DE60012518D1 - Herstellung einer selbst-justierten Doppel-Damaszener-Verbindung - Google Patents
Herstellung einer selbst-justierten Doppel-Damaszener-VerbindungInfo
- Publication number
- DE60012518D1 DE60012518D1 DE60012518T DE60012518T DE60012518D1 DE 60012518 D1 DE60012518 D1 DE 60012518D1 DE 60012518 T DE60012518 T DE 60012518T DE 60012518 T DE60012518 T DE 60012518T DE 60012518 D1 DE60012518 D1 DE 60012518D1
- Authority
- DE
- Germany
- Prior art keywords
- establishment
- self
- double damascene
- adjusted double
- connection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76802—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics
- H01L21/76807—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics for dual damascene structures
- H01L21/76808—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics for dual damascene structures involving intermediate temporary filling with material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76802—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76802—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics
- H01L21/76804—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics by forming tapered via holes
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP20000118804 EP1184903B1 (de) | 2000-08-30 | 2000-08-30 | Herstellung einer selbst-justierten Doppel-Damaszener-Verbindung |
Publications (2)
Publication Number | Publication Date |
---|---|
DE60012518D1 true DE60012518D1 (de) | 2004-09-02 |
DE60012518T2 DE60012518T2 (de) | 2005-07-28 |
Family
ID=8169698
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE2000612518 Expired - Fee Related DE60012518T2 (de) | 2000-08-30 | 2000-08-30 | Herstellung einer selbst-justierten Doppel-Damaszener-Verbindung |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP1184903B1 (de) |
DE (1) | DE60012518T2 (de) |
TW (1) | TW507324B (de) |
WO (1) | WO2002019417A1 (de) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7119010B2 (en) * | 2002-04-23 | 2006-10-10 | Chartered Semiconductor Manfacturing Ltd. | Integrated circuit with self-aligned line and via and manufacturing method therefor |
DE10240099A1 (de) | 2002-08-30 | 2004-03-11 | Infineon Technologies Ag | Herstellungsverfahren für eine Halbleiterstruktur |
JP5488603B2 (ja) | 2009-08-14 | 2014-05-14 | 富士通セミコンダクター株式会社 | 半導体装置の製造方法 |
TWI502627B (zh) * | 2013-06-03 | 2015-10-01 | Winbond Electronics Corp | 溝槽之製造方法 |
CN104241189B (zh) * | 2013-06-13 | 2017-09-26 | 华邦电子股份有限公司 | 沟槽的制造方法 |
US9418886B1 (en) * | 2015-07-24 | 2016-08-16 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method of forming conductive features |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2738682B2 (ja) * | 1987-04-28 | 1998-04-08 | 松下電器産業株式会社 | 配線形成方法 |
US5614765A (en) * | 1995-06-07 | 1997-03-25 | Advanced Micro Devices, Inc. | Self aligned via dual damascene |
KR0179292B1 (ko) * | 1996-04-12 | 1999-04-15 | 문정환 | 반도체소자의 다층배선 형성방법 |
US5933761A (en) * | 1998-02-09 | 1999-08-03 | Lee; Ellis | Dual damascene structure and its manufacturing method |
TW410455B (en) * | 1998-02-16 | 2000-11-01 | United Microelectronics Corp | Forming method for dual damascene structure |
-
2000
- 2000-08-30 DE DE2000612518 patent/DE60012518T2/de not_active Expired - Fee Related
- 2000-08-30 EP EP20000118804 patent/EP1184903B1/de not_active Expired - Lifetime
-
2001
- 2001-08-27 WO PCT/IB2001/001563 patent/WO2002019417A1/en active Search and Examination
- 2001-09-07 TW TW90122233A patent/TW507324B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
WO2002019417A1 (en) | 2002-03-07 |
DE60012518T2 (de) | 2005-07-28 |
EP1184903B1 (de) | 2004-07-28 |
TW507324B (en) | 2002-10-21 |
EP1184903A1 (de) | 2002-03-06 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: FREESCALE SEMICONDUCTOR, INC., AUSTIN, TEX., US |
|
8339 | Ceased/non-payment of the annual fee |