) 1993-05-28 1996-07-16 General Scanning, Inc. Capacitive transducing with feedback

Also Published As

Publication number Publication date
EP1250568B1 (en) 2004-11-17
ATE282816T1 (de) 2004-12-15
US6486683B1 (en) 2002-11-26
JP2003519374A (ja) 2003-06-17
EP1250568A1 (en) 2002-10-23
DE60016040D1 (de) 2004-12-23
WO2001050093A1 (en) 2001-07-12

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee