DE59501491D1 - Mikromechanisches elektrostatisches Relais - Google Patents

Mikromechanisches elektrostatisches Relais

Info

Publication number
DE59501491D1
DE59501491D1 DE59501491T DE59501491T DE59501491D1 DE 59501491 D1 DE59501491 D1 DE 59501491D1 DE 59501491 T DE59501491 T DE 59501491T DE 59501491 T DE59501491 T DE 59501491T DE 59501491 D1 DE59501491 D1 DE 59501491D1
Authority
DE
Germany
Prior art keywords
electrostatic relay
micromechanical electrostatic
micromechanical
relay
electrostatic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE59501491T
Other languages
English (en)
Inventor
Lothar Prof Dr Kiesewetter
Joachim Schimkat
Helmut Dr Schlaak
Hans-Juergen Prof Dr Gevatter
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Application granted granted Critical
Publication of DE59501491D1 publication Critical patent/DE59501491D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H01H2059/0081—Electrostatic relays; Electro-adhesion relays making use of micromechanics with a tapered air-gap between fixed and movable electrodes
DE59501491T 1994-10-18 1995-10-04 Mikromechanisches elektrostatisches Relais Expired - Fee Related DE59501491D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE4437261A DE4437261C1 (de) 1994-10-18 1994-10-18 Mikromechanisches elektrostatisches Relais

Publications (1)

Publication Number Publication Date
DE59501491D1 true DE59501491D1 (de) 1998-04-02

Family

ID=6531106

Family Applications (2)

Application Number Title Priority Date Filing Date
DE4437261A Expired - Fee Related DE4437261C1 (de) 1994-10-18 1994-10-18 Mikromechanisches elektrostatisches Relais
DE59501491T Expired - Fee Related DE59501491D1 (de) 1994-10-18 1995-10-04 Mikromechanisches elektrostatisches Relais

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE4437261A Expired - Fee Related DE4437261C1 (de) 1994-10-18 1994-10-18 Mikromechanisches elektrostatisches Relais

Country Status (4)

Country Link
US (1) US5629565A (de)
EP (1) EP0713235B1 (de)
JP (1) JPH08255546A (de)
DE (2) DE4437261C1 (de)

Families Citing this family (51)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6043563A (en) * 1997-05-06 2000-03-28 Formfactor, Inc. Electronic components with terminals and spring contact elements extending from areas which are remote from the terminals
DE29613790U1 (de) * 1996-08-09 1996-09-26 Festo Kg Mikroschalter
DE19646667C2 (de) * 1996-11-12 1998-11-12 Fraunhofer Ges Forschung Verfahren zum Herstellen eines mikromechanischen Relais
DE19730715C1 (de) * 1996-11-12 1998-11-26 Fraunhofer Ges Forschung Verfahren zum Herstellen eines mikromechanischen Relais
DE19736674C1 (de) 1997-08-22 1998-11-26 Siemens Ag Mikromechanisches elektrostatisches Relais und Verfahren zu dessen Herstellung
JP3493974B2 (ja) * 1997-10-01 2004-02-03 オムロン株式会社 静電マイクロリレー
US6115231A (en) * 1997-11-25 2000-09-05 Tdk Corporation Electrostatic relay
US6054659A (en) * 1998-03-09 2000-04-25 General Motors Corporation Integrated electrostatically-actuated micromachined all-metal micro-relays
US6320145B1 (en) * 1998-03-31 2001-11-20 California Institute Of Technology Fabricating and using a micromachined magnetostatic relay or switch
US6046659A (en) * 1998-05-15 2000-04-04 Hughes Electronics Corporation Design and fabrication of broadband surface-micromachined micro-electro-mechanical switches for microwave and millimeter-wave applications
DE19823690C1 (de) * 1998-05-27 2000-01-05 Siemens Ag Mikromechanisches elektrostatisches Relais
US6535722B1 (en) 1998-07-09 2003-03-18 Sarnoff Corporation Television tuner employing micro-electro-mechanically-switched tuning matrix
US6180975B1 (en) * 1998-10-30 2001-01-30 International Business Machines Corporation Depletion strap semiconductor memory device
EP1166352B1 (de) * 1999-02-04 2008-04-09 Institute of Microelectronics Mikro-relais
US6236491B1 (en) 1999-05-27 2001-05-22 Mcnc Micromachined electrostatic actuator with air gap
US6057520A (en) * 1999-06-30 2000-05-02 Mcnc Arc resistant high voltage micromachined electrostatic switch
US6229683B1 (en) 1999-06-30 2001-05-08 Mcnc High voltage micromachined electrostatic switch
DE19935819B4 (de) * 1999-07-29 2004-08-05 Tyco Electronics Logistics Ag Relais und Verfahren zu dessen Herstellung
US6275320B1 (en) 1999-09-27 2001-08-14 Jds Uniphase, Inc. MEMS variable optical attenuator
US6373682B1 (en) 1999-12-15 2002-04-16 Mcnc Electrostatically controlled variable capacitor
US6388359B1 (en) * 2000-03-03 2002-05-14 Optical Coating Laboratory, Inc. Method of actuating MEMS switches
US6396677B1 (en) * 2000-05-17 2002-05-28 Xerox Corporation Photolithographically-patterned variable capacitor structures and method of making
US6407478B1 (en) * 2000-08-21 2002-06-18 Jds Uniphase Corporation Switches and switching arrays that use microelectromechanical devices having one or more beam members that are responsive to temperature
JP2002075156A (ja) 2000-09-01 2002-03-15 Nec Corp マイクロスイッチおよびその製造方法
US6485273B1 (en) 2000-09-01 2002-11-26 Mcnc Distributed MEMS electrostatic pumping devices
US6590267B1 (en) 2000-09-14 2003-07-08 Mcnc Microelectromechanical flexible membrane electrostatic valve device and related fabrication methods
US6377438B1 (en) 2000-10-23 2002-04-23 Mcnc Hybrid microelectromechanical system tunable capacitor and associated fabrication methods
US6396620B1 (en) 2000-10-30 2002-05-28 Mcnc Electrostatically actuated electromagnetic radiation shutter
WO2002061781A1 (fr) * 2001-01-30 2002-08-08 Advantest Corporation Commutateur et dispositif de circuit integre
US6768403B2 (en) * 2002-03-12 2004-07-27 Hrl Laboratories, Llc Torsion spring for electro-mechanical switches and a cantilever-type RF micro-electromechanical switch incorporating the torsion spring
US6771001B2 (en) 2001-03-16 2004-08-03 Optical Coating Laboratory, Inc. Bi-stable electrostatic comb drive with automatic braking
US6707355B1 (en) 2001-06-29 2004-03-16 Teravicta Technologies, Inc. Gradually-actuating micromechanical device
US6646215B1 (en) 2001-06-29 2003-11-11 Teravicin Technologies, Inc. Device adapted to pull a cantilever away from a contact structure
WO2003028059A1 (en) * 2001-09-21 2003-04-03 Hrl Laboratories, Llc Mems switches and methods of making same
US6787438B1 (en) 2001-10-16 2004-09-07 Teravieta Technologies, Inc. Device having one or more contact structures interposed between a pair of electrodes
ITTO20011142A1 (it) * 2001-12-07 2003-06-09 C R F Societa Con Sortile Per ,,micro-specchio con micro-otturatore a controllo elettrostatico, matrice di micro-specchi e spettrofotometro infrarosso comprendente tale m
EP1573894B1 (de) * 2002-12-10 2011-07-13 Epcos Ag Ansteuern eines arrays von elementen eines mikroelektromechanischen systems (mems)
US6842055B1 (en) * 2003-08-13 2005-01-11 Hewlett-Packard Development Company, L.P. Clock adjustment
US20050062565A1 (en) * 2003-09-18 2005-03-24 Chia-Shing Chou Method of using a metal platform for making a highly reliable and reproducible metal contact micro-relay MEMS switch
US6962832B2 (en) * 2004-02-02 2005-11-08 Wireless Mems, Inc. Fabrication method for making a planar cantilever, low surface leakage, reproducible and reliable metal dimple contact micro-relay MEMS switch
US7352266B2 (en) * 2004-02-20 2008-04-01 Wireless Mems, Inc. Head electrode region for a reliable metal-to-metal contact micro-relay MEMS switch
FR2868591B1 (fr) * 2004-04-06 2006-06-09 Commissariat Energie Atomique Microcommutateur a faible tension d'actionnement et faible consommation
JP4754557B2 (ja) * 2004-04-23 2011-08-24 リサーチ・トライアングル・インスティチュート フレキシブル静電アクチュエータ
US7448412B2 (en) * 2004-07-23 2008-11-11 Afa Controls Llc Microvalve assemblies and related structures and related methods
US7230513B2 (en) * 2004-11-20 2007-06-12 Wireless Mems, Inc. Planarized structure for a reliable metal-to-metal contact micro-relay MEMS switch
DE102005033801B4 (de) * 2005-07-13 2010-06-02 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Torsionsfeder für mikromechanische Anwendungen
US20070046214A1 (en) * 2005-08-26 2007-03-01 Pasch Nicholas F Apparatus comprising an array of switches and display
US8450902B2 (en) * 2006-08-28 2013-05-28 Xerox Corporation Electrostatic actuator device having multiple gap heights
US8120133B2 (en) * 2006-09-11 2012-02-21 Alcatel Lucent Micro-actuator and locking switch
JP4855233B2 (ja) * 2006-12-07 2012-01-18 富士通株式会社 マイクロスイッチング素子およびマイクロスイッチング素子製造方法
US20100013033A1 (en) * 2008-07-18 2010-01-21 Chia-Shing Chou Enablement of IC devices during assembly

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU601771A1 (ru) * 1976-02-05 1978-04-05 Предприятие П/Я В-8754 Электростатическое реле
FR2376548A1 (fr) * 1977-01-04 1978-07-28 Thomson Csf Dispositif bistable electrostatique
GB2095911B (en) * 1981-03-17 1985-02-13 Standard Telephones Cables Ltd Electrical switch device
JPS6046636U (ja) * 1983-09-05 1985-04-02 オムロン株式会社 多極リレ−
US4959515A (en) * 1984-05-01 1990-09-25 The Foxboro Company Micromechanical electric shunt and encoding devices made therefrom
CA1249620A (en) * 1985-01-21 1989-01-31 Takashi Oota Piezoelectric latching actuator having an impact receiving projectile
US4742263A (en) * 1986-08-15 1988-05-03 Pacific Bell Piezoelectric switch
US5258591A (en) * 1991-10-18 1993-11-02 Westinghouse Electric Corp. Low inductance cantilever switch
DE4205029C1 (en) * 1992-02-19 1993-02-11 Siemens Ag, 8000 Muenchen, De Micro-mechanical electrostatic relay - has tongue-shaped armature etched from surface of silicon@ substrate
JP3402642B2 (ja) * 1993-01-26 2003-05-06 松下電工株式会社 静電駆動型リレー
US5367136A (en) * 1993-07-26 1994-11-22 Westinghouse Electric Corp. Non-contact two position microeletronic cantilever switch

Also Published As

Publication number Publication date
US5629565A (en) 1997-05-13
EP0713235B1 (de) 1998-02-25
JPH08255546A (ja) 1996-10-01
DE4437261C1 (de) 1995-10-19
EP0713235A1 (de) 1996-05-22

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee